Active probe card

• US 5,323,107 A
• Filed: 10/02/1992
• Issued: 06/21/1994
• Est. Priority Date: 04/15/1991
• Status: Expired due to Fees

• Current Assignee: Hitachi America Limited (Hitachi, Ltd.)
• Original Assignee: Hitachi America Limited (Hitachi, Ltd.)
• Inventors: D'Souza, Daniel B.
• Primary Examiner(s): Karlsen, Ernest F.
• Application Number:
  US07/956,453
• Time in Patent Office: 627 Days
• Field of Search: 371/22.1, 371/22.3, 324/72.5, 324/158 P, 324/158 F
• US Class Current: 324/750.3
• CPC Class Codes: G01R 1/07342 the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
• CPC Class Codes: G01R 31/318533 using scanning techniques, e.g. LSSD, Boundary Scan, JTAG

Abstract

An active probe card having integral test circuitry directly attached to the probe card. The probe card includes a circuit board wherein the test circuitry is mounted on the circuit board. In an alternate embodiment, the probe card also includes an on-board signal selection device. The test circuitry applies test signals through probe pins to integrated circuit input pads and samples the test signal responses at integrated circuit output pads. The orientation of the test circuitry attached to the each pin, i.e., input or output, is field programmable. The test circuitry may use boundary scan testing methodology. The active probe card'"'"'s test circuitry may implement the test methodology of IEEE standard 1149.1 or analog test circuitry to determine the ac and dc parametric characteristics of the integrated circuit. The active probe card may include terminals to which Automatic Test Equipment (ATE) can be attached.

Claims

1. An active probe card for testing an integrated circuit comprising:

a circuit board;

test circuitry mounted on said circuit board having a plurality of test signal ports, said test circuitry including active circuit means for driving digital test signals and sample digital test signal response to and from said integrated circuit;

means, integral to said active probe card, for directly conductively connecting said plurality of test signal ports to an array of connectors of the integrated circuit under test

second connecting means, integral to said active probe card, for connecting second test signals to said test circuitry; and

said test circuitry further includes test signal selection means for selecting serial or second test signals to apply to said integrated circuit.

2. The active probe card of claim 1 wherein said test circuitry conforms to Institute of Electronic and Electrical Engineers standard 1149.1.

3. The active probe card of claim 1 wherein said conductively connecting means is a plurality of conductive traces connected to said plurality of test signal ports, a conductive pad connected to each conductive trace, a probe pin having one end conductively connected to said pad and its distal end extended to establish contact with one of the connectors in said connector array of the integrated circuit under test.

4. The active card of claim 3 wherein said circuit card defines a centrally located opening to provide access to the integrated circuit under test and said test circuitry, said conductive traces, and said conductive pads are arranged to surround said opening and said probe pin distal ends extend into said opening.

5. The active probe card of claim 1 wherein said test circuitry implements standardized boundary scan integrated circuit test techniques and methodology.

6. The active probe card of claim 1 wherein said test circuitry further includes bi-directional cells which are user oriented to cooperate with said integrated circuit and said circuit board.

7. The active probe card of claim 1 wherein said test circuitry is positioned on said circuit board to maintain a short distance between the integrated circuit under test and said test circuitry.

8. The active probe card of claim 1 wherein said test circuitry further comprises means for receiving control signals, clock and serial test data inputs and outputing serial test signal responses.

9. The active probe card of claim 1 wherein said active circuit means further comprises:

a. a plurality of registers for receiving said test data and test signal responses,

b. test means having drivers, receivers and boundary scan means for implementing standardized boundary scan integrated test techniques and methods,

c. interconnecting means connecting said registers, and for connecting said registers to said test means, and

d. a controller comprising means for controlling the movement of test data and test signal responses between said receiving and outputing means and said registers, and means for controlling the movement of test data and test signal responses between said registers and said test means.

10. The active probe card of claim 1 wherein said test circuitry further comprises means for receiving control signals, clock and serial test data inputs and outputing serial test signal responses.

11. The active probe card of claim 1 wherein said active circuit means further comprises:

a. a plurality of registers for receiving said test data and test signal responses,

b. test means having drivers, receivers and boundary scan means for implementing standardized boundary scan integrated test techniques and methods,

c. interconnecting means connecting said registers, and for connecting said registers to said test means, and

d. a controller comprising means for controlling the movement of test data and test signal responses between said receiving and outputing means and said registers, and means for controlling the movement of test data and test signal responses between said registers and said test means.