Fabrication method of superconductive thin film transistor

• US 5,326,746 A
• Filed: 03/24/1992
• Issued: 07/05/1994
• Est. Priority Date: 03/27/1991
• Status: Expired due to Fees

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Ohtani, Hisashi, Yamazaki, Shunpei, Miyanaga, Akiharu
• Primary Examiner(s): WILCZEWSKI, MARY A
• Application Number:
  US07/856,673
• Time in Patent Office: 833 Days
• Field of Search: 505/1, 505/701, 505/725, 437/21, 437/40, 427/63
• US Class Current: 505/330
• CPC Class Codes: H10N 60/207 Field effect devices
• CPC Class Codes: Y10S 505/701 Coated or thin film device, i.e. active or passive
• CPC Class Codes: Y10S 505/833 Thin film type

Abstract

A planar type superconductive thin film transistor using oxide superconductive materials and utilizing a long distance proximity effect is obtained with a good reproducibility.

In order to obtain the planar type superconductive transistor utilizing the long distance proximity effect, an interlayer separating film that plays a similar role with resists is used together with conventional resists in high temperature annealing process.

Claims

1. A method of fabricating a superconductive thin film transistor comprising the steps of:

forming a channel layer comprising a non-superconductive material having a perovskite structure on a substrate; and

forming source and drain regions comprising an oxide superconducting material on said substrate so that said channel layer contracts and intervenes between said source and drain regions, wherein a-b planes of said oxide superconducting material are substantially aligned with a surface of said substrate.

2. The method of claim 1 wherein said non-superconducting material comprises a material selected from the group consisting of strontium titanate and La₂ CuO₄.

3. The method of claim 1 wherein said substrate comprises a material selected from the group consisting of alumina, YSZ, M_g O, zirconia, yttria, SrTiO₃ and glass.

4. The method of claim 1 further comprising the steps of forming a gate electrode on said channel layer with a gate insulating therebetween.

5. A method for fabricating a superconductive thin film transistor utilizing oxide superconductive materials, comprising the steps of:

providing a non-light-transmitting insulating substrate;

forming a lamination layer on said substrate in an island shape, said lamination layer including a non-superconducting layer with a perovskite structure, an insulating film layer, and a conductor layer;

selectively etching sides of said conductor layer to form etched portions of said conductor layer;

depositing an interlayer separating film;

applying a positive resist on said interlayer separating film;

removing a selected portion of said positive resist and selectively etching said interlayer separating film, to leave said interlayer separating film around said conductor layer;

forming a film composed of an oxide superconductive material to produce source and drain regions;

removing portions of said oxide superconductive film formed on said interlayer separating film, by moving said interlayer separating film left at the etched portions of said conductor layer, to define said source and drain regions, said non-superconducting layer forming the channel region of the thin film transistor and said conductor layer forming the gate electrode of the thin film transistor.

6. The method of claim 5 wherein said interlayer separating film is composed of a material which has a melting point or sublimating point above a substrate temperature in a process for forming a film composed of an oxide superconductive material and which can be evaporated by heat annealing in 600°

to 1000°

C. after forming said oxide superconductive film.

7. The method of claim 5 wherein said interlayer separating film is composed of a material which has a melting point or sublimating point above a substrate temperature in a process for forming a film composed of any oxide superconductive material and which can be dissolved and removed by treating by a solvent after formation of said oxide superconductive film.

8. A method for fabricating a superconductive thin film transistor utilizing oxide superconductive materials, comprising the steps of:

providing a light-transmitting insulating substrate with front and back sides;

forming a lamination layer on the front of said substrate in an island shape, said lamination layer including a non-superconducting layer with a perovskite structure, an insulating film layer, and a conductor layer;

selectively etching sides of said conductor layer to form etched portions of said conductor layer;

depositing a carbon-based interlayer separating film on the front of said substrate;

applying a positive resist on said interlayer separating film;

irradiating light from the back of said substrate to sensitize said positive resist;

removing irradiated portions of the positive resist and selectively etching said interlayer separating film to leave said interlayer separating film around said conductor layer;

forming a film composed of an oxide superconductive material to produce source and drain regions;

removing portions of said oxide superconductive film formed on said interlayer separating film, by removing said interlayer separating film left at the etched portions of said conductor layer, to define said source and drain regions, said non-superconducting layer forming the channel region of the thin film transistor and said conductor layer forming the gate electrode of the thin film transistor.