Method for reducing, by a factor or 2.sup.-N, the minimum masking pitch of a photolithographic process

• US 5,328,810 A
• Filed: 11/25/1992
• Issued: 07/12/1994
• Est. Priority Date: 05/07/1990
• Status: Expired due to Term

• Current Assignee: Round Rock Research LLC
• Original Assignee: Micron Technology, Inc.
• Inventors: Lowrey, Tyler A., Cathey, David A., Chance, Randal W.
• Primary Examiner(s): Kight, III, John
• Assistant Examiner(s): BOYKIN, TERRESSA M
• Application Number:
  US07/981,976
• Time in Patent Office: 594 Days
• Field of Search: 430/313, 430/311, 430/314, 430/317, 430/322, 430/323, 430/329, 430/331
• US Class Current: 430/313
• CPC Class Codes: H01L 21/0271 comprising organic layers
• CPC Class Codes: H01L 21/0273 characterised by the treatment of photoresist layers
• CPC Class Codes: H01L 21/0337 characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
• CPC Class Codes: H01L 21/0338 Process specially adapted to improve the resolution of the mask
• CPC Class Codes: H01L 21/3086 characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
• CPC Class Codes: H01L 21/3088 Process specially adapted to improve the resolution of the mask
• CPC Class Codes: Y10S 148/106 Masks, special

Abstract

The process starts with a primary mask, which may be characterized as a pattern of parallel, photoresist strips having substantially vertical edges, each having a minimum feature width F, and being separated from neighboring strips by a minimum space width which is also approximately equal to F. From this primary mask, a set of expendable mandrel strips is created either directly or indirectly. The set of mandrel strips may be characterized as a pattern of parallel strips, each having a feature width of F/2, and with neighboring strips being spaced from one another by a space width equal to 3/2F. A conformal stringer layer is then deposited. The stringer layer material is selected such that it may be etched with a high degree of selectivity with regard to both the mandrel strips and an underlying layer which will ultimately be patterned using a resultant, reduced-pitch mask. The stringer layer is then anisotropically etched to the point where the top of each mandrel strip is exposed. The mandrel strips are then removed with an appropriate etch. A pattern of stringer strips remains which can then be used as a half-pitch mask to pattern the underlying layer. This process may also be repeated, starting with the half-pitch mask and creating a quarter-pitch mask, etc. As can be seen, this technique permits a reduction in the minimum pitch of the primary mask by a factor of 2^-N (where N is an integer 1, 2, 3, . . . ).

Claims

1. A method for manufacturing an integrated circuit, comprising the following sequence of steps:

(a) forming a primary mask strip, said mask strip having a first feature width;

(b) transforming the primary mask strip into a mandrel strip, said mandrel strip having substantially vertical sidewalls and a second feature width that is less than said first feature width;

(c) forming stringer strips on the sidewalls of said mandrel strip, each of said stringer strips having a third feature width; and

(d) removing the mandrel strip from between the stringer strips.

2. The method of claim 1, wherein said mask strip is formed using a photolithographic process, said photolithographic process operating at maximum resolution.

3. The method of claim 1, wherein the first feature width to second feature width ratio is 2:

1, and the second feature width to third feature width ratio is 1;

1.

4. The method of claim 1, wherein an expendable layer is formed on a substrate, the primary mask strip is applied superjacent the expendable layer, and the mandrel strip is formed by transferring the primary mask strip image to the expendable layer with a concomitant reduction of feature width.

5. The method of claim 4, wherein the primary mask strip is replicated in the expendable layer with an anisotropic etch, and the feature width reduction is accomplished by performing an isotropic etch of the expendable layer remnant.

6. The method of claim 5, wherein the isotropic etch which reduces feature width is performed with the primary mask strip in place.

7. The method of claim 6, wherein the feature width reduction is accomplished during the transfer of the primary mask strip image to the expendable layer with an anisotropic etch having an isotropic component.

8. The method of claim 1, wherein the primary mask strip has substantially vertical sidewalls and is formed from photoresist.

9. The method of claim 8, wherein the mandrel strip is formed directly from the primary mask strip by subjecting the primary mask strip to an isotropic etch.

10. The method of claim 9, wherein the stringers are formed from a material which is depositable at temperatures below that at which photoresist decomposes.

12. The method of claim 1, wherein:

the ratio of the first feature width to the first space width is substantially 1;

1;

the ratio of the second feature width to the second space width is substantially 1;

3; and

the ratio of the second feature width to the third feature width is 1;

1.

13. The method of claim 12, wherein the primary mask pattern is formed using the maximum resolution of an employed photolithographic process.

14. The method of claim 12, wherein an expendable layer is formed on a substrate, and the primary pattern is applied superjacent the expendable layer.

15. The method of claim 14, wherein the pattern of mandrel strips is formed by replicating the primary mask pattern in the expendable layer with an anisotropic etch, and subsequently performing an isotropic etch of the expendable layer remnants to achieve a feature width reduction and corresponding space augmentation.

16. The method of claim 15, wherein the isotropic etch which reduces feature width and augments space width is performed with the primary mask pattern in place.

17. The method of claim 14, wherein the pattern of mandrel strips is formed by subjecting the expendable layer to an anisotropic etch having an isotropic component, which transfers the primary mask pattern to the expendable layer with a concurrent feature width reduction and corresponding space augmentation.

18. The method of claim 12, wherein the strips of the primary mask pattern have substantially vertical sidewalls and are formed from photoresist.

19. The method of claim 18, wherein the pattern of mandrel strips is formed directly from the primary mask pattern by subjecting the primary mask pattern to an isotropic etch.

20. The method of claim 19, wherein the stringer strips are formed from a material which can be deposited at temperatures below that at which photoresist decomposes.

21. The method of claim 20, wherein the stringer strips are formed from polymeric material.

22. The method of claim 12, wherein the pattern of mandrel strips is formed with the following sequence of steps:

(a) replicating the primary pattern in the expendable layer to form a pattern of full-width expendable strips;

(b) forming spacer strips on the sidewalls of each expendable strip;

(c) depositing a layer of spin-on filler material;

(d) performing a planarization step which exposes the top of each expendable strip and each spacer strip; and

(e) removing the expendable strips and spacer strips to leave a pattern of mandrel strips formed from filler material.

11. A method for manufacturing an integrated circuit, comprising the following sequence of steps:

(a) forming a primary mask pattern, said mask pattern including a plurality of parallel mask strips, each mask strip having a first feature width, and each mask strip being separated from each adjacent strip by a first space width;

(b) transforming the primary mask pattern into a pattern of parallel mandrel strips, each mandrel strip having substantially vertical sidewalls, a second feature width that is less than said first feature width, and being separated from each adjacent mandrel strip by a second space width that is less than said first space width;

(c) forming stringer strips on the sidewalls of each mandrel strip, each of said stringer strips having a third feature width; and

(d) removing the mandrel strips to leave a pattern of stringer strips, each stringer strip being separated from each adjacent stringer strip by a third space width.

23. A method for halving the pitch of a primary mask, said method comprising the following sequence of steps:

(a) forming a primary mask pattern on an underlying layer, said primary mask pattern including a plurality of parallel photoresist strips of substantially identical feature width, said photoresist strips being equidistantly spaced from one another and having a feature width to space width ratio of substantially 1;

1;

(b) forming a pattern of parallel, equidistantly-spaced mandrel strips on a substrate, said mandrel strips having substantially identical feature widths, substantially vertical sidewalls, a pitch that is identical to the pitch of the primary pattern, and a feature width to space width ratio of substantially 1;

3;

(c) depositing a conformal, partially-expendable stringer layer on exposed regions of the substrate and on the top and sidewalls of each mandrel strip, said partially-expendable stringer layer having a thickness that is substantially equal to the width of each mandrel strip;

(d) anisotropically etching the partially-expendable stringer layer so as to form stringer strips on the sidewalls of each mandrel strip, and expose not only the top of each mandrel strip, but also regions of the substrate between each pair of stringer strip-widened mandrel strip; and

(e) removing the mandrel strips to leave a pattern of stringer strips, said pattern of stringer strips having half the pitch of the primary mask pattern.

24. The method of claim 23, wherein the primary mask pattern is formed using the maximum resolution of an employed photolithographic process.

25. The method of claim 23, wherein the underlying layer is an expendable layer that is formed on the substrate.

26. The method of claim 25, wherein the pattern of mandrel strips is formed by replicating the primary mask pattern in the expendable layer with an anisotropic etch, and subsequently performing an isotropic etch of the expendable layer remnants to achieve a feature width reduction and corresponding space augmentation.

27. The method of claim 26, wherein the isotropic etch which reduces feature width and augments space width is performed with the primary mask pattern in place.

28. The method of claim 25, wherein the pattern of mandrel strips is formed by subjecting the expendable layer to an anisotropic etch having an isotropic component, which transfers the primary mask pattern to the expendable layer with a concurrent feature width reduction and corresponding space augmentation.

29. The method of claim 23, wherein the strips of the primary mask pattern have substantially vertical sidewalls and are formed from photoresist.

30. The method of claim 29, wherein the pattern of mandrel strips is formed directly from the primary mask pattern by subjecting the primary mask pattern to an isotropic etch.

31. The method of claim 30, wherein the stringer strips are formed from a material which can be deposited at temperatures below that at which photoresist decomposes.

32. The method of claim 31, wherein the stringer strips are formed from polymeric material.