Vibration monolithic gyroscope

• US 5,329,815 A
• Filed: 12/19/1991
• Issued: 07/19/1994
• Est. Priority Date: 12/19/1991
• Status: Expired due to Term

• Current Assignee: Freescale Semiconductor, Inc. (NXP Semiconductors NV)
• Original Assignee: Motorola, Inc. (Motorola Solutions, Inc.)
• Inventors: Roop, Raymond M., Dunn, William C.
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US07/810,064
• Time in Patent Office: 943 Days
• Field of Search: 73/505, 73/510, 73/517 AV
• US Class Current: 73/504.12
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis

Abstract

A vibration gyroscope including a central mounting post and a planar mass symmetrically affixed thereto for vibrational movement. The post and mass are formed from a single layer of semiconductor material deposited on a substrate, such as silicon. Capacitive plates positioned below and above the mass, formed by depositing two additional layers of semiconductor material, are utilized for driving the mass and sensing vibration produced by the Coriolis effect.

Claims

1. A vibration monolithic gyroscope comprising:

a mounting post fixedly attached to a base and defining a first axis;

a mass, including a generally flat layer of material having opposed major surfaces, fixedly attached to the post for vibrational movement and positioned in a plane perpendicular to the post, the mass defining second and third axes mutually perpendicular to each other and to the first axis;

a plurality of arms, each affixed at one end to the post and at another end to the mass, the arms mounting the mass generally uniformly disposed about the mounting post and in spaced relation thereto for vibrational movement;

driving apparatus mounted adjacent to the mass for causing the mass to move in a vibrational motion about the second axis; and

sensing apparatus positioned adjacent to the mass for sensing movement about the third axis in response to movement of the gyroscope about the first axis.

2. A vibration monolithic gyroscope as claimed in claim 1 wherein the driving and sensing apparatus includes capacitive plates and driving and sensing circuitry connected to the capacitive plates, the driving and sensing circuitry being designed to time share the capacitive plates for both driving and sensing.

3. A vibration monolithic gyroscope as claimed in claim 2 wherein the driving and sensing apparatus further includes circuitry for sensing differential capacitance between selected ones of the capacitive plates during a first time period and applying an electrostatic force to the selected capacitive plates to center the mass during a second time period.

4. A vibration monolithic gyroscope as claimed in claim 2 wherein the driving and sensing apparatus further includes circuitry for applying an electrostatic force to selected capacitive plates to drive the mass in a first direction about the second axis and for sensing a first predetermined change of capacitance between selected ones of the capacitive plates and applying an electrostatic force to the selected capacitive plates to drive the mass in an opposite direction until a second predetermined change of capacitance is sensed.

5. A vibration monolithic gyroscope comprising:

a mounting post fixedly attached to a base and defining a first axis;

a mass positioned in a plane perpendicular to the post and spaced therefrom, the mass defining second and third axes mutually perpendicular to each other and to the first axis;

an arm affixed at one end to the post and at another end to the mass and mounting the mass for vibrational movement about the second axis;

driving apparatus mounted adjacent to the mass for causing the mass to move in a vibrational motion about the second axis; and

sensing apparatus positioned adjacent the mass for sensing movement about the third axis in response to movement of the gyroscope about the first axis.

6. A vibration monolithic gyroscope as claimed in claim 5 wherein the base is a semiconductor substrate with the post formed as an integral part thereof.

7. A vibration monolithic gyroscope as claimed in claim 5 wherein the mass, the arm and the mounting post are formed in a single polysilicon layer.

8. A vibration monolithic gyroscope as claimed in claim 5 wherein a portion of the driving apparatus and the sensing apparatus is formed on the substrate as a first polysilicon layer, the mass, the arm and the mounting post are formed as a second polysilicon layer and remaining portions of the driving apparatus and sensing apparatus are formed as a third layer.

9. A vibration monolithic gyroscope as claimed in claim 5 wherein the mass is generally uniformly disposed about the mounting post and in spaced relation thereto and a plurality of arms, each affixed at one end to the post and at another end to the mass, mount the mass for vibrational movement.

10. A vibration monolithic gyroscope as claimed in claim 5 wherein the mass is a generally flat layer of material having opposed major surfaces.

11. A vibration monolithic gyroscope as claimed in claim 10 wherein the driving and sensing apparatus include capacitive plates positioned parallel to and adjacent each major surface of the mass.

12. A vibration monolithic gyroscope as claimed in claim 11 wherein the driving and sensing apparatus further includes driving and sensing circuitry connected to the capacitive plates, the driving and sensing circuitry being designed to time share the capacitive plates for both driving and sensing.

13. A vibration monolithic gyroscope comprising:

a mounting post fixedly attached to a semiconductor substrate and forming an integral part therewith, the post defining a first axis;

a generally flat symmetrically shaped mass having a central opening therethrough and positioned symmetrically about the post, the mass being further positioned in a plane perpendicular to the post so as to define second and third axes mutually perpendicular to each other and to the first axis;

a plurality of arms affixed at one end to the post and at another end to the mass and mounting the mass for vibrational movement about the second axis;

driving plates mounted parallel to and adjacent the mass for causing the mass to move in a vibrational motion about the second axis; and

sensing plates positioned parallel to and adjacent the mass for sensing movement about the third axis in response to movement of the gyroscope about the first axis.

14. A method of operation of a vibration monolithic gyroscope including a mounting post fixedly attached to a base and defining a first axis, a mass fixedly attached to the post for vibrational movement and positioned in a plane perpendicular to the post, the mass defining second and third axes mutually perpendicular to each other and to the first axis, driving plates mounted adjacent to the mass for causing the mass to move in a vibrational motion about the second axis, and sensing plates positioned adjacent to the mass for sensing movement about the third axis in response to movement of the gyroscope about the first axis, the method of operation comprising the steps of:

vibrating the gyroscope about the second axis by applying an electrostatic force to the driving plates to drive the mass in a first direction about the second axis, sensing a first predetermined change of capacitance between the driving plates produced by movement of the mass in a first direction about the second axis and applying an electrostatic force to the driving plates to drive the mass in an opposite direction about the second axis until a second predetermined change of capacitance is sensed; and

sensing changes in differential capacitance between the sensing plates during a first time period, which changes represent movement of the gyroscope about the first axis, and applying an electrostatic force to the sensing plates to center the mass during a second time period.

15. A method of operation of a vibration monolithic gyroscope as claimed in claim 14 wherein the sensing and driving plates are the same plates and the vibrating and sensing steps are performed during different time periods.