Low reset voltage process for DMD

• US 5,331,454 A
• Filed: 01/16/1992
• Issued: 07/19/1994
• Est. Priority Date: 11/13/1990
• Status: Expired due to Term

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Hornbeck, Larry J.
• Primary Examiner(s): Arnold, Bruce Y.
• Assistant Examiner(s): Phan, James
• Application Number:
  US07/823,580
• Time in Patent Office: 915 Days
• Field of Search: 359/223-224, 359/230, 359/884, 358/233, 427/255.6, 427/162
• US Class Current: 359/224.1
• CPC Class Codes: B81B 2201/042 Micromirrors, not used as optical switches
• CPC Class Codes: B81B 3/0005 Anti-stiction coatings
• CPC Class Codes: B81C 1/0096 For avoiding stiction when the device is in use, i.e. after manufacture has been completed
• CPC Class Codes: B81C 2201/112 Depositing an anti-stiction or passivation coating, e.g. on the elastic or moving parts
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

It is possible to use an oriented monolayer to limit the Van der Waals forces between two elements by passivation. An oriented monolayer (34) is formed upon the landing electrode (10) of a spatial light modulator element. When the element is activated and deflects to come in contact with the landing electrode, the oriented monolayer decreases the Van der Waals forces and prevents the element from sticking to the electrode.

Claims

1. An electronic device comprising:

a) at least one address electrode in a substrate;

b) at least one landing electrode in said substrate adjacent said address electrode;

c) a support layer formed upon said substrate such that at least one gap exists in said layer exposing said address electrode and said landing electrode;

d) at least one hinge formed on said support layer such that said hinge is suspended over said gap;

e) at least one deflection element formed upon said at least one hinge, wherein said deflection element is positioned to be suspended over said gap; and

f) an oriented monolayer of perfluordecanoic acid (PFDA) formed upon said landing electrode so that when said address electrode is activated and said deflection element twists about said hinge and touches said landing electrode, said landing electrode and said deflection element do not stick together.