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Micromachined rate and acceleration sensor

  • US 5,331,853 A
  • Filed: 01/21/1992
  • Issued: 07/26/1994
  • Est. Priority Date: 02/08/1991
  • Status: Expired due to Term
First Claim
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1. A substrate for use in an acceleration and angular rate sensor comprising:

  • first and second accelerometers formed in said substrate, said first and second accelerometers having generally parallel force sensing axes;

    a dither frame formed in said substrate;

    mounting means formed in said substrate for mounting said first and second accelerometers to said dither frame, said mounting means adapted to allow said first and second accelerometers to dither along a dither axis, said dither axis being perpendicular to said force sensing axes of said first and second accelerometers;

    a linking means interconnecting said first and second accelerometers for allowing said first and second accelerometers to dither at the same frequency; and

    said linking means further providing means for imparting a reaction force on said first accelerometer along said dither axis when an action force is imparted on said second accelerometer along said dither axis, said action and reaction forces being of substantially equal magnitude and being oppositely directed.

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