Unmanned conveying device in clean room

• US 5,332,013 A
• Filed: 03/13/1992
• Issued: 07/26/1994
• Est. Priority Date: 03/15/1991
• Status: Expired due to Term

• Current Assignee: Muratec Automation Co., Ltd. (Muratec)
• Original Assignee: Shinko Electric Industries Company Limited (Fujitsu Limited)
• Inventors: Sugita, Masanao, Kawano, Hitoshi, Yamashita, Teppei
• Primary Examiner(s): JACYNA, J CASIMER
• Application Number:
  US07/850,668
• Time in Patent Office: 865 Days
• Field of Search: 141/1, 141/4, 141/47, 141/48, 141/59, 141/67, 141/69, 141/70, 141/85, 141/89, 141/91-94, 141/197, 141/98, 141/231, 141/312, 141/346, 141/347, 141/367, 141/351-354 , 141/360-362, 141/383, 141/386, 141/392, 141/DIG. 2, 250/492.2-492.24, 250/441.11, 250/442.11, 222/152, 414/217, 414/221, 414/222, 414/225, 414/226, 901/1, 191/2-5, 191/7, 191/1 R, 180/167, 180/168, 137/551, 137/560, 137/614, 285/119, 118/719, 204/298, 204/2.5, 422/4, 422/9, 422/40, 320/2, 340/632, 340/636, 340/679, 340/686, 340/687, 364/424.01, 364/424.02
• US Class Current: 141/98
• CPC Class Codes: H01L 21/67389 characterised by atmosphere control
• CPC Class Codes: H01L 21/67393 characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
• CPC Class Codes: H01L 21/67724 by means of a cart or a vehicule
• CPC Class Codes: H01L 21/67736 Loading to or unloading from a conveyor

Abstract

An unmanned conveying device for a clean room is capable of restraining a spontaneous oxide film from growing in case that an unmanned carriage is obliged to stop for a long time due to its own cause of a cause at a destination spot while it conveys a semiconductor wafer from one spot to the destination spot. It is a first aspect of the invention to provide the unmanned conveying device which is self-propelled for conveying an object from a ground facility to a destination spot while loading an object to be conveyed thereon, characterized in that the object is accommodated in a container and the container is connected to an inert gas reservoir through a gas supply passage so that the atmosphere in the container can be replaced by a nitrogen gas. It is a second aspect of the invention to provide an unmanned conveying device for a clean room provided with a container for accommodating an object to be conveyed therein, the container being connected to an inert gas reservoir through a gas supply passage so that the air in the container can be replaced by a nitrogen gas, characterized in that the unmanned conveying device has a coupler unit mounted thereon and connected to the gas supply passage and the inert gas reserving source is located on the ground and connected to a coupler unit of a coupler device on the ground through a pipe and the gas supply passage is connected to the inert gas reservoir through both coupler unit.

Claims

1. An apparatus for a clean room, comprising:

an unmanned conveying device provided with a container for accommodating an object to be conveyed thereon, the container being connected to an inert gas source through a gas supply passage so that the atmosphere in the container can be replaced by a nitrogen gas, wherein the unmanned conveying device has a coupler device with a first coupler unit which is connected to the gas supply passage and the inert gas source is located on the ground and connected to a second coupler unit of a coupler device on the ground through a pipe, the gas supply passage being connected to the inert gas source when the coupler units are releasably coupled to each other, wherein the coupler device on the ground has a reciprocating mechanism for permitting the second coupler unit thereof to reciprocate relative to the first coupler unit of the coupler device on the unmanned conveying device, wherein the second coupler unit on the ground has first connectors electrically coupled to a first circuit disposed in the coupler device on the ground and has a first gas passage coupling which communicates with the inert gas source, wherein the first coupler unit of the coupler device on the unmanned conveying device has second connectors electrically coupled to a second circuit disposed in the unmanned conveying device and engageable with the first connector sand has a second gas passage coupling which communicates with the gas supply passage and is engageable with the first gas passage coupling, and wherein when the first and second coupler units are releasably coupled the gas supply passage communicates with the inert gas source through the first and second gas passage couplings and the first and second circuits are electrically coupled through the first and second connectors.

2. An apparatus according to claim 1 further comprising a timer for measuring a time interval during which the inert gas is supplied to the container, the atmosphere in the container being substantially replaced by the inert gas when the time interval ends.

3. An apparatus according to claim 1, including means for closing the gas supply passage when the content of the oxygen or the inert gas in the container reaches a prescribed value after the gas supply passage is opened.

4. An apparatus according to claim 1, wherein the gas supply passage includes a solenoid valve, and including means for partially closing the solenoid valve so as to supply a small amount of gas therethrough after the atmosphere in the container is substantially completely replaced by the inert gas.

5. An apparatus according to claim 1, wherein the gas supply passage includes a solenoid valve provided with main and auxiliary valves, wherein the main valve is open when the inert gas is being supplied to the container to replace the air therein, and wherein the main valve is closed and the auxiliary valve is open and supplies a small amount of gas to the container after the atmosphere in the container is substantially completely replaced by the inert gas.

6. An unmanned conveying device according to claim 1, wherein the first and second gas passage couplings have means for effecting a check valve function.

7. An apparatus according to claim 1, wherein the first circuit in the coupler device on the ground has a gas passage connection detector which responds to electrical connection between the first connectors on the ground and the second connectors on the unmanned conveying device by issuing a detecting signal, and has a closing valve for permitting the second coupler unit to communicate with the inert gas reservoir, the closing valve being opened upon reception of the detecting signal issued by the gas passage connection detector.

8. An apparatus according to claim 7, wherein the coupler device on the ground has a controller which can effect radio communication between the unmanned conveying device and itself and which can control the reciprocating mechanism and the closing valve based on an instruction issued by the unmanned conveying device.

9. An apparatus according to claim 1, wherein the unmanned conveying device has a battery mounted thereon which can be charged by an automatic charging station on the ground, the second coupler unit of the coupler device on the ground being installed in the automatic charging station, and the first and second connectors of the coupler devices on the ground and the unmanned conveying device having respective charging connectors which are respectively coupled to the automatic charging station and the battery.

10. An apparatus for a clean room, comprising:

an unmanned conveying device provided with a container for accommodating an object to be conveyed thereon, the container being connected to an inert gas source through a gas supply passage so that the atmosphere in the container can be replaced by a nitrogen gas, wherein the unmanned conveying device has a coupler device with a first coupler unit which is connected to the gas supply passage and the wherein the inert gas source is located on the ground and connected to a second coupler unit of a coupler device on the ground through a pipe, the gas supply passage being connected to the inert gas source when the coupler units are coupled to each other, wherein the unmanned conveying device has a battery mounted thereon which can be charged by an automatic charging station on the ground, the second coupler unit of the coupler device on the ground being installed in the automatic charging station, and the second and first coupler units of the coupler devices on the ground and the unmanned conveying device having respective charging connectors which are respectively coupled to the automatic charging station and the battery and having respective gas passage couplings which are respectively coupled to the inert gas source and the gas supply passage, including a closing valve which controls flow of the inert gas through the pipe, and wherein the second and first coupler units of the coupler devices on the ground and the unmanned conveying device are provided with coupling verification means which is responsive to a distance between the coupler devices being less than a distance therebetween when the charging connectors and the gas passage couplings thereon first engage each other for issuing an output for controlling the closing valve to facilitate a flow of the inert gas through the pipe.