Lift fingers for substrate processing apparatus

• US 5,332,443 A
• Filed: 06/09/1993
• Issued: 07/26/1994
• Est. Priority Date: 06/09/1993
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Clark, Shane D., Chew, Sandy M.-S., Rose, Ron L., DuBois, Dale R., Morrison, Alan F., Leung, Cissy, Wong, Manus K.
• Primary Examiner(s): BUEKER, RICHARD R
• Application Number:
  US08/073,958
• Time in Patent Office: 412 Days
• Field of Search: 118/715, 118/728, 118/729, 156/345
• US Class Current: 118/729
• CPC Class Codes: C23C 16/4583 the substrate being supported substantially horizontally
• CPC Class Codes: H01L 21/67103 mainly by conduction
• CPC Class Codes: H01L 21/68742 characterised by a lifting arrangement, e.g. lift pins
• CPC Class Codes: H01L 21/68785 characterised by the mechanical construction of the susceptor, stage or support

Abstract

A substrate lifting apparatus for use in a substrate processing apparatus which includes a thermal reactor having a substrate processing chamber and a substrate support located in the chamber. The lifting apparatus consists of a generally circular shaped support with four seats formed therein; four substrate lifting elements, each having a substrate engaging end and a securing tab sized to be received in a seat; a fastener, associated with each lifting element, which secures the tab into the seat; and an adjuster, associated with each lifting element, located between the tab and the seat. When the tab is secured in the seat and the adjuster is operated, the lifting element is caused to move in a plane parallel to a plane formed through the center of the fastener and the adjuster.

Claims

1. A substrate processing apparatus comprising:

a thermal reactor including a substrate processing chamber; and

lifting apparatus for lifting a substrate within the chamber including

(i) at least one substrate lifting element having a substrate engaging end and a securing tab;

(ii) a lifting element support having a seat formed therein, wherein the seat is sized to receive the tab of the lifting element;

(iii) a fastener for securing the tab into the seat; and

(iv) an adjuster located between the tab and the seat and operable to adjust the position of the substrate engaging end,

whereby, when the tab is secured in the seat and the adjuster is operated, the lifting element is caused to move in a plane parallel to a plane formed through the center of the fastener and the adjuster.

2. A substrate processing apparatus as recited in claim 1 further comprising:

a substrate support located inside the processing chamber and including a substrate supporting surface,

whereby the supporting surface supports the substrate and the lifting apparatus operates to lift the substrate and hold it clear of the substrate support.

3. A substrate processing apparatus as recited in claim 2, wherein the lifting element support is of generally circular configuration and has at least three seats formed therein, each seat being for receiving a tab associated with a lifting element.

4. A substrate processing apparatus as recited in claim 3, wherein the substrate support located inside the processing chamber has apertures formed therethrough, each aperture being sized to receive the substrate engaging end of the lifting element.

5. A substrate processing apparatus as recited in claim 4, further comprising:

(i) a support for supporting the lifting element support in a position below the substrate support; and

(ii) a drive for moving the lifting element support relative to the substrate support,

whereby the substrate engaging end of each lifting element can be moved through an aperture formed in the substrate support to lift a substrate, supported on the supporting surface, clear of the substrate support.

6. A substrate processing apparatus as recited in claim 1, wherein the adjuster operates to pivot the tab in the seat to cause the lifting element to move in a plane parallel to the plane through the center of the fastener and the adjuster.

7. A substrate processing apparatus as recited in claim 6, wherein each lifting element has a generally U-shaped configuration having the substrate engaging end at the tip of one of the legs of the U-shape and the securing tab located at the end of the other leg of the U-shape.

8. A substrate processing apparatus as recited in claim 7, wherein the fastener includes an elongate fastening element which passes through the tab and the body of the lifting element support, and the adjuster includes an elongate, threaded element which, on rotation, is adjustable in height to vary the spacing between the tab and the seat thereby causing the lifting element to move in a plane parallel to a plane defined by the longitudinal axes of the fastening element and the threaded element respectively.

9. A substrate lifting apparatus for use in a substrate processing apparatus which includes a thermal reactor having a substrate processing chamber and a substrate support located in the chamber, the lifting apparatus comprising:

(i) a lifting element support having at least one seat formed therein;

(ii) at least one substrate lifting element, each lifting element having a substrate engaging end and a securing tab sized to be received in the seat;

(iii) a fastener, associated with each lifting element, for securing the tab into the seat; and

(iv) an adjuster, associated with each lifting element, located between the tab and the seat and operable to adjust the position of the substrate engaging end,

whereby, when the tab is secured in the seat and the adjuster is operated, the lifting element is caused to move in a plane parallel to a plane formed through the center of the fastener and the adjuster.

10. A substrate lifting apparatus as recited in claim 9, wherein the adjuster operates to cause the tab to pivot in the seat to cause the lifting element to move in a plane parallel to the plane through the center of the fastener and the adjuster.

11. A substrate lifting apparatus as recited in claim 10, wherein the lifting element support is of generally circular configuration and has at least three seats formed therein, each seat being for receiving a tab associated with a lifting element.

12. A substrate lifting apparatus as recited in claim 11, wherein each lifting element has a generally U-shaped configuration having the substrate engaging end at the tip of one of the legs of the U-shape and the securing tag located at the end of the other leg of the U-shape.

13. A substrate lifting apparatus as recited in claim 12, wherein the fastener includes an elongate fastening element which passes through the tab and the body of the lifting element support, and the adjuster includes an elongate, threaded element which, on rotation, is adjustable in height to vary the spacing between the tab and the seat thereby causing the lifting element to move in a plane parallel to a plane defined by the longitudinal axes of the fastening element and the threaded element respectively.

14. A substrate lifting apparatus as recited in claim 13, further comprising a fastener cover for covering the fastener.

15. A substrate lifting apparatus as recited in claim 14, wherein the tab has an access aperture formed therein through which the adjuster can be accessed.

16. A substrate lifting apparatus as recited in claim 15, wherein the fastener cover includes a tab cover dimensioned to fit over the tab and thereby cover one end of the fastener and a cover plate which, in use, attaches to the lifting element support and covers the other end of the fastener.

17. A substrate lifting apparatus as recited in claim 16, wherein the fastener and the adjuster are made of a metal and the fastener cover, the lifting element and the lifting element support are made of a ceramic.

18. A substrate lifting apparatus as recited in claim 9, wherein the fastener includes bias means for biasing the tab into the seat.

19. A substrate lifting apparatus as recited in claim 18, wherein the adjuster operates to cause the tab to pivot in the seat to cause the lifting element to move against the bias means and in a plane parallel to the plane through the center of the fastener and the adjuster.

20. A substrate lifting apparatus as recited in claim 19, wherein the fastener includes an elongate fastening element which passes through the tab and the body of the lifting element support, and the adjuster includes an elongate, threaded element which, on rotation, is adjustable in height to vary the spacing between the tab and the seat thereby causing the lifting element to move in a plane parallel to a plane defined by the longitudinal axes of the fastening element and the threaded element respectively.