Method and apparatus for predicting end-of-life of a consumable in a fluid purification system

• US 5,334,237 A
• Filed: 02/26/1993
• Issued: 08/02/1994
• Est. Priority Date: 02/26/1993
• Status: Expired due to Fees

• Current Assignee: SAES Pure Gas (Entegris Incorporated)
• Original Assignee: SAES Pure Gas (Entegris Incorporated)
• Inventors: Lorimer, D'Arcy H.
• Primary Examiner(s): SPITZER, ROBERT H
• Application Number:
  US08/025,376
• Time in Patent Office: 522 Days
• Field of Search: 55/210, 55/270, 55/274, 95/1, 95/23, 95/25, 95/90, 96/109, 96/108
• US Class Current: 95/25
• CPC Class Codes: B01D 53/0454 Controlling adsorption controlling temperature swing adsorption B01D53/0462, controlling pressure swing adsorption B01D53/047
• CPC Class Codes: B01D 53/30 Controlling by gas-analysis apparatus regulating non electrical variables in general G05D

Abstract

A method for predicting end-of-life of a system consumable in a fluid purification system characterized by the steps of (a) coupling a model consumable to the fluid purification system which has comparable characteristics but substantially less time capacity than the system consumable; (b) diverting a portion of an unpurified fluid which could otherwise flow into the system consumable into the model consumable; and (c) analyzing the model consumable to predict the end-of-life of the system consumable. Preferably, the time capacity of the model consumable to remove impurities from the fluid is a small fraction, e.g. 25%-50%, of the capacity of the system consumable. A fluid purification system of the present invention is characterized by an inlet, an outlet, a system consumable coupled between the inlet and the outlet, a model consumable having comparable characteristics but substantially less time capacity than the system consumable, and a diverting mechanism coupled between the inlet and the model consumable for diverting a portion of an unpurified fluid to model consumable. The diverting mechanism preferably includes a mass flow meter (MFM) coupled in-line with the system consumable which is coupled to and controls a mass flow controller (MFC) which is coupled in-line with the model consumable. The model consumable is analyzed to predict the end-of-life of the system consumable.

Claims

1. A method for predicting the end-of-life of a system consumable in a system for purifying an unpurified fluid, the method comprising the steps of:

coupling a model consumable to a fluid purification system which has comparable characteristics but substantially less capacity than a system consumable in said fluid purification system;

diverting a portion of the unpurified fluid which could otherwise flow into said system consumable into said model consumable, the mass flow rate of the diverted portion being controlled by a mass flow controller; and

analyzing said model consumable to predict the end-of-life of said system consumable.

2. A method for predicting end-of-life of a system consumable in a fluid purification system as recited in claim 1 wherein said fluid purification system comprises a gas purification system, and wherein said system consumable and said model consumable comprise getter material.

3. A method for predicting end-of-life of a system consumable in a fluid purification system as recited in claim 1 wherein said step of diverting a portion of an unpurified fluid comprises diverting a portion of unpurified fluid into said model consumable which is quantitatively related to the flow of unpurified fluid into said system consumable.

4. A method for predicting end-of-life of a system consumable in a fluid purification system as recited in claim 1 wherein said step of analyzing said model consumable comprises removing said model consumable from said fluid purification system and analyzing said model consumable.

5. A method for predicting end-of-life of a system consumable in a fluid purification system as recited in claim 4 further comprising replacing said removed model consumable with a replacement model consumable.

6. A method for predicting end-of-life of a system consumable in a fluid purification system as recited in claim 4 wherein said removed model consumable is analyzed by a destructive chemical analysis.

7. A method for predicting end-of-life of a system consumable in a fluid purification system as recited in claim 1 wherein said step of analyzing said model consumable comprises monitoring the resistance of consumable material within said model consumable.

8. A method for predicting end-of-life of a system consumable in a fluid purification system as recited in claim 1 wherein said step of analyzing said model consumable comprises monitoring fluid flowing out of said model consumable.

9. A method for predicting the end-of-life of a system consumable held in a system column of a system for purifying an unpurified fluid, the method comprising the steps of:

coupling a model consumable in a model column to a fluid purification system, the model consumable having comparable characteristics but substantially less capacity than a system consumable in said fluid purification system, the model column having substantially the same geometry as the system column and having a diameter and length scaled with those of the system column;

diverting a portion of the unpurified fluid which could otherwise flow into said system consumable into said model consumable; and

analyzing said model consumable to predict the end-of-life of said system consumable.

10. A method for predicting end-of-life of a system consumable as recited in claim 9 wherein said fluid purification system comprises a gas purification system, and wherein said system consumable and said model consumable comprise getter material.

11. A method for predicting end-of-life of a system consumable as recited in claim 9 wherein said step of analyzing said model consumable comprises removing said model consumable from said fluid purification system and analyzing said model consumable.

12. A method for predicting end-of-life of a system consumable as recited in claim 9 wherein said step of analyzing said model consumable comprises monitoring the resistance of consumable material within said model consumable.

13. A method for predicting end-of-life of a system consumable as recited in claim 9 wherein said step of analyzing said model consumable comprises monitoring fluid flowing out of said model consumable.

14. A method for monitoring a getter purification system comprising the steps of:

coupling an inlet of a system getter column to a source of unpurified gas, said system getter column containing a first quantity of getter material;

coupling an inlet of a model getter column to said source of unpurified gas in parallel with said system getter column, said model getter column containing a second quantity of getter material which is substantially less in quantity than said first quantity of getter material within said system getter column;

heating said first quantity of getter material within said system getter column with a first heater to a system getter operating temperature which is substantially greater than room temperature;

heating said second quantity of getter material within said model getter column with a second heater to a model getter operating temperature which is substantially greater than room temperature;

flowing unpurified gas into said system getter column having said heated first quantity of getter material and into said model getter column having said heated second quantity of getter material such that substantially more unpurified gas flows into said system getter column than said model getter column; and

analyzing said second quantity of getter material within said model getter column to predict an end-of-life of said first quantity of getter material with said system getter column.

15. A method for monitoring a getter purification system as recited in claim 14 wherein said step of flowing unpurified gas includes a step of passing the gas through a mass flow controller coupled between said inlet of the system getter column to said source of unpurified gas.

16. A method for monitoring a getter purification system as recited in claim 14 wherein said step of flowing unpurified gas includes a step of passing the gas through a mass flow controller coupled between said inlet of the model getter column to said source of unpurified gas.

17. A fluid purification system comprising:

an inlet adapted to be coupled to a source of unpurified fluid;

an outlet;

a system consumable coupled between said inlet and said outlet such that unpurified fluid flowing through said system consumable is purified by said system consumable;

a model consumable having comparable characteristics but substantially less capacity than said system consumable; and

diverting means coupled between said inlet and said model consumable for diverting a portion of said unpurified fluid which could otherwise flow through said system consumable into said model consumable, wherein said means for diverting a portion of said unpurified fluid further comprises a mass flow controller (MFC) coupled between said inlet and said model consumable.

18. A fluid purification system as recited in claim 17 wherein said means for diverting a portion of said unpurified fluid further comprises a mass flow meter (MFM) coupled between said inlet and said system consumable.

19. A fluid purification system as recited in claim 18 wherein said MFM is coupled to said MFC such that the rate of flow of unpurified fluid into said model consumable is controlled by the rate of flow of unpurified fluid into said system consumable.

20. A fluid purification system as recited in claim 19 wherein said MFM is coupled to said MFC by an apparatus employing digital logic.

21. A fluid purification system as recited in claim 17 further comprising coupling means for releasably coupling said model consumable to said diverting means.

22. A fluid purification system as recited in claim 17 further comprising fluid analysis means coupled to an outlet of said model consumable for detecting impurity levels in fluids exiting said model consumable.

23. A fluid purification system as recited in claim 17 further comprising end-of-life detection means adapted to measure the resistance of said model consumable, wherein said model consumable comprises getter material.

24. A fluid purification system as recited in claim 17 wherein said model consumable has a time capacity to remove impurities from said fluid which is less than or equal to about 50% of the time capacity to remove impurities of said system consumable.

25. A fluid purification system as recited in claim 24 wherein said model consumable has a time capacity to remove impurities from said fluid which is less than or equal to about 25% of the time capacity to remove impurities of said system consumable.

26. A fluid purification system comprising:

an inlet adapted to be coupled to a source of unpurified fluid;

an outlet;

a system consumable held in a system column coupled between said inlet and said outlet such that unpurified fluid flowing through said system consumable is purified by said system consumable;

a model consumable held in a model column having substantially the same geometry as the system column and having a length and diameter scaled with those of the system column, the model consumable having comparable characteristics but substantially less capacity than said system consumable; and

diverting means coupled between said inlet and said model consumable for diverting a portion of said unpurified fluid which could otherwise flow through said system consumable into said model consumable.

27. A fluid purification system as recited in claim 26 wherein said system consumable and said model consumable comprise getter material, and wherein said unpurified fluid comprises a mixture of gasses.

28. A fluid purification system as recited in claim 27 further comprising end-of-life detection means adapted to measure the resistance of getter material within said model consumable.

29. A fluid purification system as recited in claim 26 wherein said means for diverting a portion of said unpurified fluid further comprises a mass flow controller (MFC) coupled between said inlet and said model consumable, a mass flow meter (MFM) coupled between said inlet and said system consumable, wherein said MFM is coupled to said MFC such that the rate of flow of unpurified fluid into said model consumable is controlled by the rate of flow of unpurified fluid into said system consumable.

30. A getter purification system comprising:

a system getter column coupled to a source of unpurified gas, said system getter column containing a first quantity of getter material;

a model getter column containing a second quantity of getter material which is substantially less in quantity than said first quantity of getter material within said system getter column;

coupling means coupling said model getter column to said source of unpurified gas such that substantially less gas flows into said model getter column than said system getter column;

a first heater coupled to said system getter column to heat said first quantity of getter material to a system getter operating temperature which is substantially greater than room temperature;

a second heater coupled to said model getter column to heat said second quantity of getter material to a model getter operating temperature which is substantially greater than room temperature;

analyzing means for analyzing said second quantity of getter material within said model getter column to predict an end-of-life of said first quantity of getter material with said system getter column.

31. A getter purification system as recited in claim 30 wherein said coupling means comprises a mass flow controller coupled between said source of unpurified gas and said model getter column.

32. A getter purification system as recited in claims 31 wherein said coupling means comprises a mass flow meter coupled between said source of unpurified gas and said system getter column.

33. A getter purification system as recited in claim 30 wherein said model getter column has a length and diameter scaled with those of the system getter column.

34. A getter purification system as recited in claim 30 wherein the operating temperatures of said system and model getter columns are held at about the same value by said first and second heaters.