Method of fabricating of diamond moth-eye surface

• US 5,334,342 A
• Filed: 05/04/1993
• Issued: 08/02/1994
• Est. Priority Date: 08/16/1991
• Status: Expired due to Term

• Current Assignee: The Boeing Co.
• Original Assignee: Rockwell International Corporation
• Inventors: Flintoff, John F., DeNatale, Jeffrey F., Hood, Patrick J., Harker, Alan B.
• Primary Examiner(s): King, Roy V.
• Application Number:
  US08/058,521
• Time in Patent Office: 455 Days
• Field of Search: 427/249, 427/122, 427/309, 427/402, 156/652, 156/653, 156/DIG. 68, 156/306.6, 156/308.2, 264/317, 423/446, 437/228
• US Class Current: 264/317
• CPC Class Codes: B81B 2201/035 Microgears
• CPC Class Codes: B81B 2201/047 Optical MEMS not provided for in B81B2201/042 - B81B2201/045
• CPC Class Codes: B81C 1/00111 Tips, pillars, i.e. raised structures microneedles A61M37/0015
• CPC Class Codes: B81C 1/00198 comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements
• CPC Class Codes: B81C 1/0038 Processes for creating layers of materials not provided for in groups B81C1/00357 - B81C1/00373
• CPC Class Codes: B81C 2201/0191 Transfer of a layer from a carrier wafer to a device wafer
• CPC Class Codes: B81C 2201/056 Releasing structures at the end of the manufacturing process
• CPC Class Codes: C23C 16/0227 by cleaning or etching
• CPC Class Codes: C23C 16/0272 Deposition of sub-layers, e.g. to promote the adhesion of the main coating
• CPC Class Codes: C23C 16/274 using microwave discharges
• CPC Class Codes: C23C 16/277 using other elements in the gas phase besides carbon and hydrogen; using other elements besides carbon, hydrogen and oxygen in case of use of combustion torches; using other elements besides carbon, hydrogen and inert gas in case of use of plasma jets
• CPC Class Codes: G02B 1/02 made of crystals, e.g. rock-salt, semi-conductors G02B1/08 takes precedence
• CPC Class Codes: G02B 1/118 having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures
• CPC Class Codes: G02B 1/14 Protective coatings, e.g. hard coatings
• CPC Class Codes: G03F 7/00 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor using photoresist structures for special production processes, see the relevant places, e.g. B44C, H01L, e.g. H01L21/00, H05K
• CPC Class Codes: Y10T 428/30 Self-sustaining carbon mass or layer with impregnant or other layer

Abstract

A high temperature resist process is combined with microlithographic patterning for the production of materials, such as diamond films, that require a high temperature deposition environment. For diamond films, a high temperature silicon nitride resist can be used for microlithographic patterning of a silicon substrate to provide a uniform distribution of diamond nucleation sites and to improve diamond film adhesion to the substrate. A fine-grained nucleation geometry, established at the nucleation sites, is maintained as the diamond film is deposited over the entire substrate after the silicon nitride resist is removed. The process can be extended to form surface relief features, such as "moth eye" surfaces, and microstructures of fine-grained polycrystalline diamond, such as rotatable microgears and surface relief patterns, that have the desirable characteristics of hardness, wear resistance, thermal conductivity, chemical inertness, anti-reflectance, and a low coefficient of friction.

Claims

1. A method of forming a diamond moth eye surface, comprising the steps of:

etching a substrate to produce cavities in said substrate, said cavities forming a surface

relief pattern comprising an inverse of said diamond moth eye surface;

nucleating and growing a polycrystalline diamond film on said substrate, said diamond

film filling said cavities;

bonding an optical material to said diamond film; and

removing said substrate from said diamond film to expose said diamond moth eye

surface, said moth eye surface providing an effective refractive index gradient between the atmosphere and said optical material bonded to said diamond film.

2. The method of claim 1, wherein said etching step includes etching a substrate selected from the group of materials consisting of Si and Ge.

3. The method of claim 1, wherein said bonding step includes bonding said diamond film to an optical material selected from the group of materials consisting of Ge, ZnS, and ZnSe.

4. The method of claim 1, wherein said bonding step includes bonding said optical material to said diamond film with a refractive index matched material.

5. The method of claim 4, wherein said bonding step includes bonding with a refractive index matched Chalcogenide glass.

6. The method of claim 5, wherein said bonding step includes bonding with a Chalcogenide glass selected from the group of materials consisting of As₂ S₃ and As₂ Se₃.

7. The method of claim 1, further comprising the step of seeding said etched substrate with diamond particles prior to growing said diamond film.

8. The method of claim 1, wherein said etching step includes etching said substrate anisotropically to form said cavities having an etch profile selected from the group consisting of inverted cones, pyramids, spheres, and pillars.

17. The method of claim 6, wherein said bonding step includes bonding said diamond film to an optical material selected from the group of materials consisting of Ge, ZnS, and ZnSe.

9. A method of forming a diamond moth eye surface on an optical material, comprising the steps of:

providing a substrate;

etching said substrate anisotropically to produce cavities in said substrate, said cavities forming a surface relief pattern having an etch profile comprising an inverse of said diamond moth eye surface;

seeding said etched substrate with diamond particles;

nucleating and growing a polycrystalline diamond film on said substrate, said diamond film covering said substrate and filling said cavities;

bonding said optical material to said diamond film with a refractive index matched cohesive material; and

removing said substrate from said diamond film to expose said diamond moth eye surface to the atmosphere, said moth eye surface having dimensions for providing an effective refractive index gradient between the atmosphere and said optical material bonded to said diamond film.

10. The method of claim 9, wherein said step of providing a substrate comprises selecting a substrate from the group of materials consisting of Si and Ge.

11. The method of claim 9, wherein said bonding step includes bonding said diamond film to an optical material selected from the group of materials consisting of Ge, ZnS, and ZnSe.

12. The method of claim 9, wherein said bonding step comprises bonding with a refractive index matched Chalcogenide glass.

13. The method of claim 12, wherein said bonding step comprises bonding with a Chalcogenide glass selected from the group of materials consisting of As₂ S₃ and As₂ Se₃.

14. The method of claim 9, wherein said etching step includes etching said substrate to form said cavities having said etch profile selected from the group consisting of inverted cones, pyramids, spheres, and pillars.

15. A method of forming a thick film polycrystalline diamond moth eye surface on an optical material, comprising the steps of:

providing a substrate for supporting growth of said diamond film;

etching said substrate anisotropically to produce cavities in said substrate, said cavities forming a surface relief pattern having an etch profile comprising an inverse of said diamond moth eye surface;

seeding said etched substrate with sub-micron diamond particles;

nucleating and growing said polycrystalline diamond film on said substrate, said diamond film covering said substrate and filling said cavities;

bonding said optical material to said diamond film with a refractive index matched cohesive material; and

removing said substrate from said diamond film to expose said diamond moth eye surface to the atmosphere, said moth eye surface having dimensions providing an effective refractive index gradient between the atmosphere and said optical material bonded to said diamond film.

16. The method of claim 15, wherein said step of providing a substrate comprises selecting a substrate from the group of materials consisting of Si and Ge.

18. The method of claim 15, wherein said bonding step comprises bonding with a refractive index matched Chalcogenide glass.

19. The method of claim 18, wherein said bonding step comprises bonding with a Chalcogenide glass selected from the group of materials consisting of As₂ S₃ and As₂ Se₃.

20. The method of claim 15, wherein said etching step includes etching said substrate to form said cavities having said etch profile selected from the group consisting of inverted cones, pyramids, spheres, and pillars.