Scanning optical microscope having a compact confocal optical system for adjusting position of aperture

• US 5,334,830 A
• Filed: 01/14/1993
• Issued: 08/02/1994
• Est. Priority Date: 05/29/1991
• Status: Expired due to Term

• Current Assignee: Olympus Optical Corporation Limited (Olympus Corporation)
• Original Assignee: Olympus Optical Corporation Limited (Olympus Corporation)
• Inventors: Kitagawa, Hisao, Yamamoto, Mitsunori, Fukuyama, Hiroya, Kashima, Shingo
• Primary Examiner(s): Nelms, David C.
• Application Number:
  US08/004,458
• Time in Patent Office: 565 Days
• Field of Search: 250/216, 250/234, 250/235, 359/197, 359/745, 359/381, 359/384
• US Class Current: 250/216
• CPC Class Codes: G02B 21/0032 Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers G02B21/0036 - G02B21/008; means for illumination of specimens in general G02B21/06
• CPC Class Codes: G02B 21/0048 scanning mirrors, e.g. rotating or galvanomirrors, MEMS mirrors
• CPC Class Codes: G02B 21/0076 arrangements using fluorescence or luminescence

Abstract

A laser beam from a light source is reflected by a beam splitter and two galvanomirrors, and enters a pupil projection lens. The beam passing through the lens forms a spot on an image plane of an objective. This spot is two-dimensionally scanned by shaking the galvanomirrors with respect to their axes perpendicular to each other. Reflected light or fluorescence from a sample is returned to the beam splitter through the same path, passes through it, and is then reflected by a mirror. This optical system includes an optical unit which can be inserted/removed therein/therefrom. When the optical unit is removed, the optical system serves as a confocal optical system. When the optical unit is inserted, the optical system serves as a nonconfocal optical system. In the confocal optical system, the beam from the mirror enters a condenser, converges, passes through an iris and enters a photomultiplier tuber. The condenser includes a convex lens and a concave lens. In the nonconfocal optical system, the beam from the mirror enters a condenser, converges and is focused on the iris to a spot. The beam passing through the iris enters the photomultiplier tube.

Claims

1. A scanning optical microscope for scanning a sample with a light beam to observe the sample, comprising:

a light source for emitting a light beam;

focusing means for focusing the light beam from said light source to the sample to form a light spot on the sample;

scanning means for scanning the light spot across the sample;

first light converging means for converging the light beam from the sample, said first light converging means including a first pair of optical elements, one optical element of said first pair having a positive power and the other optical element of said first pair having a negative power, and a second pair of optical elements, one optical element of said second pair having a positive power and the other optical element of said second pair having a negative power;

aperture means arranged in conjugation with the light spot and including an aperture having a diameter which allows a light beam from a minute spot on a focal plane of a lens to selectively pass through the aperture;

first detecting means for detecting the light beam passing through the aperture of said aperture means; and

image forming means for forming an image based on information from said scanning means and said first detecting means.

2. The scanning optical microscope according to claim 1, wherein said optical elements of said first and second pairs of optical elements comprise lenses.

3. The scanning optical microscope according to claim 1, wherein said optical elements of said first and second pairs of optical elements comprise mirrors.

4. A scanning optical microscope for scanning a sample with a light beam to observe the sample, comprising:

a light source for emitting a light beam;

focusing means for focusing the light beam from said light source to the sample to form a light spot on the sample;

scanning means for scanning the light spot across the sample;

first light converging means for converging the light beam from the sample, said first light converging means including a least three pairs of optical elements, one optical element of each of said pairs of optical elements having a positive power and the other optical element of each of said pairs of optical elements having a negative power;

aperture means arranged in conjugation with the light spot and including an aperture having a diameter which allows a light beam from a minute spot on a focal plane of a lens to selectively pass through the aperture;

first detecting means for detecting the light beam passing through said aperture of said aperture means; and

image forming means for forming an image based on information from said scanning means and said first detecting means.

5. A scanning optical microscope for scanning a sample with a light beam to observe the sample, comprising:

a light source for emitting a light beam;

focusing means for focusing the light beam from said light source to the sample to form a light spot on the sample;

scanning means for scanning the light spot across the sample;

first light converging means for converging the light beam from the sample, said first light converging means including a pair of optical elements, one optical element of said pair of optical elements having a positive power and the other optical element of said pair of optical elements having a negative power;

aperture means arranged in conjugation with the light spot and including an aperture having diameter which allows a light beam from a minute spot on a focal plane of a lens to selectively pass through the aperture, said aperture means including means for steplessly varying the diameter of the aperture to allow only the light from the minute spot on the focal plane to selectively pass therethrough;

first detecting means for detecting the light beam passing through said aperture of said aperture means; and

image forming means for forming an image based on information from said scanning means and said first detecting means.

6. A scanning optical microscope for scanning a sample with a light beam to observe the sample, comprising:

a light source for emitting a light beam;

focusing means for focusing the light beam from said light source to the sample to form a light spot on the sample;

scanning means for scanning the light spot across the sample;

first light converging means for converging the light beam from the sample, said first light converging means including a pair of optical elements, one optical element of said pair of optical elements having a positive power and the other optical element of said pair of optical elements having a negative power;

second light converging means for converging a light beam from the sample, said second light converging means having a focal distance which is shorter than that of said first light converging means;

selecting means for allowing the light beam from the sample to selectively pas through one of said first and second light converging means;

aperture means arranged in conjugation with the light spot and including an aperture having a diameter which allows a light beam from a minute spot on a focal plane of a lens to selectively pass through the aperture;

first detecting means for detecting the light beam passing through said aperture of said aperture means; and

image forming means for forming an image based on information from said scanning means and said first detecting means.

7. The scanning optical microscope according to claim 6, wherein said first and second light converging means have respective optical paths overlapping each other, and optical axes of said first and second light converging means coincide with each other immediately before the optical axes reach said first detecting means.

8. The scanning optical microscope according to claim 7, wherein said second light converging means includes a lens, and said selecting means includes reflective optical elements which are removably provided in the optical path.

9. The scanning optical microscope according to claim 8, wherein said lens is removably provided in the optical path, together with the reflective optical elements.

10. The scanning optical microscope according to claim 7, wherein said first and second light converging means include a common optical element, said, optical element comprising a lens, said selecting means comprises a lens which is relatively movable along a direction of the optical axis and a pair of mirrors movably arranged along a direction of an axis of the lens, and said mirrors have normals perpendicular to each other and reflect a light beam from the lens in an opposite direction.

11. The scanning optical microscope according to claim 6, wherein said selecting means includes a mirror whose normal is variable, said second light converging means includes a lens whose focal point differs from that of the first light converging means, said scanning optical microscope further comprises second detecting means for detecting the light from the lens, and said image forming means includes means for forming an image based on information from the second detecting means.