Microminiaturized pump
First Claim
1. An electrostatically actuatable microminiaturized pump comprising:
- at least one first and one second pump body which are arranged one on top of the other and which are interconnected, at least one of said pump bodies comprising at least partially of a semiconductor material, and both pump bodies having electrically conductive regions, which are electrically insulated from one another;
at least one of said two pump bodies has a thin, flexible diaphragm;
at least one check valve is arranged within said thin, flexible diaphragm, said check valve being formed integrally with said thin, flexible diaphragm and having an inlet aperture as well as a cover plate, which covers said inlet aperture and which merges with said thin, flexible diaphragm at one of its narrow sides;
said thin, flexible diaphragm includes at least part of said electrically conductive region of said pump body; and
in relation to the surface dimensions of said thin, flexible diaphragm, said electrically conductive region of said other pump body being arranged at a short distance from said thin, flexible diaphragm.
1 Assignment
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Accused Products
Abstract
A microminiaturized pump consists of two superposed, interconnected pump bodies of semiconductor material, which each include electrically conductive regions insulated from one another. At least one of the two pump bodies has a thin, flexible diaphragm having integrated therein at least one check valve, which has an inlet aperture and a cover plate over it, the thin, flexible diaphragm including at least part of the electrically conductive region of one pump body, whereas, in relation to the surface dimensions of the thin, flexible diaphragm, the electrically conductive region of the other pump body is arranged at a short distance from the thin, flexible diaphragm.
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Citations
17 Claims
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1. An electrostatically actuatable microminiaturized pump comprising:
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at least one first and one second pump body which are arranged one on top of the other and which are interconnected, at least one of said pump bodies comprising at least partially of a semiconductor material, and both pump bodies having electrically conductive regions, which are electrically insulated from one another; at least one of said two pump bodies has a thin, flexible diaphragm; at least one check valve is arranged within said thin, flexible diaphragm, said check valve being formed integrally with said thin, flexible diaphragm and having an inlet aperture as well as a cover plate, which covers said inlet aperture and which merges with said thin, flexible diaphragm at one of its narrow sides; said thin, flexible diaphragm includes at least part of said electrically conductive region of said pump body; and in relation to the surface dimensions of said thin, flexible diaphragm, said electrically conductive region of said other pump body being arranged at a short distance from said thin, flexible diaphragm. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification