Laterally sensitive accelerometer and method for making

• US 5,337,606 A
• Filed: 08/10/1992
• Issued: 08/16/1994
• Est. Priority Date: 08/10/1992
• Status: Expired due to Term

• Current Assignee: Freescale Semiconductor, Inc. (NXP Semiconductors NV)
• Original Assignee: Motorola, Inc. (Motorola Solutions, Inc.)
• Inventors: Koury, Daniel N. Jr., Bennett, Paul T., Mietus, David F., Gutteridge, Ronald J., Ristic, Ljubisa
• Primary Examiner(s): WOODIEL, DONALD
• Application Number:
  US07/926,616
• Time in Patent Office: 736 Days
• Field of Search: 73/517 R, 73/718, 73/724, 361/283.1, 29/25.41
• US Class Current: 73/514.32
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: Y10T 29/43 Electric condenser making

Abstract

A micromachined capacitor structure having a first anchor (12) attached to the substrate (24), a tether (13) coupled to the anchor (12) and having a portion free to move in a lateral direction over the substrate (24) in response to acceleration. A tie-bar (14) is coupled to the movable portion of the tether (13), and at least one movable capacitor plate (16) is coupled to the tie bar (13). A first fixed capacitor plate (16) is attached to the substrate (24) laterally overlapping and vertically spaced from the at least one movable capacitor plate (16).

Claims

1. A laterally sensitive accelerometer comprising:

a substrate;

a first anchor attached to the substrate, a tether coupled to the anchor and having a portion free to move in a lateral direction over the substrate in response to acceleration, a tie-bar coupled to the movable portion of the tether, and at least one movable capacitor plate coupled to the tie bar;

a first fixed capacitor plate laterally overlapping the at least one movable capacitor and vertically spaced from the at least one movable capacitor plate; and

a second anchor attached to the substrate; and

a first vertical support coupling the first fixed capacitor plate to the second anchor, wherein the first vertical support is laterally spaced from the at least one movable capacitor plate to allow the at least one movable capacitor plate to move in a lateral direction under the first fixed capacitor plate.

2. The laterally sensitive accelerometer of claim 1 wherein the first fixed capacitor plate is located below the at least one movable capacitor plate.

3. The laterally sensitive accelerometer of claim 1 further comprising:

a second fixed capacitor plate laterally overlapping the at least one movable capacitor plate positioned opposite of the first fixed capacitor plate and electrically isolated from the first fixed capacitor plate;

a third anchor attached to the substrate; and

a second vertical support coupling the second fixed capacitor plate to the third anchor, wherein the second vertical support is laterally spaced from the at least one movable capacitor plate to allow the at least one movable capacitor plate to move in a lateral direction under the second fixed capacitor plate.

4. The laterally sensitive accelerometer of claim 1 wherein the first anchor, the tether, the tie-bar, and the at least one movable capacitor plate comprise a homogenous patterned layer of polysilicon.

5. The laterally sensitive accelerometer of claim 1 wherein the first fixed capacitor plate, the second anchor, and the first vertical support comprise a homogenous patterned layer of polysilicon.

6. The laterally sensitive accelerometer of claim 1 further comprising at least two first anchors, wherein the tether couples to both of the at least two first anchors and the portion of the tether that is free to move in a lateral direction lies between the two first anchors.

7. The laterally sensitive accelerometer of claim 6 further comprising at least two tie-bars spaced from each other, wherein each tie bar has one end coupled to the tether, and the at least one movable capacitor plate spans between the at least two tie-bars.

8. A laterally sensitive accelerometer comprising:

a substrate;

a first set of anchors attached to the substrate;

a tether spanning between two of the first set of anchors;

a first tie-bar having one end coupled to a central portion of the tether;

a second tie-bar having one end coupled to the central portion of the tie-bar and spaced from the first tie-bar;

a set of rectangular movable capacitor plates, wherein each of the movable capacitor plates has one end attached to the first tie bar and another end attached to the second tie bar in a parallel arrangement;

a second set of anchors attached to the substrate;

a first set of vertical supports attached to the second set of anchors and extending upwards therefrom; and

a first set of fixed capacitor plates, each of the first set of fixed capacitor plates laterally overlapping a portion of one of the movable capacitor plates and attached to at least two of the first set of vertical supports, wherein each of the first set of fixed capacitor plates is substantially parallel to the movable capacitor plates and vertically spaced from the movable capacitor plates.

9. The laterally sensitive accelerometer of claim 8 further comprising:

a third set of anchors attached to the substrate;

a second set of vertical supports attached to the third set of anchors and extending upwards therefrom; and

a second set of fixed capacitor plates, each of the second set of fixed capacitor plates laterally overlapping a portion of one of the movable capacitor plates and attached to at least two of the second set of vertical supports, wherein each of the second set of fixed capacitor plates is substantially parallel to the movable capacitor plates and vertically spaced from the movable capacitor plates.

10. The laterally sensitive accelerometer of claim 9 wherein the movable capacitor plates, the first set of fixed capacitor plates, and the second set of fixed capacitor plates comprise doped polysilicon.

11. The laterally sensitive accelerometer of claim 9 wherein the movable capacitor plates comprise a first patterned homogenous layer of polysilicon and the first and second sets of fixed capacitor plates comprise a second pattered homogenous layer of polysilicon.

12. The laterally sensitive accelerometer of claim 8 wherein each of the movable capacitor plates are electrically coupled in parallel.

13. The laterally sensitive accelerometer of claim 8 wherein each of the first set of fixed capacitor plates are electrically coupled in parallel.

14. The laterally sensitive accelerometer of claim 9 wherein each of the second set of fixed capacitor plates are electrically coupled in parallel.

15. The laterally sensitive accelerometer of claim 8 wherein the capacitance between the each movable capacitor plate and each of the first set of fixed capacitor plates varies substantially linearly with applied acceleration.

16. A method for making a laterally sensitive accelerometer comprising the steps of:

providing a substrate;

covering the substrate with a first sacrificial layer;

patterning the first sacrificial layer to expose portions of the substrate;

depositing a first polysilicon layer;

patterning the first polysilicon layer to provide a plurality of anchors, a tether coupled between two of the plurality of anchors, and a movable capacitor plate, wherein the movable capacitor plate is coupled to a central portion of the tether;

covering the movable capacitor plate with a second sacrificial dielectric;

patterning the second sacrificial dielectric to expose some of the anchors;

forming a first fixed capacitor plate having a first portion that is attached to at least two of the exposed anchors and a second portion that overhangs the movable capacitor plate and is vertically separated from the movable capacitor plate by the thickness of the second sacrificial dielectric; and

removing the first and second sacrificial layers by etching.

17. The method of claim 16 further comprising the steps of:

forming a second fixed capacitor plate having a first portion that is attached to at least two of the exposed anchors on an opposite side of the movable capacitor plate from the first fixed capacitor plate, wherein the second fixed capacitor plate has a second portion that overhangs the movable capacitor plate and is vertically separated from the movable capacitor plate by the thickness of the second sacrificial dielectric.

18. A method for making a laterally sensitive accelerometer comprising the steps of:

providing a substrate having a surface;

forming a first fixed capacitor plate on the surface of the substrate;

covering the first fixed capacitor plate with a sacrificial layer;

patterning the sacrificial layer to expose portions of the substrate;

depositing a first polysilicon layer;

patterning the first polysilicon layer to provide a plurality of anchors, a tether coupled between two of the plurality of anchors, and a movable capacitor plate, wherein the movable capacitor plate is coupled to a central portion of the tether, has a portion of that overhangs the fixed capacitor plate and is vertically separated from the fixed capacitor plate by the thickness of the sacrificial dielectric; and

removing the sacrificial layer by etching.