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Positive displacement micropump

  • US 5,338,164 A
  • Filed: 05/28/1993
  • Issued: 08/16/1994
  • Est. Priority Date: 05/28/1993
  • Status: Expired due to Term
First Claim
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1. A pump comprising,a plurality of chambers each having a top disc diaphragm, a bottom disc diaphragm and a side wall,an inlet and an outlet for fluid flow to and from each chamber, passing through the side wall,a valve attached to the inlet and a valve connected to the outlet to control the direction of fluid flow,the plurality of chambers stacked such that the disc top diaphragm of one chamber is also the bottom disc diaphragm of the adjacent chamber,each disc diaphragm having an electrodeformable material for deforming the disc diaphragm and changing the volume of the chamber when activated,a means of activating the electrodeformable material so that the top and bottom disc diaphragms in each chamber move toward each other or away from each other simultaneously,the outlet of one chamber is connected to the inlet of another chamber for increasing the pressure of the fluid in stages.

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