Method for fabrication of w-polycide-to-poly capacitors with high linearity

• US 5,338,701 A
• Filed: 11/03/1993
• Issued: 08/16/1994
• Est. Priority Date: 11/03/1993
• Status: Expired due to Term

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Shi, Chun-Yi, Hsu, Shun-Liang, Lin, Mou-Shiung
• Primary Examiner(s): QUACH, TUAN N
• Application Number:
  US08/145,154
• Time in Patent Office: 286 Days
• Field of Search: 437/60, 437/193, 437/200, 437/919, 437/47, 437/52, 437/56, 437/57, 437/238, 257/296, 257/300
• US Class Current: 438/210
• CPC Class Codes: H01L 28/40 Capacitors

Abstract

A method of forming a polycide-to-polysilicon capacitor simultaneously with a CMOS device with polycide gate is described. Field oxide regions, n-well and p-well regions, and gate oxide regions are formed in and on a silicon substrate. A first layer of polysilicon, having a suitable doping concentration, is formed on the surface of the substrate and the field oxide regions. A layer of silicide is formed over the layer of polysilicon. The layer of silicide is ion implanted in a vertical direction to produce the low voltage coefficient and high linearity. A layer of interpoly oxide is formed over the layer of silicide. The layer of interpoly oxide is densified. A second layer of polysilicon is formed on the surface of the interpoly oxide. The second layer of polysilicon is doped, and then patterned to form the top plate of the capacitor. The layer of interpoly oxide is removed, except in the area under the top plate of the capacitor, where it acts as a capacitor dielectric. The layer of silicide and the layer of polysilicon are patterned to form a polycide bottom plate of the capacitor and to form the polycide gate. The layer of silicide is annealed. The source and drain regions of the CMOS device are formed in the substrate in the regions between the polycide gate and the field oxide regions; and the remaining layers are formed to complete the integrated circuit.

Claims

1. A method for forming a polycide-to-polysilicon capacitor with a low voltage coefficient and high linearity, in and on a silicon substrate, on an integrated circuit having FET devices which are separated from each other by means of field oxide regions, comprising:

forming a first layer of polysilicon, having a suitable doping concentration, on the surface of said substrate and said field oxide regions;

forming a layer of silicide over said layer of polysilicon;

ion implanting in a vertical direction into said layer of silicide to produce said low voltage coefficient and high linearity;

forming a layer of interpoly oxide over said layer of silicide;

densifying said layer of interpoly oxide;

forming a second layer of polysilicon, on the surface of said layer of interpoly oxide;

doping said second layer of polysilicon;

patterning said second layer of polysilicon to form the top plate of said capacitor;

removing said layer of interpoly oxide except in the area under said top plate of said capacitor, where it acts as a capacitor dielectric;

patterning said layer of silicide and said layer of polysilicon, to form a polycide bottom plate of said capacitor;

annealing said polycide bottom plate; and

forming sidewalls on the sides of said polycide bottom plate.

2. The method of claim 1 wherein said ion implanting is with arsenic, in a concentration of between about 1 E 14 and 1 E 16 atoms/cm² at an energy of between about 60 and 120 KeV.

3. The method of claim 1 wherein said silicide is tungsten silicide.

6. The method of claim 1 wherein said ion implanting is with boron fluoride, in a concentration of between about 1 E 15 and 5 E 15 atoms/cm², at an energy of between about 50 and 80 KeV.

7. The method of claim 1 wherein said doping said second layer of polysilicon is by diffusion of POCl₃ at a temperature of between about 800°

and 920°

C.

4. The method of claim I wherein said polycide bottom plate is annealed at a temperature of between about 850°

and 1000°

C.

5. The method of claim I wherein said ion implanting is with phosphorus, in a concentration of between about 1 E 14 and 1 E 16 atoms/cm², at an energy of between about 60 and 90 KeV.

8. A method for forming an integrated circuit in and on a silicon substrate, with a polycide-to-polysilicon capacitor with low voltage coefficient and high linearity, and with a CMOS device with polycide gate, comprising:

forming field oxide regions, n-well and p-well regions,

and gate oxide regions in and on said silicon substrate;

forming a first layer of polysilicon, having a suitable doping concentration, on the surface of said substrate and said field oxide regions;

forming a layer of silicide over said layer of polysilicon;

ion implanting in a vertical direction into said layer of silicide to produce said low voltage coefficient and high linearity;

forming a layer of interpoly oxide over said layer of silicide;

densifying said layer of interpoly oxide;

forming a second layer of polysilicon, on the surface of said layer of interpoly oxide;

doping said second layer of polysilicon;

patterning said second layer of polysilicon to form the top plate of said capacitor;

removing said layer of interpoly oxide except in the area under said top plate of said capacitor, where it acts as a capacitor dielectric;

patterning said layer of silicide and said layer of polysilicon, to form a polycide bottom plate of said capacitor and to form said polycide gate;

annealing said layer of silicide;

forming source and drain regions of said CMOS device in said substrate in the regions between said polycide gate and said field oxide regions; and

forming remaining layers to complete said integrated circuit.

9. The method of claim 8 wherein said ion implanting is with arsenic, in a concentration of between about 1 E 14 and 1 E 16 atoms/cm² at an energy of between about 60 and 120 KeV.

10. The method of claim 8 wherein said silicide is tungsten silicide.

11. The method of claim 8 wherein said polycide bottom plate is annealed at a temperature of between about 850°

and 1000°

C.

12. The method of claim 8 wherein said ion implanting is with phosphorus, in a concentration of between about 1 E 14 and 1 E 16 atoms/cm², at an energy of between about 60 and 90 KeV.

13. The method of claim 8 wherein said ion implanting is with boron fluoride, in a concentration of between about 1 E 15 and 5 E 15 atoms/cm², at an energy of between about 50 and 80 KeV.

14. The method of claim 8 wherein said doping said second layer of polysilicon is by diffusion of POCl₃ at a temperature of between about 800°

and 920°

C.

15. A method for forming a polycide-to-polysilicon capacitor with a low voltage coefficient and high linearity, in and on a silicon substrate, on an integrated circuit having FET devices which are separated from each other by means of field oxide regions, comprising:

forming a first layer of polysilicon, having a suitable doping concentration, on the surface of said substrate and said field oxide regions;

forming a layer of silicide over said layer of polysilicon;

ion implanting in a vertical direction into said layer of silicide to produce said low voltage coefficient and high linearity;

patterning said layer of silicide and said layer of polysilicon, to form a polycide bottom plate of said capacitor;

forming a layer of interpoly oxide over said layer of silicide and over exposed areas of said substrate and said field oxide regions;

densifying said layer of interpoly oxide;

forming a second layer of polysilicon, on said layer of interpoly oxide;

doping said second layer of polysilicon;

patterning said second layer of polysilicon to form the top plate of said capacitor;

removing said layer of interpoly oxide except in the area under said top plate of said capacitor, where it acts as a capacitor dielectric;

annealing said polycide bottom plate; and

forming sidewalls on the sides of said polycide bottom plate.

16. The method of claim 15 wherein said ion implanting is with arsenic, in a concentration of between about 1 E 14 and 1 E 16 atoms/cm² at an energy of between about 60 and 120 KeV.

17. The method of claim 15 wherein said silicide is tungsten silicide.

18. The method of claim 15 wherein said polycide bottom plate is annealed at a temperature of between about 850°

and 1000°

C.

19. The method of claim 15 wherein said ion implanting is with phosphorus, in a concentration of between about 1 E 14 and 1 E 16 atoms/cm², at an energy of between about 60 and 90 KeV.

20. The method of claim 15 wherein said ion implanting is with boron fluoride, in a concentration of between about 1 E 15 and 5 E 15 atoms/cm², at an energy of between about 50 and 80 KeV.