Micromachined sensor device using a beam of light with a frequency swept modulated intensity to activate at least two resonance modes of the sensor element
First Claim
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1. A method for monitoring strain variations of a strain responsive element of a micromachined sensor device, the method comprising the steps of:
- (a) irradiating said element by a beam of light with at least frequency swept modulated intensity for activating said element such that at least two oscillation resonance modes are activated subsequently at their resonance frequencies;
(b) determining frequency characteristics of said device when subjected to predefined parameter conditions by measuring the corresponding resonance frequencies of two said resonance modes at said predefined parameter conditions;
(c) determining correspondingly two parameter values for said device by fitting the measured resonance frequencies upon the corresponding frequency characteristics;
(d) subjecting said element to outside parameter conditions; and
(e) detecting the beam of light after being modified correspondingly by said activated element.
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Abstract
In a method for monitoring strain variations of a strain responsive element of a micromachined sensor device while subjected to outside parameter conditions, at least two oscillation resonance modes of said element are activated and interrogated optically. Thereby correspondingly at least two resonance frequencies are obtained. From parameter/frequency characteristics of said device correspondingly at least two parameter values are derived.
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Citations
34 Claims
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1. A method for monitoring strain variations of a strain responsive element of a micromachined sensor device, the method comprising the steps of:
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(a) irradiating said element by a beam of light with at least frequency swept modulated intensity for activating said element such that at least two oscillation resonance modes are activated subsequently at their resonance frequencies; (b) determining frequency characteristics of said device when subjected to predefined parameter conditions by measuring the corresponding resonance frequencies of two said resonance modes at said predefined parameter conditions; (c) determining correspondingly two parameter values for said device by fitting the measured resonance frequencies upon the corresponding frequency characteristics; (d) subjecting said element to outside parameter conditions; and (e) detecting the beam of light after being modified correspondingly by said activated element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. An apparatus for monitoring outside parameter conditions, the apparatus comprising:
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a micromachined sensor device having a strain responsive element, said strain responsive element responding to strain variations resulting from the varying outside parameter conditions; a light beam supply means functional for irradiating said element with light; a frequency oscillator means functional for generating a beam of light with frequency swept modulated intensity in order to activate said element in at least two oscillation resonance modes at their resonance frequencies, whereby the oscillator means supplies the beam supply means with an intensity modulated light beam; detecting means functional for detecting a modified beam of light, said modified beam being light modified by said activated element; measuring means functional for measuring the resonance frequencies from said modified beam; and processing means functional for processing resonance frequency values and deriving therefrom at least correspondingly two outside parameter values. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34)
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Specification