Micro-machined resonator oscillator
First Claim
1. A resonator-oscillator apparatus, remote from a data receiving apparatus, comprising:
- a micro-machined housing comprising a resonator-oscillator means with a frequency of oscillation of greater than approximately one (1) MHz;
means for activating a power source of said resonator-oscillator means; and
sensor apparatus output means.
3 Assignments
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Accused Products
Abstract
A micro-miniature resonator-oscillator is disclosed. Due to the miniaturization of the resonator-oscillator, oscillation frequencies of one MHz and higher are utilized. A thickness-mode quartz resonator housed in a micro-machined silicon package and operated as a "telemetered sensor beacon" that is, a digital, self-powered, remote, parameter measuring-transmitter in the FM-band. The resonator design uses trapped energy principles and temperature dependence methodology through crystal orientation control, with operation in the 20-100 MHz range. High volume batch-processing manufacturing is utilized, with package and resonator assembly at the wafer level. Unique design features include squeeze-film damping for robust vibration and shock performance, capacitive coupling through micro-machined diaphragms allowing resonator excitation at the package exterior, circuit integration and extremely small (0.1 in. square) dimensioning. A family of micro-miniature sensor beacons is also disclosed with widespread applications as bio-medical sensors, vehicle status monitors and high-volume animal identification and health sensors. The sensor family allows measurement of temperatures, chemicals, acceleration and pressure. A microphone and clock realization is also available.
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Citations
51 Claims
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1. A resonator-oscillator apparatus, remote from a data receiving apparatus, comprising:
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a micro-machined housing comprising a resonator-oscillator means with a frequency of oscillation of greater than approximately one (1) MHz; means for activating a power source of said resonator-oscillator means; and sensor apparatus output means. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 45, 46, 47, 48, 49, 50, 51)
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23. A method of utilizing a resonator-oscillator remote from a data receiving apparatus, the method comprising the steps of:
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a) providing a micro-machined housing comprising a resonator-oscillator with a frequency of oscillation of greater than approximately one (1) MHz to an object; b) activating a power source of the resonator-oscillator; and c) providing a sensor apparatus output. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44)
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Specification