Synchrotron radiation source

• US 5,341,104 A
• Filed: 02/05/1993
• Issued: 08/23/1994
• Est. Priority Date: 08/06/1990
• Status: Expired due to Fees

• Current Assignee: Siemens AG
• Original Assignee: Siemens AG
• Inventors: Anton, Frank, Jahnke, Andreas
• Primary Examiner(s): Yusko, Donald J.
• Assistant Examiner(s): Patel, Ashok
• Application Number:
  US08/014,401
• Time in Patent Office: 564 Days
• Field of Search: 328/235, 328/221, 328/228, 328/229, 328/230, 328/234, 328/236, 328/237, 328/238, 328/233, 313/62, 313/361.1, 313/359.1, 315/5.41, 315/5.42, 335/216, 250/396 R
• US Class Current: 315/503
• CPC Class Codes: H05H 13/04 Synchrotrons

Abstract

A synchrotron radiation source includes a beam guidance system for accelerating and storing an electron or positron particle beam on a closed trajectory. In order to generate the synchrotron radiation, the beam guidance system has at least one approximately achromatic mirror magnet being formed of superconducting winding configurations and in which the trajectory is bent through approximately 270°. Further components of the beam guidance system, such as deflecting magnets and focusing magnets do not necessarily need to be constructed from superconducting components. The synchrotron radiation source permits the utilization of all of the advantages of superconductors with the most extensive avoidance of the disadvantages associated therewith, since the application of superconducting components can be restricted to the components specifically constructed for the generation of the synchrotron radiation.

Claims

1. A synchrotron radiation source, comprising a beam guidance system for storing an electron or positron particle beam on a closed trajectory, said beam guidance system having at least one approximately achromatic mirror magnet being formed of superconducting winding configurations for bending the trajectory through approximately 270°

.

2. The synchrotron radiation source according to claim 1, wherein said beam guidance system has at least one of deflecting and focusing magnets formed of non-superconducting winding configurations.

3. The synchrotron radiation source according to claim 1, wherein:

a) said beam guidance system has deflecting magnets; and

b) the trajectory has a minimum radius of curvature in each of said deflecting magnets and in said mirror magnet, and the minimum radius of curvature of the trajectory in said mirror magnet is smaller than the minimum radius of curvature of the trajectory in each of said deflecting magnets.

4. The synchrotron radiation source according to claim 1, wherein:

a) said mirror magnet has means for generating a magnetic field being constant along a first direction, being variable along a second direction perpendicular to the first direction and being proportional to a specified power of a depth of penetration to be measured along the second direction from a point of entry; and

b) the magnetic field has a field index being an exponent designating said power and being between approximately 0.8 and approximately 1.5.

5. The synchrotron radiation source according to claim 1, wherein the trajectory is bent through 270°

in said mirror magnet.

6. The synchrotron radiation source according to claim 1, wherein said mirror magnet has at least one beam tube for coupling out synchrotron radiation.

7. The synchrotron radiation source according to claim 1, including a device for supplying energy into the particle beam and guiding the trajectory.

8. The synchrotron radiation source according to claim 7, wherein said device is a high-frequency resonator.

9. The synchrotron radiation source according to claim 1, wherein said beam guidance system has means for storing electrons or positrons having kinetic energy between approximately 400 MeV and approximately 2,000 MeV.

10. The synchrotron radiation source according to claim 9, wherein said beam guidance system has deflecting magnets each having a radius of curvature being greater than approximately 1 m.

11. The synchrotron radiation source according to claim 1, wherein said mirror magnet has no ferromagnetic components in the vicinity of the trajectory within said mirror magnet.

12. The synchrotron radiation source according to claim 11, wherein:

a) said mirror magnet has two of said winding configurations being mutually congruent, being disposed opposite one another and substantially superimposed and being spaced from one another, between which the trajectory extends;

b) each of said winding configurations has a multiplicity of windings, each of said windings has an approximately linear main portion; and

c) all of said main portions of said winding configurations are disposed substantially parallel to one another and spaced from one another.

13. The synchrotron radiation source according to claim 12, wherein:

a) each of said windings in each of said winding configurations has an approximately linear return portion; and

b) all of said return portions of each of said winding configurations are combined into a return rod.

14. The synchrotron radiation source according to claim 12, wherein each of said winding configurations is approximately planar.

15. The synchrotron radiation source according to claim 13, wherein each of said winding configurations is approximately planar.

16. A synchrotron radiation source for the generation of X-ray radiation for a process of X-ray lithography or X-ray microscopy, comprising a beam guidance system for storing an electron or positron particle beam on a closed trajectory, said beam guidance system having at least one approximately achromatic mirror magnet being formed of superconducting winding configurations for bending the trajectory through approximately 270°

.