Single ended tuning fork inertial sensor and method

• US 5,343,749 A
• Filed: 11/15/1993
• Issued: 09/06/1994
• Est. Priority Date: 03/12/1991
• Status: Expired due to Term

• Current Assignee: BEI Sensors & Systems Company Incorporated (Schneider Electric SE)
• Original Assignee: New SD, Inc.
• Inventors: Macy, David F.
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US08/152,816
• Time in Patent Office: 295 Days
• Field of Search: 73/505, 310/329
• US Class Current: 73/504.16
• CPC Class Codes: G01C 19/5607 using vibrating tuning forks double-ended tuning forks using planar vibrating masses suspended at opposite ends G01C19/5719

Abstract

Single ended tuning fork inertial sensor having a housing and a single ended tuning fork of a quartz-like material of a predetermined thickness, the tuning fork has first and second tines lying in a plane and having an axis of symmetry and has a body formed integral with said first and second tines. The body is rigidly secured to the housing. The tines have a rectangular cross section and have a width which is different from the thickness. The body has a stem formed therein which has a width less than that of the body. Drive electrodes are secured to the tines. An oscillatory frequency is supplied to the above drive electrodes to excite the tines in a drive mode and in the presence of an axial angular rate to cause the tines to operate in a pickup mode which is substantially separated in frequency from the drive mode.

Claims

1. In a single ended tuning fork inertial rate sensor, a housing, a single ended tuning fork of a piezoelectric material of a predetermined thickness having first and second tines lying in a plane and having an axis of symmetry serving as an input axis and a body formed integral with said first and second tines and having a width, means mounting said body in said housing for rigidly securing said single-ended tuning fork to said housing, said tines having a rectangular cross section, said body having a stem formed therein which has a width less than that of the body, drive electrodes and pickup electrodes secured to the tines, drive oscillator means for supplying an oscillatory frequency to the drive electrodes to drive them in a drive mode and electronic means connected to the pickup electrodes and operating in a pickup mode for supplying an angular rate signal in response to rotation about said input axis, said times having a width which is different from the thickness so that the pickup mode is separated in frequency from the drive mode, said stem having a length and width to cause a reduction in the frequency separation between the pickup mode and the drive mode to provide means for independently adjusting the frequency of the pickoff mode.

2. A sensor as in claim 1 wherein each of said tines has top and bottom sides and first and second sides extending at substantially right angles to the top and the bottom sides, and wherein said drive electrodes are mounted symmetrically on the top and the bottom sides and on the first and second sides and said pickup electrodes are mounted symmetrically only and on the first and second sides, together with symmetrically disposed leads carried by the fork and connected to the drive electrodes and the pickup electrodes.

3. A sensor as in claim 1 wherein said electronic means includes amplifier means connected to the pickup electrodes for amplifying the electrical output from the pickup electrodes.

4. A sensor as in claim 3 wherein said electronic means includes a synchronous demodulator connected to the drive oscillator means and to the amplifier means.

5. A sensor as in claim 1 wherein said tuning fork is provided with a crotch and wherein said pickup electrodes are closer to the crotch of the tuning fork than are the drive electrodes.

6. A sensor as in claim 2 wherein said symmetrically disposed leads carried by the fork have a coupling capacitance between the leads, said leads being disposed to provide electrically balanced signals from the pickup electrodes.

7. A sensor as in claim 1 wherein the tines of said tuning fork and the stem are sized so that the pickup frequency is different from the drive frequency by approximately 3%.

8. A sensor as in claim 1 wherein the pickup frequency is higher than the drive frequency.

9. A sensor as in claim 1 wherein the frequency difference between the drive frequency and the pickup frequency is identified as delta f and in which delta f is at least 0.1% of the drive frequency.