Method for evaluation of quality of the interface between layer and substrate
First Claim
1. A method for evaluation of the quality of the interface between a layer disposed on a substrate, said interface being nonuniform in adhesion of said layer and said substrate, comprising the steps of:
- providing a model of expected values for quantitative description of the process of thermal relaxation in the nonuniform interface between layer and substrate;
irradiating said layer with a plurality of laser beams to provide a non-uniform thermal excitation across said layer;
measuring thermal relaxation of said thermal excitation;
comparing said thermal relaxation of said thermal excitation with said expected values for the later stage of the thermal process in said interface obtained from said model;
evaluating mismatch of said layer with said substrate by selecting the portion of said thermal relaxation that diverges from the expected values.
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Abstract
A method for the quantitative and qualitative evaluation of a nonuniform interface between a layer and a substrate is disclosed wherein thermal excitation is provided by irradiating the layer and thermal relaxation responsive to this thermal excitation is measured. The measured thermal relaxation is compared to the expected values, obtained from a model derived for the quantitative description of the process of thermal relaxation. The fraction of the deteriorated area of the interface is obtained from the portion of the thermal relaxation which diverges from the expected values.
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9 Claims
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1. A method for evaluation of the quality of the interface between a layer disposed on a substrate, said interface being nonuniform in adhesion of said layer and said substrate, comprising the steps of:
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providing a model of expected values for quantitative description of the process of thermal relaxation in the nonuniform interface between layer and substrate; irradiating said layer with a plurality of laser beams to provide a non-uniform thermal excitation across said layer; measuring thermal relaxation of said thermal excitation; comparing said thermal relaxation of said thermal excitation with said expected values for the later stage of the thermal process in said interface obtained from said model; evaluating mismatch of said layer with said substrate by selecting the portion of said thermal relaxation that diverges from the expected values. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification