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Method for evaluation of quality of the interface between layer and substrate

  • US 5,344,236 A
  • Filed: 01/23/1992
  • Issued: 09/06/1994
  • Est. Priority Date: 01/23/1992
  • Status: Expired due to Fees
First Claim
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1. A method for evaluation of the quality of the interface between a layer disposed on a substrate, said interface being nonuniform in adhesion of said layer and said substrate, comprising the steps of:

  • providing a model of expected values for quantitative description of the process of thermal relaxation in the nonuniform interface between layer and substrate;

    irradiating said layer with a plurality of laser beams to provide a non-uniform thermal excitation across said layer;

    measuring thermal relaxation of said thermal excitation;

    comparing said thermal relaxation of said thermal excitation with said expected values for the later stage of the thermal process in said interface obtained from said model;

    evaluating mismatch of said layer with said substrate by selecting the portion of said thermal relaxation that diverges from the expected values.

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