Device and method for scrubbing and cleaning substrate
First Claim
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1. A substrate scrubbing and cleaning device, comprising:
- means having upper and lower brush members for scrubbing both surfaces of a substrate, respectively;
means for rotating the upper and lower brush members, respectively;
means for supplying cleaning solution to the upper and lower brush members, respectively;
means having a pair of belt-driven holding arms, for carrying the substrate between the upper and lower brush members and for reciprocating the substrate relative to the upper and lower brush members in a substrate carrying direction, the substrate being held by said holding arms; and
means for controlling the operation of the substrate carrying means.
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Abstract
A substrate scrubbing and cleaning device comprising a mechanism having an upper and a lower brush members for scrubbing both surfaces of an LCD glass substrate, a mechanism for rotating the upper and lower brush members, a mechanism for supplying pure water to the upper and lower brush members, a mechanism for carrying the substrate between the upper and the lower brush members to reciprocate it relative to the upper and lower brush members in a substrate carrying direction, and a controller for controlling the operation of the substrate carrying mechanism.
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Citations
9 Claims
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1. A substrate scrubbing and cleaning device, comprising:
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means having upper and lower brush members for scrubbing both surfaces of a substrate, respectively; means for rotating the upper and lower brush members, respectively; means for supplying cleaning solution to the upper and lower brush members, respectively; means having a pair of belt-driven holding arms, for carrying the substrate between the upper and lower brush members and for reciprocating the substrate relative to the upper and lower brush members in a substrate carrying direction, the substrate being held by said holding arms; and means for controlling the operation of the substrate carrying means. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A scrubbing and cleaning device comprising:
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means having an upper and a lower brush members for scrubbing both surfaces of a substrate, respectively; means for rotating the upper and lower brush members, respectively; means for supplying cleaning solution to the upper and lower brush members, respectively; means having upper rollers each being arranged between the upper brush members and also having lower rollers each being arranged between the lower brush members and serving to carry the substrate between the upper and the lower brush members by the upper and lower rollers; lift holder means for receiving the substrate from the carrying means to hold and lift the substrate; and stage means for receiving the substrate from the lift holder means and for rotating the substrate thereon while applying a rinsing solution to the substrate. - View Dependent Claims (9)
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Specification