Accelerometer
First Claim
1. In a condition-responsive device comprising a ceramic substrate having means thereon responsive to a selected condition to provide an electrical signal and having electrically-conductive means on a surface of the substrate defining circuit path means connected to the condition-responsive means, and comprising signal-conditioning electrical circuit means, a base part having integral pins extending through openings in the substrate and electrical circuit means securing the electrical circuit means in overlying relation to the substrate, and electrically conductive means extending between the circuit means and the substrate electrically connecting the electrical circuit means to the circuit path means on the substrate for conditioning the electrical signal to provide an output signal corresponding to the selected condition.
6 Assignments
0 Petitions
Accused Products
Abstract
An accelerometer unit has a capacitor detect plate and a source place connector preferably defined respectively inside and outside a groove in one surface of a ceramic substrate. A flat metal member has an attachment portion secured in electrically conductive relation to the connector, has a source plate portion spaced over the detect plate to form a capacitor, and has integral resilient beams extending from the attachment portion to support the source plate portion spaced from the detect plate to be movable relative to the detect plate in response to acceleration force to provide an electrical signal. Preferably glass rods between the attachment member portion and source place connector facilitate the spacing. An electrically insulating housing base has integral pins extending through openings in the accelerometer unit substrate and in a separate electrical circuit unit to mount the circuit unit in spaced, overlying relation to the accelerometer unit, and an electrically conductive adhesive extends through guide holes in a gasket between the accelerometer and circuit units to electrically connect the circuit to the detect plate and to the connector on the ceramic substrate.
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Citations
33 Claims
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1. In a condition-responsive device comprising a ceramic substrate having means thereon responsive to a selected condition to provide an electrical signal and having electrically-conductive means on a surface of the substrate defining circuit path means connected to the condition-responsive means, and comprising signal-conditioning electrical circuit means, a base part having integral pins extending through openings in the substrate and electrical circuit means securing the electrical circuit means in overlying relation to the substrate, and electrically conductive means extending between the circuit means and the substrate electrically connecting the electrical circuit means to the circuit path means on the substrate for conditioning the electrical signal to provide an output signal corresponding to the selected condition.
- 2. In a condition-responsive device comprising a ceramic substrate having means thereon responsive to a selected condition to provide an electrical signal and having electrically-conductive means on a surface of the substrate defining circuit path means connected to the condition-responsive means, and comprising signal-conditioning electrical circuit means, a base part having integral pins extending through openings in the substrate and electrical circuit means securing the electrical circuit means in overlying relation to the substrate, and electrically conductive adhesive means extending between the electrical circuit means and the substrate electrically connecting the electrical circuit means to the circuit path means on the substrate for conditioning the electrical signal to provide an output signal corresponding to the selected condition.
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4. An accelerometer device comprising an electrically insulating ceramic substrate having electrically conductive means on one surface defining a capacitor detect plate, capacitor source plate connector means, and circuit path means connected to the detect plate and to the source plate connector means;
- an electrically conductive metal plate member having an attachment portion secured in electrically conductive relation to the source plate connector means, a capacitor source plate portion, and integral resilient beam means extending between the attachment and source plate member portions supporting the source plate portion of the member in spaced relation to the detect plate to form a capacitor and to be movable relative to the detect plate in response to an acceleration force to provide an electrical signal;
signal-conditioning electrical circuit means;
a base having integral pins extending through openings in the substrate and the electrical circuit means securing the electrical circuit means in overlying relation to the plate member; and
an electrically conductive adhesive extending between the electrical circuit means and the substrate electrically connecting the electrical circuit means to the circuit path means on the substrate for conditioning the electrical signal to provide an output signal corresponding to the acceleration force. - View Dependent Claims (5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
- an electrically conductive metal plate member having an attachment portion secured in electrically conductive relation to the source plate connector means, a capacitor source plate portion, and integral resilient beam means extending between the attachment and source plate member portions supporting the source plate portion of the member in spaced relation to the detect plate to form a capacitor and to be movable relative to the detect plate in response to an acceleration force to provide an electrical signal;
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15. An accelerometer device comprising an electrically insulating housing base having integral pins upstanding from the base;
- an electrically insulating ceramic substrate having a groove with a flat bottom and a selected depth extending across one surface of the substrate and having electrically conductive film means on said one surface defining a capacitor detect plate inside the groove bottom, capacitor source plate connector means outside the groove, and circuit path means connected to the detect plate and source plate connector means;
an electrically conductive metal plate member having an attachment portion, a capacitor source plate portion, and integral resilient beams extending between the attachment and source plate portions disposed in a common plane, the attachment portion being secured in electrically conductive relation to the source plate connector means outside the groove to dispose the source plate member portion in spaced relation to the detect plate on the groove bottom to form a capacitor and to be movable relative to the detect plate in response to an acceleration force to provide an electrical signal;
gasket means disposed on the substrate around the plate member;
a cup-shaped cover fitted over the gasket means and around the substrate to extend over the plate member for excluding contaminants from between the detect and source plate portions of the capacitor, the cover being positioned to limit movement of the source plate member portion away from the detect plate in response to an acceleration force;
signal-conditioning electrical circuit means disposed on the cover;
the pins extending through openings in each of the substrate, gasket means, cover and electrical circuit means and being staked at distal ends of the pins for securing the substrate, gasket means, cover and electrical circuit means in assembled relation to form an accelerometer mechanism;
electrically conductive adhesive extending between the electrical circuit means and substrate electrically connecting the electrical circuit means to the circuit path means for conditioning the electrical signal to provide an output signal corresponding to the acceleration force; and
a second housing part secured to the base enclosing the accelerometer mechanism. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22)
- an electrically insulating ceramic substrate having a groove with a flat bottom and a selected depth extending across one surface of the substrate and having electrically conductive film means on said one surface defining a capacitor detect plate inside the groove bottom, capacitor source plate connector means outside the groove, and circuit path means connected to the detect plate and source plate connector means;
- 23. An accelerometer unit comprising an electrically insulating ceramic substrate having a recess with a flat bottom and a selected depth in one surface of the substrate and having electrically conducting means on said one surface defining a capacitor detect plate within the recess on the recess bottom, capacitor source plate connector means outside the recess, and circuit path means connected to the detect plate and source plate connector means, and an electrically conductive metal plate member having an attachment portion, a source plate portion, and integral resilient beam means extending between the attachment and source plate member portions disposed in a common plane, the attachment portion of the plate member being secured in electrically conductive, overlying relation to the source plate connector means on the substrate outside the substrate recess to locate the source plate portion of the member in selected spaced relation to the detect plate to form a capacitor and to be movable relative to the detect plate in response to an acceleration force to provide an electrical signal.
- 30. An accelerometer unit comprising an electrically insulating ceramic substrate having a surface and having electrically conducting means on said surface defining a capacitor detect plate and circuit path means connected to the detect plate and source plate connector means, and an electrically conductive metal plate member having an attachment portion, a source plate portion, and integral resilient beam means extending between the attachment and source plate member portions disposed in a common plane, the attachment portion of the plate member being secured in electrically conductive, overlying relation to the source plate connector means on the substrate to locate the source plate portion of the member in selected spaced relation to the detect plate to form a capacitor and to be movable relative to the detect place in response to an acceleration force to provide an electrical signal, the beam means including a pair of first beams extending away from the attachment portion of the plate member to dispose distal ends of the first beams at a location spaced from the attachment portion and a second beam extending from the distal ends of the first beams towards the attachment portion to dispose the capacitor source plate portion of the member in said selected spaced relation to the detect plate between the first beams to be movable along a first axis toward the detect plate in response to an acceleration force applied along the first axis, the source plate portion of the member having integral spacer portions extending toward the respective first beams at a location adjacent the attachment member portion to engage the first beams and limit movement of the source plate member portion toward the first beams in response to acceleration forces along a second axis in said plane perpendicular to the first axis to reduce stress in the first beams in response to the acceleration force along the second axis.
Specification