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Monolithic accelerometer

  • US 5,345,824 A
  • Filed: 03/04/1993
  • Issued: 09/13/1994
  • Est. Priority Date: 08/17/1990
  • Status: Expired due to Term
First Claim
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1. A monolithic semiconductor capacitance-type accelerometer comprising;

  • a semiconductor substrate comprising a surface,a plurality of posts extending from the surface of said substrate,a polysilicon bridge suspended from said posts, said bridge comprising a plurality of moveable fingers,a plurality of electrically conductive substantially stationary fingers, each of said substantially stationary fingers corresponding to one of said moveable fingers and positioned relative to said corresponding moveable finger such that said moveable finger and said corresponding substantially stationary finger form a capacitor,whereby movement of said bridge under an accelerative force causes said moveable fingers to move relative to said substantially stationary fingers and alter the capacitance between said moveable fingers and said corresponding stationary fingers, andcircuitry disposed on said substrate and coupled to said moveable fingers and said substantially stationary fingers for generating a signal indicative of acceleration.

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