Apparatus for mixing liquids in a certain ratio

• US 5,346,302 A
• Filed: 11/21/1991
• Issued: 09/13/1994
• Est. Priority Date: 05/15/1991
• Status: Expired due to Fees

• Current Assignee: Magnachip Semiconductor Limited (Magnachip Semiconductor)
• Original Assignee: Goldstar Electron Co., Ltd. (SK Hynix Inc.)
• Inventors: Ryu, Do H.
• Primary Examiner(s): JENKINS, ROBERT
• Application Number:
  US07/795,450
• Time in Patent Office: 1,027 Days
• Field of Search: 366/101, 366/102, 366/106, 366/107, 366/141, 366/151, 366/152, 366/153, 366/154, 366/160, 366/162, 222/56, 222/64, 422/106, 422/107
• US Class Current: 366/101
• CPC Class Codes: B01F 35/2112 Level of material in a container or the position or shape of the upper surface of the material
• CPC Class Codes: B01F 35/714 for feeding predetermined amounts B01F35/88 takes precedence
• CPC Class Codes: B01F 35/88 by feeding the materials batchwise
• CPC Class Codes: G01F 11/28 with stationary measuring chambers having constant volume during measurement
• CPC Class Codes: G01F 11/284 combined with electric level detecting means G01F11/282, G01F11/30 - G01F11/46 take precedence
• CPC Class Codes: G01G 17/02 for weighing material of filamentary or sheet form
• CPC Class Codes: G01G 19/22 for apportioning materials by weighing prior to mixing them ratio regulation G05D11/00
• CPC Class Codes: G05D 11/134 by sensing the weight of the individual components

Abstract

An apparatus for mixing a deionized water and a hydrofluoric acid precisely in the ratio of 100:1, so as to produce a mixture which are properly used in etching wafters. The mixing apparatus comprises a self-lubricating plastic container of a double construction which enables to obtain a more precise quantity of liquid. The mixing apparatus also comprises an electronic balance measuring the weight of the liquid mixture, an indicator indicating numerically the weight measured by the balance, a mixing tank mixing the liquids, and control valves supplying the liquids in large and small quantities, respectively. According to this arrangement, it is possible to obtain a mixture of a large quantity liquid or a small quantity liquid in a precise mixing ratio with a tolerance of within 1%. Thereby, any poor etching of wafers can be avoided.

Claims

1. A liquid dispenser comprising:

a self-lubricating plastic container;

liquid level sensing means for sensing levels of a liquid supplied in said container;

liquid dispensing means for dispensing the liquid from said container in a quantity corresponding to a capacity of said container; and

automatic liquid supply means for automatically supplying the liquid from a chemical tank to said container.

2. A liquid dispenser in accordance with claim 1, wherein said liquid level sensing means comprises:

a gas diaphragm sensor adapted to sense a level of liquid in the container;

a gas regulator responsive to said gas diaphragm sensor for regulating the pressure of a gas; and

a needle valve adapted to regulate the flow rate of said gas.

3. A liquid dispenser in accordance with claim 1, wherein said liquid dispensing means comprises:

said container having a dispensing container and an outer container, a self-lubricating plastic conduit and an automatic valve which are adapted to drain a predetermined quantity of the liquid from said dispensing container, and another self-lubricating plastic conduit and automatic valve which are adapted to feed the liquid from said outer container to the chemical tank.

4. A liquid dispenser in accordance with claim 3, wherein said automatic liquid supply means comprises said chemical tank storing liquid therein, self-lubricating plastic conduit connected to the conduit of the liquid dispensing means which is adapted to feed the liquid from the outer container to the chemical tank, an automatic valve disposed in said last mentioned conduit, a bellows pump adapted to pump the liquid from the chemical tank to the container, another self-lubricating plastic conduit and automatic valve which are adapted to guide the liquid from the chemical tank to the container, and an empty sensor that indicates the absence of liquid in the chemical tank.

5. A liquid dispenser in accordance with claim 3, wherein said dispensing container has an upper peripheral edge on which a plurality of spaced recesses are located so that a precise quantity of the liquid is contained in said dispensing container.

6. An apparatus for mixing two liquids in a predetermined mixing ratio, comprising:

a liquid dispenser that includes

(a) self-lubricating plastic container,

(b) liquid level sensing means for sensing levels of a liquid supplied in said container,

(c) liquid dispensing means for dispensing liquid from said container in a quantity corresponding to a capacity of said container, and

(d) automatic liquid supply means for automatically supplying liquid from a chemical tank to said container;

mixing means for mixing precisely the liquids in the precise predetermined mixing ratio;

liquid mixture draining means for draining the liquid mixture from said mixing means; and

control means for controlling said previously mentioned means.

7. An apparatus in accordance with claim 6, wherein said mixing means comprises an electronic balance adapted to measure precisely the weight of the liquid mixture, an indicator adapted to indicate numerically the weight measured by said balance, a mixing tank adapted to mix the liquids, a pair of control valves which are adapted to supply the liquids in large and small quantities, respectively, another control valve adapted to control the flow of the liquid mixture fed from said mixing tank, and a N2 gas bubbling unit adapted to uniformly mix the liquids.

8. An apparatus in accordance with claim 6, wherein said liquid mixture draining means comprises a drain pump adapted to pump the liquid mixture from the mixing tank and a chemical filter for separating particles from the liquid mixture.

9. An apparatus in accordance with claim 6, wherein said control means comprises a controller containing a circuit substrate, electronic elements and a switch panel and having an error display function.

10. An apparatus for mixing a combination of liquid chemicals in a predetermined ratio, including

a first liquid dispenser for dispensing a predetermined amount of a first liquid;

a second liquid dispenser for dispensing a predetermined amount of a second liquid; and

mixing means for mixing said first and second liquids;

wherein said first liquid dispenser comprises

an outer container;

a dispensing container located within said outer container, an upper edge of said dispensing container being formed with a plurality of spaced recesses;

supply means for supplying said first liquid to both said outer container and said dispensing container;

liquid sensor means for determining whether said first liquid in said first liquid dispenser is at a first, second or third predetermined level;

first delivery means for delivering said first liquid contained within said dispensing container to said mixing means; and

second delivery means for delivering said first liquid contained within said outer container back to said supply means;

wherein said supply means provides said first liquid until said first level is attained;

said second delivery means drains said first liquid until said second level is reached, such that said first liquid contained with in said dispensing container is at said third level;

said first delivery means drains an amount of liquid from said dispensing container corresponding to said third level, and delivers said amount to said mixing means.