Plasma-enhanced magnetron-sputtered deposition of materials

• US 5,346,600 A
• Filed: 08/14/1992
• Issued: 09/13/1994
• Est. Priority Date: 08/14/1992
• Status: Expired due to Term

• Current Assignee: Hughes Electronics Corporation (AT&T, Inc.)
• Original Assignee: Hughes Aircraft Company (Rtx Corporation)
• Inventors: Matossian, Jesse N., Krajenbrink, Frans G., Nieh, Simon K.
• Primary Examiner(s): Weisstuch, Aaron
• Application Number:
  US07/929,986
• Time in Patent Office: 760 Days
• Field of Search: 204/192.16, 204/192.3, 204/298.05, 204/298.06, 204/298.16, 204/298.18, 204/298.26, 427/523, 427/524, 427/530
• US Class Current: 204/192.3
• CPC Class Codes: C23C 14/0036 Reactive sputtering
• CPC Class Codes: C23C 14/32 by explosion; by evaporation and subsequent ionisation of the vapours , e.g. ion-platingC23C14/34 - C23C14/48 take precedence
• CPC Class Codes: C23C 14/355 using electrons, e.g. triode sputtering
• CPC Class Codes: H01J 37/32706 Polarising the substrate
• CPC Class Codes: H01J 37/3405 Magnetron sputtering

Abstract

Plasma-enhanced magnetron-sputtered deposition (PMD) of materials is employed for low-temperature deposition of hard, wear-resistant thin films, such as metal nitrides, metal carbides, and metal carbo-nitrides, onto large, three-dimensional, irregularly shaped objects (20) without the requirement for substrate manipulation. The deposition is done by using metal sputter targets (18) as the source of the metal and immersing the metal sputter targets in a plasma (16) that is random in direction and fills the deposition chamber (12) by diffusion. The plasma is generated from at least two gases, the first gas comprising an inert gas, such as argon, and the second gas comprising a nitrogen source, such a nitrogen, and/or a carbon source, such as methane. Simultaneous with the deposition, the substrate is bombarded with ions from the plasma by biasing the substrate negative with respect to the plasma to maintain the substrate temperature and control the film microstructure. The substrate, metal targets, and plasma are all electrically decoupled from each other and from walls (14) of the deposition chamber (12), so as to provide independent electrical control of each component. The PMD process is applicable not only to the deposition of hard coatings, but also can be applied to any thin film process such as for electrically and thermally conductive coatings and optical coatings, requiring simultaneous, high-flux, ion-bombardment to control film properties.

Claims

1. Apparatus for depositing a metal compound selected from the group consisting of nitrides and carbides onto a substrate, comprising:

(a) a chamber defined by walls and provided with means for evacuation thereof, means for introducing at least two gases thereinto, and magnetic means for generating a surface magnetic field at said walls of said chamber;

(b) means within said chamber for supporting a substrate on which said metal compound is to be deposited, said means being electrically isolated from said walls of said chamber;

(c) at least one planar magnetron sputter target source comprising the metal component of said metal compound and operatively associated with said substrate, said at least one source electrically isolated from said walls of said chamber, said at least one source capable of being oriented with respect to said substrate;

(d) activation means for turning said at least one target source on and off, said activation means being electrically isolated from said walls of said chamber;

(e) means for creating a plasma from said at least two gases, said at least two gases comprising an inert gas and at least one reactive gas including at least one element selected from the group consisting of nitrogen and carbon, said plasma containing positive ions and electrons from said gases, said plasma filling said chamber by diffusion and being random in direction to allow treatment of three-dimensional, irregularly shaped substrates, said means for creating said plasma positioned with respect to said at least one planar magnetron sputter target source so as to immerse said at least one target source in said plasma, said means for creating said plasma being electrically isolated from said walls of said chamber, said surface magnetic field minimizing loss of said plasma within said chamber;

(f) means for biasing said substrate either positive or negative with respect to said plasma, said biasing means being electrically isolated from said walls of said chamber; and

(g) said substrate said at least one target source, and said plasma electrically decoupled from each other so as to enable operation independent from each other.

2. The apparatus of claims 1 wherein said means for biasing said substrate is independently either DC continuous or pulsed.

3. The apparatus of claim 1 further including means for biasing said target source either positive or negative with respect to said substrate.

4. The apparatus of claim 3 wherein said means for biasing said target source are independently either DC continuous or pulsed.

5. The apparatus of claim 1 further including means for biasing said plasma either positive or negative with respect to said substrate.

6. The apparatus of claims 5 wherein said means for biasing said plasma are independently either DC continuous or pulsed.

7. The apparatus of claim 1 further including means for electrically isolating said plasma from said walls of said chamber.

8. The apparatus of claim 1 wherein said inert gas consists essentially of a gas selected from the group consisting of argon, neon, and xenon.

9. The apparatus of claim 1 wherein said plasma is confined within said chamber by permanent magnet rings arranged in periodicity along said walls of said chamber.

10. A process for depositing a hard coating of a metal compound selected from the group consisting of nitrides, carbides, and carbo-nitrides onto a surface of a substrate material, comprising the steps of:

(a) heating said substrate to a chosen temperature;

(b) depositing said coating of said metal compound onto said surface of said substrate by sputtering a metal from a magnetron sputtering source in the presence of a plasma comprising an inert gas and at least one reactive gas containing an element selected from the group consisting of nitrogen and carbon, said magnetron sputtering source operated independently and electrically decoupled from said plasma and from said substrate; and

(c) simultaneous with said deposition, bombarding said substrate with inert gas ions from said independently controlled and decoupled plasma to maintain said temperature of said substrate and to control the microstructure of said coating.

11. The process of claim 10 wherein said heating is accomplished by biasing said substrate negative with respect to said plasma to bombard said substrate with positive ions from said plasma.

12. The process of claim 11 wherein said positive ions also clean the surface of said substrate by sputtering.

13. The process of claim 10 wherein said heating is accomplished by biasing said substrate positive with respect to the plasma to bombard said substrate with electrons from said plasma.

14. The process of claim 10 wherein said metal nitride is selected from the group consisting of titanium nitride, titanium-aluminum nitride, chromium nitride, and hafnium nitride.

15. The process of claim 10 wherein said metal carbide is selected from the group consisting of titanium carbide, silicon carbide, and tungsten carbide.

16. The process of claim 10 wherein said metal carbo-nitride consists essentially of titanium carbo-nitride.

17. The process of claim 10 wherein said inert gas of said plasma is selected from the group consisting of argon, neon, and xenon.

18. The process of claim 10 wherein said metal compound is a metal nitride and said at least one reactive gas is selected from the group consisting of nitrogen, N₂ O, and ammonia.

19. The process of claim 10 wherein said metal compound is a metal carbide and said at least one reactive gas is selected from the group consisting of methane, ethane, benzene, and carbon dioxide.