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Position sensitive detector providing position information with enhanced reliability and performance

  • US 5,347,132 A
  • Filed: 07/30/1993
  • Issued: 09/13/1994
  • Est. Priority Date: 07/30/1993
  • Status: Expired due to Term
First Claim
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1. A position sensitive anode unit having top, bottom, left and right sides, comprising:

  • a plurality of sets of electrode elements formed on a planar surface of a substrate, each set comprising first, second, third and fourth electrode elements electrically isolated from each other, the first and third electrode elements having wedge shapes tapering from the top to the bottom of the unit and the second and fourth electrode elements having wedge shapes tapering from the bottom to the top, the sets arranged adjacent to each other between the left and right sides of the unit, the first and second electrode elements in each set increasing progressively in width from set to set across the unit and the third and fourth electrode elements decreasing progressively in width from set to set across the unit, and electrical conductors connecting together all of the first electrode elements in all of the sets to form a first electrode, all of the second electrode elements in all of the sets to form a second electrode, all of the third electrode elements in all of the sets to form a third electrode, and all of the fourth electrode elements in all of the sets to form a fourth electrode.

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