Structure of micro-pirani sensor
First Claim
1. A micro-Pirani vacuum meter, a structure thereof comprising:
- (a) a floating plate suspended on a cavity of a silicon substrate made by a anisotropic etching technique;
(b) a plurality of suspending arms extending from said floating plate to connect to said substrate on the circumference of said cavity for supporting said floating plate suspended on said cavity; and
(c) a mixed resistor circuit for temperature compensations;
said mixed resistor circuit being composed of a thermal sensitive constant resistor A with a zero temperature coefficient and a resistor B made of the same material as the thermal sensitive constant resistor A;
both of said resistors being serially connected to each other on said floating plate.
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Accused Products
Abstract
A new structure of a vacuum meter with good designs of temperature compensation and stabilization, The structure comprises a floating plate made by a micro-machining technique and a thermal sensitive element installed on the floating plate, The floating plate has a number of suspending arms extending outward to supporting the floating plate in a cavity of a semiconductor substrate for good heat isolation. The area of the floating plate and the length and width of the suspending arm has a specific ratio for an optimized sensitivity. A dummy resistor for temperature compensation is composed by a serial connection of a constant resistor with almost zero temperature coefficient and the thermal sensitive elements in a specific ratio. The vacuum meter further overlap on a temperature-controlled thermoelectric cooling device and is covered by a thermal shield so that the temperatures on and circumferential to the floating plate can be maintained stably.
50 Citations
7 Claims
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1. A micro-Pirani vacuum meter, a structure thereof comprising:
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(a) a floating plate suspended on a cavity of a silicon substrate made by a anisotropic etching technique; (b) a plurality of suspending arms extending from said floating plate to connect to said substrate on the circumference of said cavity for supporting said floating plate suspended on said cavity; and (c) a mixed resistor circuit for temperature compensations;
said mixed resistor circuit being composed of a thermal sensitive constant resistor A with a zero temperature coefficient and a resistor B made of the same material as the thermal sensitive constant resistor A;
both of said resistors being serially connected to each other on said floating plate. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification