Variable RF power splitter

• US 5,349,313 A
• Filed: 10/22/1993
• Issued: 09/20/1994
• Est. Priority Date: 01/23/1992
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Collins, Kenneth S., Roderick, Craig A., Trow, John R.
• Primary Examiner(s): Pascal, Robert J.
• Assistant Examiner(s): GAMBINO, DARUIS
• Application Number:
  US08/140,338
• Time in Patent Office: 333 Days
• Field of Search: 333/100, 333/17.3, 333/32, 333/124, 333/131, 333/99 PC
• US Class Current: 333/131
• CPC Class Codes: H01F 2029/143 with control winding for generating magnetic bias
• CPC Class Codes: H03H 7/48 Networks for connecting several sources or loads, working on the same frequency or frequency band, to a common load or source phase shifters providing two or more output signals H03H7/21

Abstract

A variable RF power splitter including three serially connected inductors (14, 15, 16) powered by an RF power source (11, 12). Two loads (17, 18), between which the RF power is to be split, are connected to ground from two different points in the inductance string. A variable reactance (19) connected to ground from another point in the inductance string controls the RF power splitting.

Claims

1. An adjustable RF power splitter for coupling power received at an input terminal to two output terminals, wherein the ratio of RF voltage to the two outputs is adjustable, comprising:

first, second, and third mutually coupled inductors connected in series so that the first inductor is connected between a first electrical junction and a second junction, the second inductor is connected between the second junction and a third junction, and the third inductor is connected between the third junction and a fourth junction;

an input terminal and a reference terminal adapted for receiving an RF power input signal therebetween, the input terminal being connected to one of the four junctions;

a variable reactance whose impedance is adjustable over a range, the variable reactance being connected between one of the other three junctions and the reference terminal;

a first output terminal connected t one of the other two junctions; and

a second output terminal connected to the remaining junction;

whereby first and second output voltages are produced between the first and second output terminals, respectively, and the reference terminal, and whereby adjusting the variable reactance operates to vary the ratio between the first and second voltages.

2. A power splitter according to claim 1, wherein the junction to which the input terminal is connected is the first junction.

3. A power splitter according to claim 1, wherein the first, second, and third inductors are constructed by winding first, second, and third coils, respectively, around a common ferromagnetic core.

4. A power splitter according to claim 1, wherein the variable reactance resonates at the frequency of the RF input signal when the variable reactance is adjusted to a point near the middle of its adjustment range, whereby the variable reactance can be adjusted to a capacitive impedance at one end of its adjustment range and to an inductive impedance at the opposite end of its adjustment range.

5. A power splitter according to claim 4, wherein the variable reactance comprises a fixed inductor in series with a variable capacitor.

6. A power splitter according to claim 4, wherein the variable reactance comprises a fixed capacitor in series with a variable inductor.

7. A power splitter according to claim 6, wherein the variable inductor comprises a coil wound on a nonlinear ferromagnetic core, and wherein a magnetic field of adjustable intensity is applied to the nonlinear core to adjust the inductance of the variable inductor.

8. A power splitter according to claim 1, where said first, second, and third mutually coupled inductors have values of pairwise mutual coefficients of coupling K₁₂, K₁₃, and K₂₃ therebetween of at least 0.8.

9. An RF power splitter, comprising:

first, second, and third mutually coupled inductors connected in series, the first inductor connected between a first terminal and a second terminal, the second inductor connected between the second terminal and a third terminal, and the third inductor connected between the third terminal and a fourth terminal;

an RF power input signal connected between one of said four terminals and a reference terminal;

a first and a second load, each load connected between a different one of the other three terminals, respectively, and said reference terminal; and

a variable reactance connected between a remaining one of the four terminals and said reference terminal, said variable reactance being operable to vary the voltage ratio between the first load and the second load.

10. A power splitter according to claim 9, wherein the junction to which the input signal is connected is the first junction.

11. A power splitter according to claim 9, wherein the first, second, and third inductors are constructed by winding first, second, and third coils, respectively, around a common ferromagnetic core.

12. A power splitter according to claim 9, wherein the variable reactance resonates at the frequency of the RF input signal when the variable reactance is adjusted to a point near the middle of its adjustment range, whereby the variable reactance can be adjusted to a capacitive impedance at one end of its adjustment range and to an inductive impedance at the opposite end of its adjustment range.

13. A power splitter according to claim 12, wherein the variable reactance comprises a fixed inductor in series with a variable capacitor.

14. A power splitter according to claim 12, wherein the variable reactance comprises a fixed capacitor in series with a variable inductor.

15. A power splitter according to claim 14, wherein the variable inductor comprises a coil wound on a nonlinear ferromagnetic core, and wherein a magnetic field of adjustable intensity is applied to the nonlinear core to adjust the inductance of the variable inductor.