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Comb drive micromechanical tuning fork gyro

  • US 5,349,855 A
  • Filed: 04/07/1992
  • Issued: 09/27/1994
  • Est. Priority Date: 04/07/1992
  • Status: Expired due to Term
First Claim
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1. An inertial rate sensor comprising:

  • a first weighted element suspended to rotate about a first axis and adapted to vibrate in a direction substantially orthogonal to said first axis;

    a set of driven electrodes projecting from said suspended element in the direction of vibration;

    a set of drive electrodes freely meshing with said set of driven electrodes;

    a source of vibration drive contacting, through said suspended element, said set of driven electrodes and said set of drive electrodes with opposite polarity signals to induce vibration of said suspended element;

    a plurality of position sensors placed at locations facing said suspended element wherein spacing between said plurality of position sensors and said suspended element varies with rotation thereof about said axis;

    an electrical signal source for energizing at least some of said plurality of position sensors relative to said suspended element; and

    a signal sensor responsive to at least a subset of said plurality of position sensors for receiving a signal varying with rotation of said element about said axis.

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