Magnetic sensor

• US 5,351,027 A
• Filed: 03/17/1992
• Issued: 09/27/1994
• Est. Priority Date: 03/20/1991
• Status: Expired due to Term

• Current Assignee: Hitachi, Ltd.
• Original Assignee: Hitachi, Ltd.
• Inventors: Takahashi, Tadashi, Morinaga, Shigeki, Kawamata, Syooichi
• Primary Examiner(s): Lateef, Marvin M.
• Application Number:
  US07/852,663
• Time in Patent Office: 924 Days
• Field of Search: 338/32 R, 324/207.21, 324/252
• US Class Current: 338/32.00R
• CPC Class Codes: G01R 33/09 Magnetoresistive devices

Abstract

A magnetic sensor has a elongate sensor region formed by an elongate magneto-resistive element and an overlapping elongate conductive element. The ends of the magneto-resistive element and the conductive element are connected to terminals which are arranged in an array which is spaced in a predetermined direction from the elongate sensor region. The array may be at one side or one end of the elongate sensor region, and the terminals may have a linear arrangement within the array. The two terminals connected to the magneto-resistive element are preferably adjacent, and preferably the terminals connected to the ends of the magneto-resistive element and the conductive element closer to the array are also adjacent. A common terminal may be provided. Two such sensors may form a sensor array which is particularly suitable for use in a position sensor in e.g. a torque sensor of a power steering system.

Claims

1. A magnetic sensor comprising:

an elongate sensor region, said elongate sensor region comprising an elongate magneto-resistive element having first and second ends and an elongate conductive element overlapping said elongate magneto-resistive element and having first and second ends; and

a plurality of terminals electrically connected to said elongate sensor region for providing respective electrical connection to said first and second ends of said elongate magneto-resistive element and said elongate conductive element;

wherein said terminals together form an array which is spaced from said elongate sensor region in a predetermined direction of elongation of said elongate magneto-resistive element.

2. A magnetic sensor according to claim 1, wherein said plurality of terminals have a linear arrangement within said array.

3. A magnetic sensor according to claim 1, wherein said plurality of terminals includes first and second terminals respectively connected to said first and second ends of said elongate magneto-resistive element and said first and second terminals are adjacent in said array.

4. A magnetic sensor according to claim 1, wherein said predetermined direction extends from said first end of said elongate magneto-resistive element away from said second end thereof.

5. A magnetic sensor according to claim 1, wherein said predetermined direction is perpendicular to said elongate sensor region.

6. A magnetic sensor according to claim 1, wherein said elongate magneto-resistive element is of ferromagnetic thin film.

7. A magnetic sensor as claimed in claim 1, further comprising:

a bias current control circuit electrically connected to said elongate magneto-resistive element and said elongate conductive element, said bias current control circuit changing a bias current applied to said elongate conductive member in response to changes in a magneto-resistance of said elongate magneto-resistive element induced by a signal magnetic field applied to said elongate magneto-resistive element, in order to maintain a net magnetic field applied to said elongate magneto-resistive element at a substantially constant level and obtain a measurement of said signal magnetic field by monitoring a level of said bias current.

9. A magnetic sensor according to claim 4, wherein said first and third terminals are adjacent in said array.

10. A magnetic sensor as claimed in claim 4, further comprising:

a bias current control circuit electrically connected to said elongate magneto-resistive element and said elongate conductive element, said bias current control circuit changing a bias current applied to said elongate conductive member in response to changes in a magneto-resistance of said elongate magneto-resistive element induced by a signal magnetic field applied to said elongate magneto-resistive element, in order to maintain a net magnetic field applied to said elongate magneto-resistive element at a substantially constant level and obtain a measurement of said signal magnetic field by monitoring a level of said bias current.

12. A magnetic sensor as claimed in claim 6, further comprising:

a bias current control circuit electrically connected to said elongate magneto-resistive element and said elongate conductive element, said bias current control circuit changing a bias current applied to said elongate conductive member in response to changes in a magneto-resistance of said elongate magneto-resistive element induced by a signal magnetic field applied to said elongate magneto-resistive element, in order to maintain a net magnetic field applied to said elongate magneto-resistive element at a substantially constant level and obtain a measurement of said signal magnetic field by monitoring a level of said bias current.

14. A magnetic sensor according to claim 7, wherein said plurality of terminals include a first terminal connected to said first end of said elongate magneto-resistive element and a third terminal connected to said first end of said elongate conductive element.

16. A magnetic sensor according to claim 9, wherein said at least one fifth terminal comprises two terminals, and said first and third terminals are between said two terminals in said array.

17. A magnetic sensor as claimed in claim 7, further comprising:

a bias current control circuit electrically connected to said elongate magneto-resistive element and said elongate conductive element, said bias current control circuit changing a bias current applied to said elongate conductive member in response to changes in a magneto-resistance of said elongate magneto-resistive element induced by a signal magnetic field applied to said elongate magneto-resistive element, in order to maintain a net magnetic field applied to said elongate magneto-resistive element at a substantially constant level and obtain a measurement of said signal magnetic field by monitoring a level of said bias current.

8. A magnetic sensor comprising:

an elongate sensor region, said elongate sensor region comprising an elongate magneto-resistive element having first and second ends and an elongate conductive element overlapping said elongate magneto-resistive element and having first and second ends; and

a plurality of terminals electrically connected to said elongate sensor region for providing respective electrical connection to said first and second ends of said elongate magneto-resistive element and said elongate conductive element;

wherein said terminals together form an array which is spaced in a predetermined direction from said elongate sensor region;

wherein said plurality of terminals include first and second terminals respectively connected to said first and second ends of said elongate magneto-resistive element and said first and second terminals are adjacent in said array;

wherein said plurality of terminals include third and fourth terminals respectively connected to said first and second ends of said elongate conductive element.

15. A magnetic sensor according to claim 8, wherein said first and third terminals are adjacent.

21. A magnetic sensor array according to claim 15 wherein said second end of said elongate magneto-resistive element of each of said first and second magnetic sensors are electrically connected in common.

22. A magnetic sensor array according to claim 15 wherein said second end of said elongate conductive element of each of said first and second magnetic sensors are electrically connected in common.

23. A magnetic sensor array according to claim 15 wherein said second end of each of said elongate magneto-resistive element and said elongate conductive element of each of said first and second magnetic sensors are connected in common.

24. A magnetic sensor as claimed in claim 15, further comprising:

a bias current control circuit electrically connected to said elongate magneto-resistive element and said elongate conductive element, said bias current control circuit changing a bias current applied to said elongate conductive member in response to changes in a magneto-resistance of said elongate magneto-resistive element induced by a signal magnetic field applied to said elongate magneto-resistive element, in order to maintain a net magnetic field applied to said elongate magneto-resistive element at a substantially constant level and obtain a measurement of said signal magnetic field by monitoring a level of said bias current.

11. An magnetic sensor comprising:

an elongate sensor region, said elongate sensor region comprising an elongate magneto-resistive element having first and second ends and an elongate conductive element overlapping said elongate magneto-resistive element and having first and second ends; and

a plurality of terminals electrically connected to said elongate sensor region for providing respective electrical connection to said first and second ends of said elongate magneto-resistive element and said elongate conductive element;

wherein said terminals together form an array which is spaced in a predetermined direction from said elongate sensor region;

wherein said first and second ends of said elongate magneto-resistive element are respectively adjacent said first and second ends of said elongate conductive element, and said terminals include at least one first terminal connected to said first end of said elongate magneto-resistive element and a third terminal connected to said first end of said elongate conductive element and said first and third terminals are adjacent in said array.

19. A magnetic sensor as claimed in claim 11, further comprising:

a bias current control circuit electrically connected to said elongate magneto-resistive element and said elongate conductive element, said bias current control circuit changing a bias current applied to said elongate conductive member in response to changes in a magneto-resistance of said elongate magneto-resistive element induced by a signal magnetic field applied to said elongate magneto-resistive element, in order to maintain a net magnetic field applied to said elongate magneto-resistive element at a substantially constant level and obtain a measurement of said signal magnetic field by monitoring a level of said bias current.

13. A magnetic sensor comprising:

an elongate sensor region, said elongate sensor region comprising an elongate magneto-resistive element having first and second ends and an elongate conductive element overlapping said elongate magneto-resistive element and having first and second ends; and

a plurality of terminals electrically connected to said elongate sensor region for providing respective electrical connection to said first and second ends of said elongate magneto-resistive element and said elongate conductive element;

wherein said terminals together form an array which is spaced in a predetermined direction from said elongate sensor region;

wherein said first and second ends of said elongate magneto-resistive element are respectively adjacent said first and second ends of said elongate conductive element, and said terminals include at least one fifth terminal connected in common to said second end of said elongate magneto-resistive element and said second end of said elongate conductive element.

18. A magnetic sensor comprising:

an elongate sensor region, said elongate sensor region comprising an elongate magneto-resistive element having first and second ends and an elongate conductive element overlapping said elongate magneto-resistive element and having first and second ends; and

a plurality of terminals electrically connected to said elongate sensor region for providing respective electrical connection to said first and second ends of said elongate magneto-resistive element and said elongate conductive element;

wherein said terminals together form an array which is spaced in a predetermined direction from said elongate sensor region;

further including a plurality of leads respectively connecting said plurality of terminals to said elongate sensor region, and each of said plurality of leads has a width which is greater than a transverse width of said elongate magneto-resistive element.

20. A magnetic sensor array comprising a first magnetic sensor and a second magnetic sensor, each of said first and second magnetic sensors including:

an elongate sensor region, said elongate sensor region comprising an elongate magneto-resistive element having first and second ends and an elongate conductive element overlapping said elongate magnetic resistance element and;

a plurality of terminals electrically connected to said elongate sensor region for providing respective electrical connection to said first and second ends of said elongate magneto-resistive element and said elongate conductive element;

wherein said terminals together form an array which is spaced in a predetermined direction from said elongate sensor region.