Method for forming diamond-like nanocomposite or doped-diamond-like nanocomposite films

• US 5,352,493 A
• Filed: 05/03/1991
• Issued: 10/04/1994
• Est. Priority Date: 05/03/1991
• Status: Expired due to Fees

• Current Assignee: Nanodynamics, Inc., NV Bekaert SA
• Original Assignee: Veniamin Dorfman
• Inventors: Pypkin, Boris, Dorfman, Veniamin
• Primary Examiner(s): King, Roy V.
• Application Number:
  US07/695,552
• Time in Patent Office: 1,250 Days
• Field of Search: 427/38, 427/249, 427/122, 427/314, 427/62, 427/530, 427/577, 427/573, 427/574, 427/578, 427/570, 423/446, 428/408, 156/DIG. 68
• US Class Current: 427/530
• CPC Class Codes: A61L 27/306 Other specific inorganic materials not covered by A61L27/303 - A61L27/32
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: C23C 14/0036 Reactive sputtering
• CPC Class Codes: C23C 14/06 characterised by the coating material C23C14/0021 , C23C14/04 take precedence
• CPC Class Codes: C23C 14/0605 Carbon
• CPC Class Codes: C23C 14/221 Ion beam deposition C23C14/46, C23C14/48 take precedence
• CPC Class Codes: C23C 16/30 Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
• CPC Class Codes: C23C 16/4485 by evaporation without using carrier gas in contact with the source material C23C16/4486 takes precedence
• CPC Class Codes: C23C 16/45568 Porous nozzles
• CPC Class Codes: C23C 16/503 using dc or ac discharges
• CPC Class Codes: G02B 1/105 Protective coatings
• CPC Class Codes: G02B 1/111 using layers comprising organic materials
• CPC Class Codes: G02B 1/14 Protective coatings, e.g. hard coatings
• CPC Class Codes: G11B 5/727 Inorganic carbon protective coating, e.g. graphite, diamond like carbon or doped carbon
• CPC Class Codes: G11B 5/8408 protecting the magnetic layer
• CPC Class Codes: Y10S 427/105 Utilizing ion plating or ion implantation
• CPC Class Codes: Y10S 427/106 Utilizing plasma, e.g. corona, glow discharge, cold plasma
• CPC Class Codes: Y10T 428/30 Self-sustaining carbon mass or layer with impregnant or other layer

Abstract

The present invention relates to the formation of a class of nanocomposite amorphous materials consisting of interpenetrating random networks of predominantly sp3 bonded carbon stabilized by hydrogen, glass-like silicon stabilized by oxygen and random networks of elements from the 1-7b and 8 groups of the periodic table. The materials have high strength and microhardness, flexibility, low coefficient of friction and high thermal and chemical stability. Nanocomposites containing networks of metallic elements can have conductivity variable from insulating dielectric to metallic. The materials have a wide range of applications as protective coatings and as electrically active materials. Metallic nanocomposites can exhibit superconductivity at low temperatures.

Claims

1. A method of fabricating diamond-like nanocomposite or doped-diamond-like nanocomposite films containing the constituent elements carbon, hydrogen, silicon, oxygen and metal, comprising:

depositing onto a substrate by co-deposition a clusterless particle beams comprised of ions, atoms and/or radicals of said constituent elements, the free path length of each of particles of said constituent elements being in excess of the distance between its source and the growing film surface of the substrate; and

wherein at least 50% of carbon particles comprise an energy above 100 eV, and the temperature of the substrate during growth is less than about 500°

C.

2. The method of fabricating films according to claim 1, wherein the pressure during deposition does not exceed 3×

10^-4 torr, the temperature of the substrate does not exceed 200°

C. the carbon particles comprise an energy in the range from about 100 to 5,000 eV, silicon particles comprise an energy in the range of about 25 to 300 eV, and metal particles comprise free atoms or monatomic ions, the energy of the metal atoms/ions is less than about 25 eV.

3. The method of fabricating films according to claim 2, wherein the carbon particles are generated by a plasma discharge generator with a plasma energy density greater than 5 kWh/gram-atom, the carbon particles being extracted by a high-voltage field in vacuum and directed onto the substrate to be coated, the potential of the substrate being 0.3-5.0 kv varying with a frequency in the range from about 1 to 25 MHz, and the ratio of the electron emission rate to the carbon particles flow rate in the plasma discharge generator ranges from about 0.5 to 1.5 electrons per particle.

4. The method of fabricating films according to claim 3, wherein the constituent elements of carbon, hydrogen, silicon and oxygen are obtained from the decomposition of an organo-siloxane, and wherein the number of silicon atoms is from about 1 to 10.

5. The method of fabricating films according to claim 4, wherein the organo-siloxane is injected into the plasma discharge generator through a heated porous ceramic or metallo-ceramic.

6. The method of fabricating films according to claim 4, wherein the organo-siloxane is injected into the plasma discharge generator directly from a diffusion pump.

7. The method of fabricating films according to claim 4, wherein the carbon particles are created by sputtering a carbon target and the hydrogen particles are created using hydrogen as a hydrocarbon gas.

8. The method of fabricating films according to claim 4, wherein the silicon particles are created by sputtering a silicon target and the oxygen particles are created using an oxygen gas.

9. The method of fabricating films according to claim 1, wherein the particle beams are neutral radicals reflected from a high voltage target and directed onto the substrate to be coated.

10. The method of fabricating films according to claim 1, wherein the particle beams are generated by ion bombardment through a siloxane vapor introduced into a vacuum deposition chamber.

11. The method of fabricating films according to claim 3, wherein said organo-siloxane is polyphenylmethylsiloxane.