Laser imageable photomask constructions
First Claim
Patent Images
1. A photomask construction for use in conjunction with a source of actinic radiation, the construction comprising:
- a. an ignition layer at least partially opaque to actinic radiation and ignitable by exposure to laser radiation;
b. an ignitable metal layer at least partially opaque to actinic radiation and which combines with the first layer to block at least 99% of incident actinic radiation, the metal layer ablating in response to combustion of the ignition layer;
c. a mechanically strong, durable and flexible third layer that is substantially transparent to actinic radiation.
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Abstract
Novel photomask blanks and methods for producing photomasks using laser-imaging apparatus. The photomask blanks include at least one layer that absorbs laser energy and ablates in response thereto, and, where unremoved as a result of the imaging process, perform the masking function by blocking the passage of actinic radiation; and a a mechanically strong, durable and flexible substrate that is substantially transparent to actinic radiation.
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Citations
12 Claims
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1. A photomask construction for use in conjunction with a source of actinic radiation, the construction comprising:
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a. an ignition layer at least partially opaque to actinic radiation and ignitable by exposure to laser radiation; b. an ignitable metal layer at least partially opaque to actinic radiation and which combines with the first layer to block at least 99% of incident actinic radiation, the metal layer ablating in response to combustion of the ignition layer; c. a mechanically strong, durable and flexible third layer that is substantially transparent to actinic radiation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A photomask construction for use in conjunction with a source of actinic radiation, the construction comprising:
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a. a first layer at least partially opaque to actinic b. a metal layer at least partially opaque to actinic radiation and which combines with the first layer to block at least 99% of incident actinic radiation; c. a mechanically strong, durable and flexible third layer that is substantially transparent to actinic radiation; and d. a fourth layer located between the metal and third layers, the fourth layer; i. exhibiting limited thermal stability; and ii. having sufficient thickness to ablate only partially in response to ablation of the metal layer. - View Dependent Claims (12)
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Specification