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Laser imageable photomask constructions

  • US 5,354,633 A
  • Filed: 09/22/1993
  • Issued: 10/11/1994
  • Est. Priority Date: 09/22/1993
  • Status: Expired due to Term
First Claim
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1. A photomask construction for use in conjunction with a source of actinic radiation, the construction comprising:

  • a. an ignition layer at least partially opaque to actinic radiation and ignitable by exposure to laser radiation;

    b. an ignitable metal layer at least partially opaque to actinic radiation and which combines with the first layer to block at least 99% of incident actinic radiation, the metal layer ablating in response to combustion of the ignition layer;

    c. a mechanically strong, durable and flexible third layer that is substantially transparent to actinic radiation.

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