Process for etching mixed metal oxides
First Claim
1. A process for controllably etching at least one of the metal oxides from a mixed metal oxide surface comprising contacting the surface with an aqueous solution of at least one chelating poly-carboxylic acid selected from the group consisting of bicarboxylic acids and tricarboxylic acids.
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Abstract
An etching process using dicarboxylic and tricarboxylic acids as chelating etchants for mixed metal oxide films such as high temperature superconductors and ferroelectric materials. Undesirable differential etching rates between different metal oxides are avoided by selection of the proper acid or combination of acids. Feature sizes below one micron, excellent quality vertical edges, and film thicknesses in the 100 Angstom range may be achieved by this method.
33 Citations
18 Claims
- 1. A process for controllably etching at least one of the metal oxides from a mixed metal oxide surface comprising contacting the surface with an aqueous solution of at least one chelating poly-carboxylic acid selected from the group consisting of bicarboxylic acids and tricarboxylic acids.
- 16. A process for controllably etching at least one of the metal oxides from a ferroelectric material selected from the group consisting of PZT and PLZT compounds comprising contacting the surface of the material with an aqueous solution of at least one chelating poly-carboxylic acid.
Specification