Field effect devices having short period superlattice structures using Si and Ge

• US 5,357,119 A
• Filed: 02/19/1993
• Issued: 10/18/1994
• Est. Priority Date: 02/19/1993
• Status: Expired due to Term

• Current Assignee: Regents of the University of California (University of California)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Park, Jin S., Wang, Kang L.
• Primary Examiner(s): MINTEL, WILLIAM A
• Application Number:
  US08/019,719
• Time in Patent Office: 606 Days
• Field of Search: 257/24, 257/18, 257/19, 257/192, 257/194, 257/195, 257/20
• US Class Current: 257/18
• CPC Class Codes: H01L 27/092 complementary MIS field-effect transistors
• CPC Class Codes: H01L 29/155 Comprising only semiconductor materials H01L29/154 takes precedence
• CPC Class Codes: H01L 29/78 with field effect produced by an insulated gate H01L29/7725, H01L29/775, H01L29/778 take precedence

Abstract

Carrier mobility in a heterojunction field effect device is increased by reducing or eliminating alloy scattering. The active channel region of the field effect device uses alternating layers of pure silicon and germanium which form a short period superlattice with the thickness of each layer in the superlattice being no greater than the critical thickness for maintaining a strained heterojunction. The gate contact of the field effect device can comprise quantum Si/Ge wires which provide quantum confinement in the growth plane, thereby allowing the field effect device to further improve the mobility by restricting phonon scattering. The structure can be used to improve device speed performance.

Claims

1. A field effect device comprising

a monocrystalline silicon semiconductor substrate,

a first epitaxial layer of silicon grown on said substrate and doped with a first conductivity type dopant,

a plurality of layers of semiconductor material epitaxially grown on said first epitaxial layer, said plurality of layers comprising alternate single layers of silicon and of germanium semiconductor materials, thereby forming a plurality of heterojunctions in a superlattice structure,

a source and a drain formed in spaced apart regions in said first epitaxial layer with said superlattice structure therebetween, and

a gate contact formed over said superlattice structure.

2. The field effect device as defined by claim 1 and further including an insulation layer between said gate contact and said superlattice structure.

3. The field effect device as defined by claim 2 and further including a buffer layer of silicon over said superlattice structure, said insulation layer comprising silicon oxide formed on said layer of silicon, said superlattice structure functioning as a conduction channel.

4. The field effect device as defined by claim 3 and further including an undoped spacer layer on which said superlattice structure is formed.

8. The field effect device as defined by claim 4 wherein said superlattice is undoped.

18. The field effect device as defined by claim 1 wherein said gate contact comprises a plurality of quantum wires.

19. The field effect device as defined by claim 18 wherein said quantum wires comprise a layer of doped semiconductor material which has been etched to form said quantum wires.

20. The field effect device as defined by claim 19 wherein said layer of doped semiconductor material comprises a germanium-silicon alloy.

5. The field effect device as defined by claim 5 wherein numbers of atomic layers for silicon and germanium are n and m and the ratio of n to m+n equals alloy concentration of the buffer layer whereby said superlattice has no average strain with respect to said buffer layer.

6. The field effect device as defined by claim 5 wherein thickness of each silicon and germanium layer in said superlattice is not greater than a critical thickness for maintaining a strained heterojunction.

7. The field effect device as defined by claim 5 wherein said first conductivity type is n-type, said source and said drain being doped with p-type dopant.

9. The field effect device as defined by claim 7 wherein said gate contact comprises doped polycrystalline silicon.

10. The field effect device as defined by claim 7 wherein said field effect device is one of two complementary field effect devices.

11. A field effect device comprising

a monocrystalline silicon semiconductor substrate,

a first epitaxial layer of silicon-germanium alloy grown on said substrate and doped with a first conductivity type dopant,

a plurality of layers of semiconductor material epitaxially grown on said first epitaxial layer said plurality of layers comprising alternate single layers of silicon and of germanium semiconductor materials, thereby forming a plurality of heterojunctions in a superlattice structure,

a source and a drain formed in spaced apart regions in said first epitaxial layer with said superlattice structure therebetween, and

a gate contact formed over said superlattice structure.

12. The field effect device as defined by claim 11 and further including an undoped setback layer of silicon epitaxially grown on said superlattice, a doped layer of semiconductor material epitaxially grown on said setback layer, and an undoped cap layer of silicon epitaxially grown on said doped layer.

13. The field effect device as defined by claim 12 wherein thickness of each layer in said superlattice is not greater than a critical thickness for maintaining a strained heterojunction.

14. The field effect device as defined by claim 13 wherein said first conductivity type dopant is p-type, said source and said drain being doped with n-type dopant, and said superlattice structure is undoped.

15. The field effect device as defined by claim 13 wherein said first conductivity type is n-type, said source and said drain being doped p-type.

16. The field effect device as defined by claim 14 wherein said gate contact comprises a Schottky metal contact.

17. The field effect device as defined by claim 16 wherein said field effect device is one of two complementary field effect devices.