Light emitting diode array with dovetail

• US 5,357,123 A
• Filed: 05/03/1993
• Issued: 10/18/1994
• Est. Priority Date: 05/14/1992
• Status: Expired due to Term

• Current Assignee: Ricoh Company Limited
• Original Assignee: Ricoh Company Limited, Ricoh Research Institute Of General Electronics Co., Ltd. (Ricoh Company Limited)
• Inventors: Sugawara, Satoru
• Primary Examiner(s): MINTEL, WILLIAM A
• Application Number:
  US08/057,482
• Time in Patent Office: 533 Days
• Field of Search: 257/92, 257/88, 257/89, 257/90, 257/93, 257/622, 257/623, 257/627, 257/628, 257/926, 257/95, 372/49, 372/50
• US Class Current: 257/88
• CPC Class Codes: B41J 2/45 using light-emitting diode [LED] or laser arrays
• CPC Class Codes: H01L 27/15 including semiconductor components having potential barriers, specially adapted for light emission

Abstract

A light emitting diode array has light emitting dots arranged in a line and is characterized in that a semiconductor substrate of a chip constituting the light emitting diode array has a Dovetail grooved mesa shape on a chip end face opposed to an adjacent chip and arranged in a direction perpendicular to an arranging direction of light emitting diodes. A light emitting portion can be protected from chipping even when a length from the light emitting portion of the light emitting diode array to a chip end portion is shorter than the size of a chipping portion.

Claims

1. A light emitting diode array having a plurality of light emitting diodes arranged in a line on a semiconductor substrate, wherein said semiconductor substrate has end faces in a direction perpendicular to an arranging direction of the light emitting diodes and a Dovetail grooved mesa shape on each of said end faces in a direction perpendicular to an arranging direction of the light emitting diodes.

2. A light emitting diode array as claimed in claim 1, wherein the Dovetail grooved mesa shape has an angle reflecting a crystal property.

3. A light emitting diode array as claimed in claim 1, wherein the Dovetail grooved mesa shape is simultaneously formed on each of the end faces in the direction perpendicular to the arranging direction of the light emitting diodes by one of a wet etching method and a dry etching method.

4. A light emitting diode array as claimed in claim 3, wherein a plurality of light emitting diode arrays arranged in a line are used for a light source for an optical printer.

5. A light emitting diode array as claimed in claim 2, wherein the Dovetail grooved mesa shape is formed in a direction of 011.

11. A light emitting diode array as claimed in claim 1, wherein a cutting length of the semiconductor substrate in the Dovetail grooved mesa shape is set independent of a length between a center portion of a light emitting diode adjacent to the end face and the end face, a length between center portions of light emitting diodes adjacent to each other, and a length between the end face and an edge of the light emitting diode adjacent to the end face.

15. A light emitting diode array as claimed in claim 1, wherein the light emitting diode array is a high density type light emitting diode array.

16. A light emitting diode array as claimed in claim 1, wherein the light emitting diode array is an edge emitting type light emitting diode array.

6. A light emitting diode array having a plurality of light emitting diodes arranged in a line on a semiconductor substrate, wherein said semiconductor substrate has end faces in a direction perpendicular to an arranging direction of the light emitting diodes and end faces in the arranging direction of the light emitting diodes, and a Dovetail grooved mesa shape on each of said end faces in a direction perpendicular to an arranging direction of the light emitting diodes and has a V grooved mesa shape on each of said end faces in the arranging direction of the light emitting diodes.

7. A light emitting diode array as claimed in claim 6, wherein the Dovetail grooved mesa shape on each of the end faces in the direction perpendicular to the arranging direction of the light emitting diodes and the V grooved mesa shape on each of the end faces in the arranging direction of the light emitting diodes are respectively formed simultaneously by one of a wet etching method and a dry etching method.

8. A light emitting diode array as claimed in claim 7, wherein a plurality of light emitting diode arrays arranged in a line are used for a light source for an optical printer.

9. A light emitting diode array as claimed in claim 6, wherein the Dovetail grooved mesa shape is formed by applying the wet etching method after the dry etching method is applied to the end faces in the direction perpendicular to the arranging direction of the light emitting diodes.

10. A light emitting diode array as claimed in claim 9, wherein the light emitting diodes are formed with an equal clearance in a direction of <

011>

on a substrate face of (100).

12. A light emitting diode array as claimed in claim 6, wherein a cutting length of the semiconductor substrate in the Dovetail grooved mesa shape is set independent of a length between a center portion of a light emitting diode adjacent to the end face in the direction perpendicular to the arranging direction of the light emitting diodes and the end face in the direction perpendicular to the arranging direction of the light emitting diodes, a length between center portions of light emitting diodes adjacent to each other, and a length between the end face in the direction perpendicular to the arranging direction of the light emitting diodes and an edge of the light emitting diode adjacent to the end face in the direction perpendicular to the arranging direction of the light emitting diodes.

13. A light emitting diode array as claimed in claim 6, wherein the light emitting diode array is a high density type light emitting diode array.

14. A light emitting diode array as claimed in claim 6, wherein the light emitting diode array is an edge emitting type light emitting diode array.