Apparatus and method for automatically adjusting power output of an ultrasonic generator

• US 5,357,423 A
• Filed: 02/22/1993
• Issued: 10/18/1994
• Est. Priority Date: 02/22/1993
• Status: Expired due to Fees

• Current Assignee: Kulicke & Soffa Investments, Inc.
• Original Assignee: Kulicke & Soffa Investments, Inc.
• Inventors: Sowers, Michael J., Weaver, James M.
• Primary Examiner(s): Smith, Jerry
• Assistant Examiner(s): Garland, Steven R.
• Application Number:
  US08/020,367
• Time in Patent Office: 603 Days
• Field of Search: 364/148, 364/477, 364/481, 364/482, 364/484, 364/468, 228/1.1, 228/110.1, 318/116, 310/26, 310/316, 156/73.1, 156/580.1, 156/73.2-73.4, 264/23, 425/174.2, 128/24 AA, 128/660.03
• US Class Current: 700/28
• CPC Class Codes: B23K 20/10 making use of vibrations, e.g. ultrasonic welding
• CPC Class Codes: H01L 2224/05599 Material
• CPC Class Codes: H01L 2224/45099 Material
• CPC Class Codes: H01L 2224/48 of an individual wire connector
• CPC Class Codes: H01L 2224/78 Apparatus for connecting with wire connectors
• CPC Class Codes: H01L 2224/78301 Capillary
• CPC Class Codes: H01L 2224/85203 Thermocompression bonding
• CPC Class Codes: H01L 2224/85205 Ultrasonic bonding
• CPC Class Codes: H01L 24/78 Apparatus for connecting with wire connectors
• CPC Class Codes: H01L 24/85 using a wire connector wire bonding in general B23K20/004
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 2924/01015 Phosphorus [P]
• CPC Class Codes: H01L 2924/01023 Vanadium [V]
• CPC Class Codes: H01L 2924/01033 Arsenic [As]
• CPC Class Codes: H01L 2924/01082 Lead [Pb]
• CPC Class Codes: H01L 2924/1306 Field-effect transistor [FET]
• CPC Class Codes: H01L 2924/13091 Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
• CPC Class Codes: H01L 2924/19043 being a resistor
• CPC Class Codes: H01L 2924/30105 Capacitance
• CPC Class Codes: H01L 2924/30107 : Inductance
• CPC Class Codes: H01L 2924/3011 : Impedance

Abstract

Apparatus and a method for controlling the power output of an ultrasonic generator to a transducer includes a variable impedance network circuit which is interposed between the generator and the transducer. Sensing circuits and a microprocessor are coupled to the input of the transducer so that the total impedance Z_T, the transducer impedance in free air Z_FA and the load impedance Z_L may be calculated and the network impedance Z_NW may be set for a bonding operation to maintain the power level P_L or the impedance Z_L at a desired predetermined level.

Claims

1. Apparatus for adjusting the power output of an ultrasonic generator to a transducer comprising:

an ultrasonic power generator,

a variable impedance network coupled to the output of said ultrasonic power generator,

an ultrasonic transducer coupled to the output of said variable impedance network,

said variable impedance network comprising a variable impedance transistor circuit coupled in series between the output of said ultrasonic power generator and the input to said ultrasonic transducer,

microprocessor means coupled to said ultrasonic power generator and to said variable impedance network,

means for sensing current and voltage values at the output of said ultrasonic power generator coupled to said microprocessor means, and

control means coupled to said microprocessor means and to said variable impedance network for setting a predetermined impedance in series between said ultrasonic power generator and said ultrasonic transducer.

2. Apparatus as set forth in claim 1 wherein said control means comprises a manually operable keypad for entering data into said microprocessor.

3. Apparatus as set forth in claim 1 wherein said control means comprise a manually operable keyboard for selecting one of a plurality of automatic modes of operation.

4. Apparatus as set forth in claim 1 wherein said control means comprise a plurality of transistors each having control electrodes and amplifier means coupled to the control electrodes of each of said transistor for varying the series impedance of said transistors and said variable impedance network.

5. Apparatus as set forth in claim 4 wherein said plurality of transistors comprise an N channel and a P channel field effect transistor arranged as a push-pull pair for controlling alternating current supplied to said ultrasonic transducer.

6. A method of controlling the power delivered to a bonding tool during a bonding operation, comprising the steps of:

connecting a variable impedance network comprising resistance components connected in series between an ultrasonic power generator and an ultrasonic transducer of the type adapted to hold a bonding tool,

providing a microprocessor for controlling the output of said ultrasonic generator and said variable impedance network,

sensing the output values of said ultrasonic generator coupled to said ultrasonic transducer to determine the bonding load,

controlling the value of said variable impedance network in a preferred mode of operation by,

calculating a predetermined desired network impedance (Z_NW) to be inserted in series between said ultrasonic power generator and said ultrasonic transducer for a bonding operation to deliver a predetermined amount of power through said ultrasonic transducer, and

switching said desired network impedance (Z_NW) value in series between said ultrasonic power generator and said ultrasonic transducer before a bonding operation.

7. The method as set forth in claim 6 wherein said step of sensing the output of said ultrasonic generator comprises sensing the voltage, current and phase difference.

8. The method as set forth in claim 6 wherein said step of controlling said variable impedance network comprises calculating the impedance of said transducer in free air (Z_FA) and the impedance of said transducer under bonding load (Z_L).

9. The method as set forth in claim 6 wherein said step of controlling said variable impedance network comprises changing the network impedance (Z_NW) for individual bonds.

10. The method as set forth in claim 6 wherein said step of calculating a desired network impedance (Z_NW) includes the step of maintaining a constant load impedance Z_L during bonding operations.

11. The method as set forth in claim 6 wherein said step of calculating a desired network impedance Z_NW includes the step of maintaining a constant total impedance Z_T where Z_NW =Z_T -Z_L.

12. The method as set forth in claim 6 wherein said step of calculating a desired network impedance Z_NW includes the step of maintaining a constant power level P_L for bonds where P_L is equal to the product of the current I² and the load impedance Z_L.

13. Apparatus for adjusting the power output of an ultrasonic generator to a transducer comprising:

an ultrasonic power generator,

a variable impedance network coupled to the output of said ultrasonic power generator,

an ultrasonic transducer coupled to the output of said variable impedance network,

said variable impedance network comprises a plurality of resistors coupled in series and operably selected or bypassed by relays operated by a switch actuation network,

microprocessor means coupled to said ultrasonic power generator and to said variable impedance network,

means for sensing current and voltage values at the output of said ultrasonic power generator coupled to said microprocessor means, and

control means coupled to said microprocessor means and to said variable impedance network for setting a predetermined impedance in series between said ultrasonic power generator and said ultrasonic transducer.