Method of attaching optical fibers to opto-electronic integrated circuits on silicon substrates
First Claim
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1. A method of attaching optical fibers comprising the steps of:
- providing a precision groove on a substrate, essentially parallel and in line with a waveguide in a transparent surface layer on said substrate;
providing a vertical face on said waveguide;
providing each of said optical fibers with a perpendicular end face;
providing clearance in said substrate for said perpendicular end face of each of said optical fibers to make face contact with said vertical face on said waveguide; and
clamping said optical fibers in place including applying an ultraviolet curable material to said fibers, disposing a clamping plate transparent to ultraviolet curing radiation over said fibers, and verifying performance with the clamping plate in place.
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Abstract
Attachment of optical fibers to Optical Electronic Integrated Circuits on silicon substrates is accomplished by utilizing precision grooves combined with a vertical waveguide interface formed mechanically or electrochemically. The optical fiber must be prepared with a perpendicular end face.
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Citations
10 Claims
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1. A method of attaching optical fibers comprising the steps of:
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providing a precision groove on a substrate, essentially parallel and in line with a waveguide in a transparent surface layer on said substrate; providing a vertical face on said waveguide; providing each of said optical fibers with a perpendicular end face; providing clearance in said substrate for said perpendicular end face of each of said optical fibers to make face contact with said vertical face on said waveguide; and clamping said optical fibers in place including applying an ultraviolet curable material to said fibers, disposing a clamping plate transparent to ultraviolet curing radiation over said fibers, and verifying performance with the clamping plate in place. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification