Method of fabricating laser controlled nanolithography
First Claim
1. In a process of molecular beam epitaxy wherein a flow of atoms is directed toward a surface for deposition thereon, the improvement which comprises, optically focusing and scanning said flow of atoms over said surface.
1 Assignment
0 Petitions
Accused Products
Abstract
A method of depositing atoms on a substrate in which a beam of atoms is optically focused utilizing a laser beam. The laser beam is used to form a standing wave above the surface of a substrate. As the beam of atoms is passed through the standing wave, the atoms are focused by dipole force interactions. The deposition of atoms is focused into parallel lines which coincide with the minima of the standing wave. The use of two standing waves allows for focusing the atoms into discrete dots or spots. Relative movement between the substrate and the standing wave(s) allows for depositing atoms in a scanning manner. Various nanostructures can be made by the disclosed method.
-
Citations
46 Claims
-
1. In a process of molecular beam epitaxy wherein a flow of atoms is directed toward a surface for deposition thereon, the improvement which comprises, optically focusing and scanning said flow of atoms over said surface.
-
2. A method of depositing atoms on a substrate which comprises:
-
providing a substrate having a surface; forming a beam of chromium atoms; collimating said beam of chromium atoms to form a collimated beam of atoms; providing at least one laser beam above said surface of said substrate for optically focusing said collimated beam of chromium atoms; and directing said collimated beam of chromium atoms through said at least one laser beam and onto said surface of said substrate. - View Dependent Claims (3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
-
-
28. A method of depositing atoms on a substrate which comprises:
-
providing a substrate having a surface; forming a beam of atoms; collimating said beam of atoms to form a collimated beam of atoms; providing at least one standing wave above said surface of said substrate for optically focusing said collimated beam of atoms; and directing said collimated beam of atoms through said at least one standing wave and onto said surface of said substrate so as to form a mask pattern on said surface of said substrate which is used in a subsequent process step. - View Dependent Claims (29, 30)
-
-
31. A method of depositing atoms on a substrate which comprises:
-
providing a substrate having a surface; forming a beam of atoms; collimating said beam of atoms to form a collimated beam of atoms; providing at least one standing wave above said surface of said substrate for optically focusing said collimated beam of atoms; and directing said collimated beam of atoms through said at least one standing wave and onto said surface of said substrate to form a doped region on said substrate.
-
-
32. A method of depositing atoms on a substrate which comprises:
-
providing a substrate having a surface; forming a beam of atoms; collimating said beam of atoms to form a collimated beam of atoms; providing at least one standing wave above said surface of said substrate for optically focusing said collimated beam of atoms; directing said collimated beam of atoms through said at least one standing wave and onto said surface of said substrate; and moving one of said substrate or said at least one standing wave with respect to the other.
-
-
33. A method of depositing atoms on a substrate which comprises:
-
providing a substrate having a surface; forming a beam of atoms; collimating said beam of atoms to form a collimated beam of atoms; providing at least one standing wave above said surface of said substrate for optically focusing said collimated beam of atoms; providing at least one filter having at least one aperture between said collimated beams of atoms and said at least one standing wave; and directing said collimated beam of atoms through said at least one filter and said at least one standing wave and onto said surface of said substrate. - View Dependent Claims (34, 35)
-
-
36. A method of depositing atoms on a substrate which comprises:
-
providing a substrate having a surface; forming a beam of atoms; collimating said beam of atoms to form a collimated beam of atoms; providing at least one standing wave above said surface of said substrate for optically focusing said collimated beam of atoms; and directing said collimated beam of atoms through said at least one standing wave and onto said surface of said substrate, whereby said atoms are deposited as a magnetic material on said substrate. - View Dependent Claims (37, 38, 39)
-
-
40. A method of forming a calibration standard which comprises:
-
providing a substrate having a surface; forming a beam of atoms; collimating said beam of atoms to form a collimated beam of atoms; providing at least one standing wave above said surface of said substrate for optically focusing said collimated beam of atoms; and directing said collimated beam of atoms through said at least one standing wave and onto said surface of said substrate so as to deposit said atoms in an absolute pattern for use as a microscopic calibration standard
-
-
41. A method of forming an optical grating which comprises:
-
providing a substrate having a surface; forming a beam of atoms; collimating said beam of atoms to form a collimated beam of atoms; providing at least one standing wave above said surface of said substrate for optically focusing said collimated beam of atoms; and directing said collimated beam of atoms through said at least one standing wave and onto said surface of said substrate so as to form an optical grating structure. - View Dependent Claims (42, 43)
-
-
44. A method of forming probe structures on a substrate which comprises:
-
providing a substrate having a surface; forming beam of atoms; collimating said beam of atoms to form a collimated beam of atoms; providing at least one standing wave above said surface of said substrate for optically focusing said collimated beam of atoms; and directing said collimated beam of atoms through said at least one standing wave and onto said surface of said substrate and thereby form probe structures which extend from said surface of said substrate.
-
- 45. In a method of surface analysis wherein atomic or molecular species from a surface are received by a detector the improvement comprising providing at least one laser beam which directs said atomic or molecular species to said detector.
Specification