High-stability resonators of solid elastic material and oscillators using them

• US 5,361,045 A
• Filed: 03/23/1989
• Issued: 11/01/1994
• Est. Priority Date: 03/24/1988
• Status: Expired due to Fees

• Current Assignee: Office National D'Etudes et de Recherches A Body Corporate of Republic of France
• Original Assignee: Office National D'Etudes et de Recherches Aerospatiales
• Inventors: Gay, Michel, Breuzet, Michel, Uebersfeld, Jean, Beaussier, Jacques
• Primary Examiner(s): Grimm, Siegfried H.
• Application Number:
  US07/327,839
• Time in Patent Office: 2,049 Days
• Field of Search: 331/116 R, 331/116 FE, 331/116 M, 331/154, 331/155, 331/156, 331/158, 331/163, 310/15, 310/36, 310/345, 310/348, 310/357, 310/360, 310/361, 310/365, 310/366, 310/367, 310/368
• US Class Current: 331/154
• CPC Class Codes: H03H 9/125 Driving means, e.g. electrodes, coils
• CPC Class Codes: H03H 9/24 Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive

Abstract

A preferred embodiment of a resonator embodying the invention comprises entially a resonating plate, an action electrode and a detection electrode, and a supporting base. The electrodes are placed facing symmetrical narrow edges of the plate, opposite vibration loops, and are coupled to the plate by capacitive, electrostrictive or piezoelectric effect according to the material of which the plate is comprised. A very wide range of elastic solid materials can be used to embody the resonating plate. The plate is attached to the supporting base at points corresponding to vibration nodes of the plate. The plate vibrates advantageously according to a contour mode called Lame mode. High coefficients of quality in the region of 10⁷ are obtained. The resonators embodying the invention can be easily integrated. To do so, the plate is e.g. embodied in silicon. Such a resonator is included in a high-stability oscillating loop comprising a phase shifter and an amplifier.

Claims

1. A resonator comprising a supporting base, a resonating solid elastic plate attached to said supporting base, at least one first electrode and at least one second electrode for respectively exciting said plate and for detecting plate vibrations, wherein said plate is excited in a contour vibration mode, said plate having a length which is an integral multiple of the width of said plate, wherein said electrodes do not adhere to said plate, said electrodes being located at the periphery of said plate at a short predetermined distance from said plate, said electrodes being opposite narrow edges of said plate and opposite vibration loops of the plate, and wherein said plate is attached to said supporting base at points corresponding to vibration nodes of said plate.

2. The resonator as claimed in claim 1, wherein said plate is a grounded surface-doped semiconductor.

3. The resonator as claimed in claim 1, wherein said plate is formed of insulating material, and further comprising metallized narrow edges connected to a reference ground opposite said electrodes.

4. The resonator as claimed in claim 1, wherein said plate is formed of insulating material, and wherein said supporting base comprises a conductive surface connected to a reference ground, said conductive surface being located with regard to said electrodes and said plate in such a way that said plate is traversed by the lines of an electric field between said electrodes and said conductive surface.

5. The resonator as claimed in claim 3, wherein said plate is formed of crystalline material of the cubic system, and wherein said plate is cut in such a way that the plane of said plate is perpendicular to a first crystallographic axis of said material and that the edges of said plate are oriented along one of two directions respectively parallel to and at an angle of 45°

with respect to second and third crystallographic axes of the material.

6. The resonator as claimed in claim 5, wherein the material of said plate is selected from the group consisting of silicon and germanium.

7. The resonator as claimed in claim 5, wherein said plate is formed of piezoelectric material and is cut in such a way that said plane of said plate corresponds to an isotropic plane of the material.

8. A resonator as claimed in claim 1, wherein first and second sets of said first electrodes are included, means for applying an excitation signal to the first set of first electrodes at a first phase and for applying the excitation signal to the second set of said first electrodes at a phase displaced by π

from the first phase, said second set of first electrodes being opposite first vibration loops of said plate, said first set of first electrodes being opposite second vibration loops of said plate.

9. The resonator as claimed in claim 1, wherein said plate is a grounded electrical conductor.

10. A resonator comprising a supporting base, a solid elastic resonating plate attached to said supporting base, at least one first electrode and at least one second electrode for respectively exciting said plate in a contour vibration mode and for detecting plate vibrations, said plate having a length which is an integral multiple of the width of said plate, wherein said electrodes do not adhere to said plate, said electrodes being located at the periphery of said plate at a short predetermined distance from said plate, said electrodes being opposite narrow edges of said plate and opposite vibration loops of the plate, said plate being attached to said supporting base at points corresponding to vibration nodes of said plate, and wherein said vibration mode is a Lame mode wherein volume acoustic waves are radiated in directions at 45°

from said narrow edges of said plate.

11. An oscillator comprising a resonator, phase shifting means and amplifying means connected in a loop, and wherein said resonator includes:

a supporting base, a resonating solid elastic plate attached to said supporting base, at least one first electrode and at least one second electrode for respectively exciting said plate and for detecting plate vibrations, wherein said plate is excited in a contour vibration mode, said plate having a length which is an integral multiple of the width of said plate, wherein said electrodes do not adhere to said plate, said electrodes being located at the periphery of said plate at a short predetermined distance from said plate, said electrodes being opposite narrow edges of said plate and opposite vibration loops of the plate, and wherein said plate is attached to said supporting base at points corresponding to vibration nodes of said plate.

12. An oscillator as claimed in claim 11 further comprising means responsive to said second electrodes for deriving a signal representative of a capacitance variation between said second electrode and a reference, said capacitance variation being due to vibrations of said plate of said resonator.

13. An oscillator as claimed in claim 11, further comprising means for respectively biasing said first and second electrodes of said resonator with first and second d.c. voltages.

14. An oscillator as claimed in claim 12 further comprising means for biasing said second electrode of said resonator with a d.c. voltage, and means, in cascade with said deriving means, for dividing by two the frequency of said signal representative of a capacitance variation between said second electrodes and said reference ground.