Visible-spectrum anti-reflection coating including electrically-conductive metal oxide layers
First Claim
Patent Images
1. An antireflection coating for a substrate, comprising:
- six-layers designated the first through the sixth in consecutive numerical order beginning with the layer furthest from the substrate, each of said layers having a physical thickness of at least about 9.0 nanometers, each of said layers having an extinction coefficient less than 0.1 for visible light and wherein one or more of said layers is formed of an electrically-conductive metal oxide which is transparent to visible light;
said first layer having a refractive index between about 1.46 and 1.52 at a wavelength of about 520 nm and having an optical thickness of about one-quarter wavelength of visible light;
said sixth layer having a refractive index greater than the refractive index of the substrate;
said fifth layer having a refractive index less than the refractive index of said sixth layer;
said fifth and sixth layers having a combined optical thickness between about one-tenth and one-quarter wavelength of visible light;
said third layer having a refractive index greater than about 2.15 at a wavelength of about 520 nanometers;
said second layer having a refractive index less than the refractive index of said third layer and greater than the refractive index of said first layer;
said fourth layer having a refractive index less than the refractive index of said third layer and greater than the refractive index of said fifth layer; and
said second, third, and fourth layers having a combined optical thickness between about one-half wavelength and one wavelength of visible light.
2 Assignments
0 Petitions
Accused Products
Abstract
A six-layer anti-reflection coating (20 and 20A) includes three layers (24, 28, and 34) which may be formed from an electrically-conductive metal oxide having a refractive index between about 1.9 and 2.1 at a wavelength of 520 nanometers. Up to a total optical thickness of about one-wavelength of visible light of the electrically-conductive metal oxide may be included in the coating, while still providing less than 0.25 percent photopic reflection.
62 Citations
15 Claims
-
1. An antireflection coating for a substrate, comprising:
-
six-layers designated the first through the sixth in consecutive numerical order beginning with the layer furthest from the substrate, each of said layers having a physical thickness of at least about 9.0 nanometers, each of said layers having an extinction coefficient less than 0.1 for visible light and wherein one or more of said layers is formed of an electrically-conductive metal oxide which is transparent to visible light; said first layer having a refractive index between about 1.46 and 1.52 at a wavelength of about 520 nm and having an optical thickness of about one-quarter wavelength of visible light; said sixth layer having a refractive index greater than the refractive index of the substrate; said fifth layer having a refractive index less than the refractive index of said sixth layer; said fifth and sixth layers having a combined optical thickness between about one-tenth and one-quarter wavelength of visible light; said third layer having a refractive index greater than about 2.15 at a wavelength of about 520 nanometers; said second layer having a refractive index less than the refractive index of said third layer and greater than the refractive index of said first layer; said fourth layer having a refractive index less than the refractive index of said third layer and greater than the refractive index of said fifth layer; and said second, third, and fourth layers having a combined optical thickness between about one-half wavelength and one wavelength of visible light. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
-
-
12. An antireflection coating for a substrate, comprising:
-
six-layers designated the first through the sixth in consecutive numerical order beginning with the layer furthest from the substrate, each of said layers having a physical thickness of at least about 9.0 nanometers, each of said layers having an extinction coefficient less than 0.1 for visible light and wherein one or more of said layers is formed of an electrically-conductive metal oxide which is transparent to visible light;
;said first layer formed from silicon dioxide and having an optical thickness of about one-quarter wavelength of visible light; said sixth layer having a refractive index greater than the refractive index of the substrate; said fifth layer having a refractive index less than the refractive index of said fourth and sixth layers; said fifth and sixth layers having a combined optical thickness between about one-tenth and one-quarter wavelength of visible light; said third layer having a refractive index greater than about 2.1 at a wavelength of about 520 nanometers; said second and fourth layers having a refractive index between about 1.9 and 2.1 at a wavelength of about 520 nanometers; and said second, third and fourth layers having a combined optical thickness between about one-half wavelength and one wavelength of visible light. - View Dependent Claims (13, 14, 15)
-
Specification