Massively parallel array cathode
First Claim
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1. A massively parallel electron beam array, comprising:
- a substrate;
a multiplicity of submicron emitter tips fabricated from said substrate for producing corresponding electron emission streams, said tips being separated into a plurality of groups of one or more, each group being electrically isolated from all remaining groups, said groups comprising a plurality of cathodes;
an emitter control electrode for each of said multiplicity of emitter tips for controlling corresponding emitter electron emission streams;
a cathode control electrode for each of said plurality of cathodes for producing from the electron emission streams of each cathode a corresponding single cathode beam, said plurality of cathodes producing an array of beams;
a target for receiving said array of beams, each beam striking a corresponding target region whereby each target region is illuminated by a corresponding beam; and
a deflector for said cathode array for deflecting all of said beams of said array simultaneously with respect to said target.
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Abstract
A massively parallel electron beam array for controllably imaging a target includes a multiplicity of emitter cathodes, each incorporating one or more micron-sized emitter tips. Each tip is controlled by a control electrode to produce an electron stream, and its deflection is controlled by a multielement deflection electrode to permit scanning of a corresponding target region.
160 Citations
15 Claims
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1. A massively parallel electron beam array, comprising:
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a substrate; a multiplicity of submicron emitter tips fabricated from said substrate for producing corresponding electron emission streams, said tips being separated into a plurality of groups of one or more, each group being electrically isolated from all remaining groups, said groups comprising a plurality of cathodes; an emitter control electrode for each of said multiplicity of emitter tips for controlling corresponding emitter electron emission streams; a cathode control electrode for each of said plurality of cathodes for producing from the electron emission streams of each cathode a corresponding single cathode beam, said plurality of cathodes producing an array of beams; a target for receiving said array of beams, each beam striking a corresponding target region whereby each target region is illuminated by a corresponding beam; and a deflector for said cathode array for deflecting all of said beams of said array simultaneously with respect to said target. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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Specification