Article storage house in a clean room

• US 5,363,867 A
• Filed: 01/21/1993
• Issued: 11/15/1994
• Est. Priority Date: 01/21/1992
• Status: Expired due to Term

• Current Assignee: Muratec Automation Co., Ltd. (Muratec)
• Original Assignee: Shinko Electric Industries Company Limited (Fujitsu Limited)
• Inventors: Tanaka, Tsuyoshi, Murata, Masanao, Nakamura, Akio, Kawano, Hitoshi, Okuno, Atsushi, Hayashi, Mitsuhiro, Tsuda, Masanori, Morita, Teruya, Yamashita, Teppei
• Primary Examiner(s): Bennett, Henry A.
• Application Number:
  US08/006,318
• Time in Patent Office: 663 Days
• Field of Search: 141/85, 141/383, 141/98, 34/22, 34/218, 34/219, 34/225, 34/227, 34/232, 34/233, 34/235, 34/224, 15/302, 15/303, 134/61, 134/94.1, 134/95.1, 134/95.2
• US Class Current: 134/95.2
• CPC Class Codes: B08B 9/093 by the force of jets or sprays B08B9/0813 , B08B9/20 take precedence
• CPC Class Codes: H01L 21/67769 Storage means
• CPC Class Codes: H01L 21/67772 involving removal of lid, door, cover
• CPC Class Codes: Y10S 414/14 Wafer cassette transporting

Abstract

An article storage house in a clean room for airtightly accommodating a wafer cassette, etc. in which the wafer cassette carried in from the outside of an article carry-in/out portion is accommodated into a container by an automatic article delivery unit disposed in the article carry-in/out portion or it is carried in the article storage house while it is accommodated in the container and is stored in sections of the article storage house. An inert gas purge mechanism and an automatic container cleaning portion are disposed in the automatic article delivery unit or each section.

Claims

1. An article storage house in a clean room, comprising:

storage units having storage sections; and

a moving/loading unit having a moving/loading mechanism for carrying a storage article in the storage section or carrying the storage article from the storage section;

wherein the storage article to be carried in and out from the storage section is a container which accommodates airtightly therein an article that should not be contaminated by a particle of dust or by chemicals;

wherein one or a plurality of the storage sections have inert gas purge mechanisms;

including a re-purge station;

wherein the re-purge station is disposed in the article carry-in/out portion and includes a plate having a port through which the article can pass, a gas supply port and a gas discharge port through which the inert gas is respectively supplied and discharged, an elevator table having a cover serving to close the port, and a mechanism attached to the plate for airtightly closing the port cooperating with the container; and

wherein the inert gas purge mechanism has an unlocking mechanism for unlocking the container cover from the container.

2. An article storage house in a clean room, comprising:

storage units having storage sections; and

a moving/loading unit having a moving/loading mechanism for carrying a storage article in the storage section or carrying the storage article from the storage section;

wherein the storage article to be carried in and out from the storage section is a container which accommodates airtightly therein an article that should not be contaminated by a particle of dust or by chemicals;

including an article carry-in/out portion of the wafer storage house to which the article is carried in or from which the article is carried out, said article carry-in/out portion being composed of a container moving/loading portion and an automatic article delivery unit;

wherein an empty container or the container storing therein the article is moved from the storage section to the container moving/loading portion and the article is carried in or carried out from the container by the automatic article delivery unit;

wherein the container can be airtightly sealed by a container cover having a lock mechanism for locking the container;

wherein the automatic article carry-in/out unit has an unlocking mechanism for unlocking the lock mechanism;

wherein the article carry-in/out portion has therein an inert gas purge mechanism for replacing air in the container by gas when the article, which is carried in the article carry-in/out portion, is carried in or carried out from the container; and

wherein the inert gas purge mechanism disposed in the article carry-in/out portion or storage section includes means for carrying out gas re-purge.

3. An article storage house in a clean room, comprising:

storage units having storage sections; and

a moving/loading unit having a moving/loading mechanism for carrying a storage article in the storage section or carrying the storage article from the storage section;

wherein the storage article to be carried in and out from the storage section is a container which accommodates airtightly therein an article that should not be contaminated by a particle of dust or by chemicals; and

including an article carry-in/out portion which is in a highly clean atmosphere.

4. An article storage house according to claim 3 further comprising a unit which automatically carries the article in the container or carries the article from the container.

5. An article storage house according to claim 3, wherein said article carry-in/out portion includes a container moving/loading portion and an automatic article delivery unit;

wherein an empty container or the container storing therein the article is moved from the storage section to the container moving/loading portion and the article is carried in or carried out from the container by the automatic article delivery unit;

wherein the container can be airtightly sealed by a container cover having a lock mechanism for locking the container; and

wherein the automatic article carry-in/out unit has an unlocking mechanism for unlocking the lock mechanism.

6. An article storage house according to claim 5, wherein the container can be airtightly sealed by the container cover having the lock mechanism for locking the container;

wherein the automatic article delivery unit has the unlocking mechanism for unlocking the lock mechanism and an elevator table having a cover; and

wherein the article is carried in and placed on the container cover from the outside of the article storage house.

7. An article storage house according to claim 5, wherein the article carrying/out portion has therein an inert gas purge mechanism for replacing air in the container by gas when the article, which is carried in the article carry-in/out portion, is carried in or carried out from the container.

8. An article storage house according to claim 6, wherein the inert gas mechanism is disposed in the container moving/loading portion and has a port through which the stored article can be passed, a plate having a gas supply port and a gas discharge port through which gas is respectively supplied or discharged, and a mechanism capable of airtightly closing the port cooperating with the container on the automatic article delivery unit and capable of being raised or lowered together with the elevator table.

9. An article storage house according to claim 3, wherein one or a plurality of said storage sections have inert gas purge mechanisms.

10. An article storage house according to claim 9, wherein the inert gas purge mechanism is disposed in the storage section and has the port through which the storage article can pass, a plate having a gas supply port and a gas discharge port through which the gas is respectively supplied and discharged, an elevator unit equipped with the elevator table, and a mechanism attached to the plate for airtightly closing the port cooperating with the container;

and wherein the inert gas purge mechanism has a lock closing mechanism for unlocking the lock mechanism of the container cover.

11. An article storage house according to claim 9, further comprising a re-purge station.

12. An article storage house according to claim 3, wherein a container moving/loading portion of the article carry-in/out portion has a container carry-in/out portion.

13. An article storage house in a clean room, comprising:

a single or a plurality of storage units;

a self-advancing moving/loading unit having a moving/loading mechanism which is mounted thereon for carrying a stored article in or for carrying the stored article from each storage section of the storage unit, the stored article being a container for airtightly accommodating therein an article which should not be contaminated by a particle of dust or chemicals; and

an automatic container cleaning portion;

wherein an article temporary placing area of a container cleaning preparatory station is in a highly clean atmosphere or an inert gas atmosphere.

16. An article storage hours according to claim 13, further including a unit form automatically carrying the article in and out from the container.

21. An article storage house according to claim 13, wherein the container has an ID code which controls the cleaning history of the container.

14. An article storage house in a clean room, comprising:

a single or a plurality of storage units;

a self-advancing moving/loading unit having a moving/loading mechanism which is mounted thereon for carrying a stored article in or for carrying the stored article from each storage section of the storage unit, the stored article being a container for airtightly accommodating therein an article which should not be contaminated by a particle of dust or chemicals; and

an automatic container cleaning portion;

including a unit for automatically carrying the article in and out from the container;

wherein the automatic container cleaning portion includes a container cleaning preparatory station having a mechanism for carrying the article in or out from the container and a cleaning chamber for subjecting an empty container, which is moved from the container cleaning preparatory station or the storage section, to a cleaning liquid; and

wherein the self-advancing moving/loading unit moves the empty container.

15. An article storage house according to claim 14, wherein the container cleaning preparatory station has a container moving/loading area and an article temporary placing area.

17. An article storage house according to claim 15, wherein one or a plurality of container mounting tables of the container moving/loading area of the container cleaning preparatory station have ports, and wherein the automatic article delivery mechanism has an elevator table having a cover serving for closing the port and an unlocking mechanism for unlocking the container cover from the container.

18. An article storage house according to claim 17, wherein any of the plurality of container mounting tables is a container moving/loading table to which the cleaned container is moved;

and wherein the article, which is taken out from the container which is not cleaned and placed on the other container mounting tables, is transferred to said container mounting table.

19. An article storage house in a clean room, comprising:

a single or a plurality of storage units;

a self-advancing moving/loading unit having a moving/loading mechanism which is mounted thereon for carrying a stored article in or for carrying the stored article from each storage section of the storage unit, the stored article being a container for airtightly accommodating therein an article which should not be contaminated by a particle of dust or chemicals; and

an automatic container cleaning portion;

wherein a cleaning chamber of a container cleaning preparatory station has a cleaning liquid jetting system and a dry gas jetting system.

20. An article storage house in a clean room, comprising:

a single or a plurality of storage units;

a self-advancing moving/loading unit having a moving/loading mechanism which is mounted thereon for carrying a stored article in or for carrying the stored article from each storage section of the storage unit, the stored article being a container for airtightly accommodating therein an article which should not be contaminated by a particle of dust or chemicals; and

an automatic container cleaning portion;

wherein any of a plurality of container mounting tables is a container moving/loading table to which the cleaned container is moved;

wherein the article, which is taken out from the container that is not cleaned and placed on the other container mounting tables, is transferred to said container mounting table; and

including means in the article temporary placing area of the container cleaning preparatory station for cleaning the container cover of the container by gas.