Low particulate slit valve system and method for controlling same

• US 5,363,872 A
• Filed: 03/16/1993
• Issued: 11/15/1994
• Est. Priority Date: 03/16/1993
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Lorimer, D'Arcy H.
• Primary Examiner(s): Michalsky, Gerald A.
• Application Number:
  US08/032,041
• Time in Patent Office: 609 Days
• Field of Search: 137/1, 137/487.5, 251/26, 251/158, 251/175, 251/900, 251/335.3, 414/217
• US Class Current: 137/1
• CPC Class Codes: F16K 1/10 in which the spindle is inclined to the general direction of flow
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations
• CPC Class Codes: H01L 21/67126 Apparatus for sealing, encapsulating, glassing, decapsulating or the like processes H01L23/02, H01L23/28
• CPC Class Codes: H01L 21/67748 horizontal transfer of a single workpiece
• CPC Class Codes: Y10S 251/90 Valves with o-rings
• CPC Class Codes: Y10T 137/0318 Processes
• CPC Class Codes: Y10T 137/7761 Electrically actuated valve

Abstract

Low particulate slit valve system and method for controlling the closure pressure applied to a slit valve. An apparatus in accordance with the present invention includes a barrier having a slit valve aperture, a valve seat surrounding the aperture, a closure movable towards and away from the valve seat, a sensing mechanism for determining the pressure differential on the two sides of the barrier, a processing unit responsive to the pressure differential and operative to produce a control signal, and a valve actuator responsive to the control signal and operative to control the force applied to the closure. The method of the invention includes determining a first fluid pressure on a first side of the barrier, determining a second pressure on a second side of the barrier, and applying a closure pressure to the closure which is related to the pressure differential between the first fluid pressure and the second fluid pressure. If the pressure differential is low, zero or very near to zero pressure is applied to the closure to seal the aperture. If the pressure differential is high, a proportionately larger pressure is applied to the closure.

Claims

1. A method for controlling a closure pressure applied to a closure covering an aperture in a barrier having different fluid pressure on opposite sides of the barrier, comprising:

determining a first fluid pressure on a first side of said barrier;

determining a second fluid pressure on a second side of said barrier; and

applying a closure pressure to said closure which is related to the pressure differential between said first fluid pressure and said second fluid pressure.

2. A method as recited in claim 1 wherein said closure pressure is within a range which extends from about zero pressure to a predetermined maximum pressure.

3. A method as recited in claim 2 wherein said closure is provided with a resilient perimeter seal surrounding said aperture and wherein said closure pressure is selected sufficient to compress said seal to position said closure closely proximate to said barrier but not to be in contact with said barrier.

4. A method as recited in claim 2 wherein said closure pressure is selected sufficient to move said closure into sealing contact with said barrier.

5. A method as recited in claim 2 wherein said closure pressure includes at least two selectable discrete pressure levels such that a lower closure pressure is applied to said closure when said pressure differential is lower than a predetermined threshold value and such that a higher closure pressure is applied to said closure when said pressure differential is higher than said predetermined threshold value.

6. A method as recited in claim 2 wherein said closure pressure includes a plurality of discrete pressure levels which are directly related said pressure differential.

7. A method for controlling a closure pressure applied to a closure covering an aperture in a barrier, said closure having a face provided with an O-ring sealing member adapted to surround said aperture, said method comprising:

measuring a first fluid pressure on a first side of said barrier;

measuring a second fluid pressure on a second side of said barrier; and

setting a separation between said closure face and a barrier seat portion surrounding said aperture which is related to the pressure differential between said first fluid pressure and said second fluid pressure.

8. A method as recited in claim 7 wherein said separation is within a range of separations extending from sealing contact with said O-ring sealing member to a separation where said O-ring sealing member is closely proximate said seat portion but not touching said seat portion.

9. A variable closure pressure slit valve system for use in semiconductor processing chamber comprising:

barrier means provided with an aperture;

seat means surrounding said aperture;

closure means movable toward and away from said seat means;

means for determining a first fluid pressure on a first side of said barrier means and for determining a second fluid pressure on a second side of said barrier means;

actuator means for selectively moving said closure means toward and away from said seat means; and

control means responsive to said first fluid pressure and said second fluid pressure and operative to develop discrete actuator control signals for controlling said actuator means and causing it to apply a closure force to said closure means which is related in a predetermined manner to the pressure differential between said first fluid pressure and said second fluid pressure.

10. A variable closure pressure slit valve system as recited in claim 9 wherein said closure includes an O-ring sealing member adapted to contact said seat and provide a resilient seal therebetween.

11. A variable closure pressure slit valve system as recited in claim 9 wherein said means for determining said first fluid pressure and said second fluid pressure includes a first pressure sensor located on said first side of said barrier means and a second pressure sensor located on said second side of said barrier.

12. A variable closure pressure slit valve as recited in claim 9 wherein said means for determining said first fluid pressure and said second fluid pressure includes means for providing said first fluid pressure on said first side of said barrier and means for providing said second fluid pressure on said second side of said barrier.

13. A variable closure pressure slit valve as recited in claim 9 wherein said actuator moves said closure in discrete steps in response to said control signals.

14. A variable closure pressure slit valve system as recited in claim 9 wherein said actuator means includes

a high pressure source;

a low pressure source;

a fluid actuator having a housing, at first port and a second port formed in said housing, and an actuating piston disposed within said housing and disposed between said first port and said second port, said actuating piston connected to said closure means; and

a valving network having a plurality of valves and connecting conduit, said valving network responsive to said actuator control signals and operative to selectively couple each of said high pressure source and said low pressure source to each of said first port or said second port,

whereby responsive to said actuator control signals either a high pressure force or a low pressure force is applied to said actuating piston thereby causing it to apply said closure force to said closure means, said closure force being related in a predetermined manner to the pressure differential between said first fluid pressure and said second fluid pressure.