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Highly durable noncontaminating surround materials for plasma etching

  • US 5,364,496 A
  • Filed: 08/20/1993
  • Issued: 11/15/1994
  • Est. Priority Date: 08/20/1993
  • Status: Expired due to Fees
First Claim
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1. A positioning and supporting apparatus for positioning and supporting an article in a plasma etching process employing a plasma tool, wherein the plasma etching process effects removal of surface material from the article, said positioning and supporting apparatus comprising:

  • a support area for accepting the article;

    a surround adjacent the support area, said surround defining at least one surround component having an outer surface comprised of a magnesium material such that as the plasma tool employed in the plasma etching process traverses an edge portion of the article, chemically reactive and excited species generated by a feed gas from the plasma tool impinge upon the surround component.

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