Process for production of a thin film electrode and an electroluminescence device
First Claim
1. A process for production of a thin film electrode for devices which comprises co-vapor depositing an electron-injectable metal and an organic compound having an ability of forming complexes with the electron-injectable metal or an organic compound having an acceptor property at a pressure of not more than 10-5 torr, the weight ratio of the organic compound to the electron-injectable metal being in the range from 1 to 30% by weight and the vapor deposition rate of the metal being 0.1 to 10 nm/second.
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Abstract
Disclosed are
(1) a thin film electrode for devices comprising an electron-injectable metal and an organic compound and having an excellent uniformity and minuteness,
(2) a process for production of a thin film electrode for devices which comprises co-vapor depositing an electron-injectable metal and an organic compound, and
(3) a process for production of an electroluminescence device which comprises co-vapor depositing an electron-injectable metal and an organic compound to form a cathode.
The thin film electrode of the present invention has a small volume resistivity. An EL device using said thin film electrode has high luminous efficiency and can be expected to be utilized as a light emitting material for various display devices.
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Citations
16 Claims
- 1. A process for production of a thin film electrode for devices which comprises co-vapor depositing an electron-injectable metal and an organic compound having an ability of forming complexes with the electron-injectable metal or an organic compound having an acceptor property at a pressure of not more than 10-5 torr, the weight ratio of the organic compound to the electron-injectable metal being in the range from 1 to 30% by weight and the vapor deposition rate of the metal being 0.1 to 10 nm/second.
Specification