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Optical low-coherence reflectometer using optical attenuation

  • US 5,365,335 A
  • Filed: 03/18/1994
  • Issued: 11/15/1994
  • Est. Priority Date: 05/27/1992
  • Status: Expired due to Term
First Claim
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1. An optical interferometer for measuring the optical properties of a device, said interferometer comprising:

  • source means for providing a low-coherence light signal;

    first splitting means for dividing said low-coherence light signal into first and second light signals, said first light signal being applied to said device and said second light signal being directed into a reference optical path, said first splitting means further comprising means for combining light returning from said device and from said reference optical path and applying said combined light to a first optical detector;

    means disposed in said reference optical path for attenuating the light signals traveling therein, said attenuation being chosen to reduce the relative intensity noise generated in said first optical detector. Said attenuating means attenuating said light from said reference optical path that is combined with said light returning from said device by said first splitting means;

    means for varying the optical path length of said reference optical path relative to the optical path between said splitting means and said device.

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