Sensor

• US 5,365,768 A
• Filed: 12/14/1993
• Issued: 11/22/1994
• Est. Priority Date: 07/20/1989
• Status: Expired due to Term

• Current Assignee: Hitachi, Ltd.
• Original Assignee: Hitachi, Ltd.
• Inventors: Kato, Kazuo, Yokota, Yoshihiro, Matsumoto, Masahiro, Miki, Masayuki, Suzuki, Seiko, Tsuchitani, Shigeki
• Primary Examiner(s): NOLAND, THOMAS
• Application Number:
  US08/166,148
• Time in Patent Office: 343 Days
• Field of Search: 73/1R, 73/1 D, 73/4 R, 73/4 V, 73/497, 73/517 R, 73/708, 364/571.01-571.08, 364/566
• US Class Current: 73/1.01
• CPC Class Codes: G01D 3/022 having an ideal characteristic, map or correction data stored in a digital memory
• CPC Class Codes: G01L 1/2268 Arrangements for correcting or for compensating unwanted effects
• CPC Class Codes: G01L 27/005 Apparatus for calibrating pressure sensors
• CPC Class Codes: G01P 21/00 Testing or calibrating of apparatus or devices covered by the preceding groups
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2224/48137 the bodies being arranged next to each other, e.g. on a common substrate
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 2924/16152 Cap comprising a cavity for hosting the device, e.g. U-shaped cap

Abstract

A signal processor (5) is coupled to a detector (6) for detecting a physical quantity. The signal processor has a zero adjustment memory (14) and a sensitivity adjustment memory (16). The zero adjustment memory and the sensitivity adjustment memory have a number of switches (20, 20A, 20'"'"', 20"), respectively. These switches are changed over digitally using a zener zapping method or a polysilicon fuse method at each switch to adjust the characteristics of the detector.

Claims

1. A sensor for use in a vehicle, said sensor comprising:

(a) a detector for detecting a physical quantity, the physical quantity being at least one of pressure, acceleration, and flow rate,

(b) a signal control circuit coupled to said detector, and

(c) adjusting means coupled to said signal control circuit for adjusting a characteristic of said detector, said signal control circuit and said adjusting means being formed as an integrated circuit on a single semiconductor chip, said adjusting means comprising a plurality of input pads for receiving digital control signals, a resistor network, a plurality of switches connected to select the resistance of said resistor network, a plurality of current-responsive elements connected to said plurality of switches and responsive to digital control signals applied to said input pads for assuming a conductive state to control said plurality of switches, and voltage control means responsive to the conductive state of said switches for adjusting the characteristics of said detector in accordance with the digital control signals received by said input pads.

2. A sensor according to claim 1, wherein said resistor network comprises a ladder type resistor network.

3. A sensor according to claim 1, wherein said resistor network comprises a plurality of series resistors.

4. A sensor according to claim 1, wherein said adjusting means comprises at least one of a zero adjustment memory and a sensitivity adjustment memory.

5. A sensor according to claim 4, wherein said adjusting means further comprises temperature characteristic adjusting means.

6. A sensor as claimed in claim 1, wherein each of said current-responsive elements comprises a transistor.

7. A sensor as claimed in claim 1, wherein each of said current-responsive elements comprises a fuse.

8. A sensor for use in a vehicle, said sensor comprising:

(a) a detector for detecting a physical quantity, the physical quantity being at least one of pressure, acceleration and flow rate and corresponding to a parameter of operation of the vehicle or an engine of the vehicle,

(b) a signal control circuit coupled to said detector, and

(c) adjusting means coupled to said signal control circuit for adjusting a characteristic of said detector, said signal control circuit and said adjusting means being formed as an integrated circuit on a single semiconductor chip, said adjusting means comprising a plurality of input pads for receiving digital control signals, a resistor network, a plurality of switches connected to said resistor network, a plurality of current-responsive elements connected to said plurality of switches and responsive to digital control signals applied to said input pads for assuming a conductive state to control said plurality of switches, and voltage control means responsive to the conductive state of said switches for adjusting the characteristics of said detector in accordance with the digital control signals received by said input pads.

9. A sensor according to claim 8, wherein said adjusting means comprises means for adjusting a zero point and a sensitivity level of said detector.

10. A sensor according to claim 9, wherein each of said current-responsive elements comprises a current-responsive zener device.

11. A sensor according to claim 9, wherein each of said current-responsive element comprises a fuse.

12. A sensor according to claim 8, wherein said detector includes means for detecting air intake pressure.

13. A sensor according to claim 8, wherein said adjusting means comprises at least one of a zero adjustment memory and a sensitivity adjustment memory.

14. A sensor used for a vehicle according to claim 13, wherein said adjusting means further comprises temperature characteristic adjusting means.

15. An acceleration detection sensor for use in a vehicle, said acceleration detection sensor comprising:

(a) an acceleration detector, for detecting acceleration of the vehicle,

(b) a signal control circuit coupled to said acceleration detector, and

(c) adjusting means coupled to said signal control circuit for adjusting a characteristic of said acceleration detector, said signal control circuit and said adjusting means being formed as an integrated circuit on a single semiconductor chip, said adjusting means comprising a plurality of input pads for receiving digital control signals, a resistor network, a plurality of switches connected to said resistor network, a plurality of current-responsive elements connected to said plurality of switches and responsive to digital control signals applied to said input pads for assuming a conductive state to control said plurality of switches, and voltage control means responsive to the conductive state of said switches for adjusting the characteristics of said detector in accordance with the digital control signals received by said input pads.

16. An acceleration detection sensor according to claim 15, wherein each of said current-responsive element comprises a current-responsive zener device.

17. An acceleration detection sensor according to claim 15, wherein each of said current-responsive elements comprises a fuse.

18. An acceleration detection sensor according to claim 15, wherein said adjusting means comprises at least one of a zero adjustment memory and a sensitivity adjustment memory.

19. An acceleration detection sensor according to claim 18, wherein said adjusting means further comprises temperature characteristic adjusting means.

20. An acceleration detection sensor as claimed in claim 15, wherein said acceleration detector comprises a pair of fixed electrodes, and a movable electrode between said fixed electrodes and responsive to acceleration of the vehicle for moving relative to said fixed electrodes.

21. A sensor for use in a vehicle, said sensor comprising:

(a) a semiconductor substrate and a detector mounted on said semiconductor substrate, for detecting a physical quantity, the physical quantity being at least one of pressure, acceleration and flow rate,

(b) a signal control circuit mounted on said semiconductor substrate and coupled to said detector, and

(c) an output adjustment circuit mounted on said semiconductor substrate, formed separately from said signal control circuit, and coupled to said signal control circuit, for adjusting a characteristic of said detector, said output adjustment circuit comprising a plurality of input pads for receiving digital control signals, a resistor network, a plurality of switches connected to said resistor network, a plurality of current-responsive elements connected to said plurality of switches and input pads responsive to digital control signals applied to said for assuming a conductive state to control said plurality of switches, and voltage control means responsive to the conductive state of said switches for adjusting the characteristics of said detector in accordance with the digital control signals received by said input pads.

22. A sensor for use in a vehicle, said sensor comprising:

(a) a first semiconductor substrate and a detector mounted on said first semiconductor substrate, for detecting a physical quantity, the physical quantity being at least one of pressure, acceleration, and flow rate,

(b) a second semiconductor substrate and a signal control circuit mounted on said second semiconductor substrate and coupled to said detector, and

(c) an output adjustment circuit mounted on said second semiconductor substrate, formed separately from said signal control circuit, and coupled to said signal control circuit, for adjusting a characteristic of said detector, said output adjustment circuit comprising a plurality of input pads for receiving digital control signals, a resistor network, a plurality of switches connected to said resistor network, a plurality of current-responsive elements connected to said plurality of switches and responsive to digital control signals applied to said input pads for assuming a conductive state to control said plurality of switches, and voltage control means responsive to the conductive state of said switches for adjusting the characteristics of said detector in accordance with the digital control signals received by said input pads.