Chemical vapor deposition under a single reactor vessel divided into separate reaction regions with its own depositing and exhausting means

• US 5,366,555 A
• Filed: 06/01/1993
• Issued: 11/22/1994
• Est. Priority Date: 06/11/1990
• Status: Expired due to Term

• Current Assignee: Kelly, Michael A.
• Original Assignee: Kelly, Michael A.
• Inventors: Kelly, Michael A.
• Primary Examiner(s): BUEKER, RICHARD R
• Application Number:
  US08/069,679
• Time in Patent Office: 539 Days
• Field of Search: 118/715, 118/719, 118/723 E, 118/723 MR, 118/723 ME
• US Class Current: 118/719
• CPC Class Codes: C23C 16/27 Diamond only
• CPC Class Codes: C23C 16/272 using DC, AC or RF discharges
• CPC Class Codes: C23C 16/455 characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
• CPC Class Codes: C23C 16/45523 Pulsed gas flow or change of composition over time
• CPC Class Codes: C23C 16/45536 Use of plasma, radiation or electromagnetic fields
• CPC Class Codes: C23C 16/45548 having arrangements for gas injection at different locations of the reactor for each ALD half-reaction
• CPC Class Codes: C23C 16/45551 for relative movement of the substrate and the gas injectors or half-reaction reactor compartments
• CPC Class Codes: C23C 16/54 Apparatus specially adapted for continuous coating

Abstract

Apparatus for a sequential continuous vapor deposition process provides a plurality of physically separated process environments in a single reactor vessel. A substrate mounting plate within the reactor vessel movably positions a substrate mounted thereon sequentially between the plurality of separated process environments. Each of the process environments are defined by a gas emitter structure for emitting a predetermined gas from a source thereof to the environment adjacent to the substrate when it is moved into position adjacent thereto and an exhaust structure through which the gas flows from the environment. A substrate positioning structure movably positions the substrate mounting plate so that the substrate is thereby sequentially passed through each one of the process environments. A vacuum pump between the chamber and an external exhaust environment produces a negative pressure within the reactor vessel relative to pressures at the plural gas emitters to maintain physical separation of gases flowing within the plurality of separated process environments.

Claims

1. Apparatus for a sequential continuous vapor deposition process in a plurality of physically separated process environments defined within the apparatus, the apparatus comprising:

single reactor vessel means for enclosing the process within an interior space thereof at a predetermined environmental pressure,

substrate mounting means in the interior space for movably positioning a substrate means mounted thereon sequentially through the plurality of separated process environments,

each separated process environment comprising;

gas emission and directing means in the interior space for continuously emitting a predetermined gas from a separate source thereof into the separate process environment, the continuously emitted gas emitted adjacent to the substrate means when the substrate means is moved into the process environment, the gas emission and directing means emitting the gas at a rate sufficient to prevent diffusion of gas from the interior space into said process environment,

gas exhaust means structurally located to surround the separate process environment, for continuously exhausting substantially all of the gas emitted by the gas emission and directing means from the separate process environment across a pressure differential into the interior space, the pressure differential sufficient to prevent intermixture of gases by diffusion of gases from the interior space, and

evacuation means communicating with the single reactor vessel means for exhausting gas from the interior space to maintain the interior space at the predetermined environmental pressure.

2. The apparatus set forth in claim 1 wherein the gas emission and directing means and the substrate mounting means cooperatively define gas discharge means at a peripheral region of each said gas emission means for discharging the gas emitted by the said gas emission means into an ambient within the single reactor vessel means.

3. The apparatus set forth in claim 2 wherein each said gas emission and directing means comprises a generally annular, cup-shaped structure and wherein said gas exhaust means is defined as a generally annular peripheral gap by the gas emission and directing means and by the substrate mounting means.

4. The apparatus set forth in claim 1 wherein the substrate mounting means comprises a rotary plate, and wherein the means for movably positioning the substrate mounting means comprises a rotary shaft for rotating the rotary plate.

5. The apparatus set forth in claim 4 further comprising rotating means for rotating the rotary shaft.

6. The apparatus set forth in claim 5 wherein the rotating means rotates the rotary shaft at a predetermined average angular velocity such that the substrate means is exposed to each said gas emission means at a repetition rate of at least one exposure per second.

7. The apparatus set forth in claim 1 wherein at least one of said gas emission and directing means comprises an electrically negatively biased electrode means for causing a plasma between the gas emission and directing means and the substrate means as it passes by.

8. The apparatus set forth in claim 1 wherein at least one of the said gas emission and directing means comprises an electrically positively biased electrode means for causing a plasma to be generated at the gas emission and directing means for causing at least one of positively excited ions and excited neutral species to be accelerated toward the substrate means as it passes by.

9. The apparatus set forth in claim 1 wherein said gas emission and directing means comprise a plurality of biased cathode gas emitters at spaced apart locations within the reactor vessel means for creating plasmas through which the substrate means passes as it moves within the reactor vessel means.

10. The apparatus set forth in claim 1 wherein at least one of said gas emission and directing means comprises radio frequency excitation means for exciting the gas emitted thereby by radio frequency radiation.

11. The apparatus set forth in claim 1 wherein at least one of said gas emission and directing means comprises microwave energy excitation means for exciting the gas emitted thereby by microwave radiation.

12. The apparatus set forth in claim 1 wherein at least one of said gas emission and directing means includes heating means for heating a surface thereof for thermally exciting the gas emitted and directed thereby.

13. The apparatus set forth in claim 1 further comprising heating means for generating and applying heat to said substrate means within at least one of said separated process environments.

14. The apparatus set forth in claim 4 wherein there are at least four gas emission and directing means defining four separated process environments.