Four bar resonating force transducer

• US 5,367,217 A
• Filed: 11/18/1992
• Issued: 11/22/1994
• Est. Priority Date: 11/18/1992
• Status: Expired due to Term

• Current Assignee: Alliedsignal Inc. (Honeywell International Inc.)
• Original Assignee: Alliedsignal Inc. (Honeywell International Inc.)
• Inventors: Norling, Brian L.
• Primary Examiner(s): BUDD, MARK OSBORNE
• Application Number:
  US07/978,264
• Time in Patent Office: 734 Days
• Field of Search: 73/862.59, 73/702, 73/517 AV, 73/DIG. 1, 73/DIG. 4, 310/367, 310/370, 310/366, 310/368, 310/321, 310/330, 310/331, 310/25, 310/306, 310/309, 310/316
• US Class Current: 310/370
• CPC Class Codes: G01L 9/0019 of a semiconductive element
• CPC Class Codes: G01L 9/0022 of a piezoelectric element
• CPC Class Codes: H03H 9/215 consisting of quartz

Abstract

A force sensing element is formed with four vibrating beams having substantially the same width and length. The four beams are spaced apart and disposed parallel to one another and are connected at opposite ends by end portions. With such a configuration, the outer beams move in phase with each other but 180° out of phase with the inner beams. As such, the linear and angular reaction forces at the end portions are effectively cancelled. One advantage of such a configuration is its relative insensitivity to manufacturing process variations. By utilizing four beams which are nearly identical in width, variation in fabrication tolerance has virtually an equal effect on beam mass such that the dynamic balance of the force sensing element is maintained to a high degree of accuracy. Various drive methodologies for the force sensing element are disclosed as well as force sensing elements with integrally-formed isolator systems.

Claims

1. A resonant element adapted to be secured to a mounting structure in a force sensing transducer, said resonant element comprising:

a generally planar substrate having three elongated slots formed therein defining four generally parallel, spaced-apart beams including a pair of inner beams and a pair of outer beams, said inner pair of beams and said outer pair of beams all joined together at opposite ends by integrally-formed end portions; and

means for coupling said beams to an excitation source, said coupling means being responsive to the excitation source for causing said outer beams to vibrate generally in phase and out of plane relative to said substrate while said inner beams vibrate out of plane and generally in phase with each other, but out of phase with said outer beams.

2. A resonant element as recited in claim 1, wherein said beams are fabricated from crystalline quartz.

3. A resonant element as recited in claim 1, wherein said predetermined material that includes silicon.

4. A resonant element as recited in claim 1, further including means including a bridge interconnecting said inner beams for synchronizing the vibration of said inner beams.

7. A resonant element as recited in claim 4, wherein said bridge is integrally formed with said inner beams.

11. A resonant element as recited in claim 1, wherein said coupling means includes electrostatic coupling means.

12. A resonant element as recited in claim 1, wherein said coupling means includes electromagnetic coupling means.

13. A resonant element as recited in claim 1, wherein said coupling means includes thermal coupling means.

14. A resonant element as recited in claim 1, wherein said inner and outer beams are generally equal in width.

15. A resonant element as recited in claim 1, further including means for isolating said beams from said mounting structure to minimize energy transfer to said mounting structure.

16. A resonant element as recited in claim 1, further including means for sensing the position of said beams.

17. A resonant element as recited in claim 1, wherein said coupling means includes electrodes formed in a single plane.

18. A resonant element as recited in claim 17, wherein said electrodes overlap.

19. A resonant element as recited in claim 1, wherein said substrate material is formed in part from an electrically conductive material.

20. A resonant element as recited in claim 1, wherein said coupling means includes a plurality of electrodes disposed on said beams for piezoelectrically exciting said beams.

21. A resonant element as recited in claim 20, wherein said electrodes partially overlap at predetermined crossover points.

22. A resonant element as recited in claim 21, wherein said crossover points are selected to coincide with the points along the beam where the sign of the moment changes.

23. A resonant element as recited in claim 1, wherein said substrate has an edge and a predetermined thickness and is formed from a non-conductive material, and wherein said coupling means includes a plurality of conductive traces formed on said beams wherein at least a portion of the conductive traces is disposed along a portion of said edge of said substrate.

24. A resonant element as recited in claim 23, wherein a portion of said conductive traces is disposed on the edge of the substrate between adjacent beams.

5. A resonant element adapted to be secured to a mounting structure in a force sensing transducer, said resonant element comprising:

a generally planar substrate having three elongated slots formed therein defining four generally parallel, spaced-apart beams including a pair of inner beams and a pair of outer beams each joined at opposite ends by integrally-formed end portions;

means for coupling said beams to an excitation source, said coupling means being responsive to the excitation source for causing said outer beams to vibrate generally in phase and out of plane relative to said substrate while said inner beams vibrate out of plane and generally in phase with each other, but out of phase with said outer beams; and

means including a bridge interconnecting said inner beams for synchronizing the vibration of said inner beams, wherein said bridge interconnecting said inner beams is generally centrally located along the lengths of said inner beams.

6. A resonant element as recited in claim 5, wherein said bridge is disposed generally perpendicularly to said inner beams.

8. A resonant element adapted to be secured to a mounting structure in a force sensing transducer, said resonant element comprising:

a generally planar substrate having three elongated slots formed therein defining four generally parallel, spaced apart beams including a pair of inner beams and a pair of outer beams each joined at opposite ends by integrally formed end portions;

means for coupling said beams to an excitation source, said coupling means being responsive to the excitation source for causing said outer beams to vibrate generally in phase and out of plane relative to said substrate while said inner beams vibrate out of plane and generally in phase with each other, but out of phase with said outer beams; and

means for reducing the bending of said end portions caused by the vibration of said beams.

9. A resonant element as recited in claim 8, wherein said reducing means includes a plurality of cuts disposed at opposite ends of said outer beams.

10. A resonant element as recited in claim 9, wherein said cuts are disposed generally perpendicularly to said outer beams.

25. A resonant element adapted to be secured to a mounting structure in a force sensing transducer, said resonant element comprising:

a generally planar substrate having three elongated slots formed therein defining four generally parallel, spaced apart beams including a pair of inner beams and a pair of outer beams each joined at opposite ends by integrally formed end portions;

means for coupling said beams to an excitation source, said coupling means being responsive to the excitation source for causing said outer beams to vibrate generally in phase and out of plane relative to said substrate while said inner beams vibrate out of plane and generally in phase with each other, but out of phase with said outer beams, wherein said substrate has an edge and a predetermined thickness and is formed from a non-conductive material, and wherein said coupling means includes a plurality of conductive traces formed on said beams wherein at least a portion of the conductive traces is disposed along a portion of said edge of said substrate; and

means for generating a magnetic field in a direction generally perpendicular to the beams.

26. A resonant element as recited in claim 25, wherein said conductive traces are configured such that the direction of electrical current in the conductive traces disposed on the inner beams is opposite to the direction of electrical current flow in the conductive traces disposed on the outer beams.

27. A resonant element as recited in claim 26, wherein the direction of electrical current flow in the conductive traces is generally perpendicular to the direction of the magnetic field.

28. A resonant element adapted to be secured to amounting structure in a force sensing transducer, said resonant element comprising:

a generally planar substrate having three elongated slots formed therein defining four generally parallel, spaced apart beams including a pair of inner beams and a pair of outer beams each joined at opposite ends by integrally formed end portions; and

means for coupling said beams to an excitation source, said coupling means being responsive to the excitation source for causing said outer beams to vibrate generally in phase and out of plane relative to said substrate while said inner beams vibrate out of plane and generally in phase with each other, but out of phase with said outer beams, wherein said coupling means includes means for exciting said beams including a plurality of conductive traces adapted to be connected to a source of electrical energy and means for applying a magnetic field in a direction generally perpendicular to said beams.

29. A resonant element as recited in claim 28, wherein said plurality of conductive traces are formed in a single plane.

30. A resonant element as recited in claim 29, wherein said plurality of conductive traces are disposed on said beams.

31. A resonant element as recited in claim 30, wherein said conductive traces are configured so that the direction of electric current flow in the conductive traces disposed on the outer beams is in a direction opposite to the direction of electrical current flow in the conductive traces disposed on the inner beams.

32. A resonant element as recited in claim 29, wherein said conductive traces are configured so that the direction of electric current flow in said traces is generally perpendicular to the direction of the magnetic field.

33. A force sensing element for use in a transducer, said force sensing element comprising:

a piezoelectric substrate formed with a plurality of generally parallel, spaced-apart beams connected at opposite ends to form end portions;

a plurality of first conductive traces forming an electrode pattern disposed on each of said plurality of beams;

a plurality of second conductive traces forming an electrode pattern disposed on each of said plurality of beams, wherein said second conductive traces cross over said first conductive traces at predetermined crossover points; and

means for insulating said first conductive traces from said second conductive traces at said crossover points.

34. A force sensing element as recited in claim 33, wherein said second conductive traces are formed with discontinuous portions at said crossover points.

35. A force sensing element as recited in claim 34, wherein said insulating means includes an insulating layer disposed over said first conductive traces at said crossover points and wherein a conductive material is disposed on top of said insulating layer and connected to said discontinuous portions of said second conductive traces to form a continuous electrical current path at said crossover points relative to said second conductive traces.

36. A force sensing element for use in a transducer, said force sensing element comprising:

a piezoelectric substrate formed with a plurality of generally parallel, spaced apart beams connected at opposite ends to form end portions;

a plurality of first conductive traces forming an electrode pattern disposed on each of said plurality of beams;

a plurality of second conductive traces forming an electrode pattern disposed on each of said plurality of beams, wherein said second conductive traces crossover said first conductive traces at predetermined crossover points; and

means for insulating said first conductive traces from said second conductive traces at said crossover points, wherein said first conductive traces and said second conductive traces are formed on a single plane.

39. A force sensing element as recited in claim 36, wherein the mass of the inner beams is different than the mass of the outer beams.

40. A force sensing element as recited in claim 39, wherein said inner beams are slightly longer than said outer beams.

41. A force sensing element as recited in claim 39, wherein said beams have different cross-sectional areas.

42. A force sensing element as recited in claim 41, wherein said inner beams have a relatively smaller cross-sectional area than said outer beams.

37. A force sensing element for use in a transducer, said force sensing element comprising:

a substrate having four generally parallel and spaced-apart beams formed thereon, including a pair of inner beams and a pair of outer beams connected at opposite ends thereof to a common portion;

mounting pads, coupled to said end portions at each end; and

means for isolating said mounting pad portions from forces in said end portions.

38. A force sensing element as recited in claim 37, wherein said mounting pads and said isolating means are integrally formed.

43. A force sensing element as recited in claim 38, wherein said isolating means includes a torsion bar interposed between one of said end portions and one of said mounting pads.

44. A force sensing element as recited in claim 38, wherein said isolating means includes two torsion bars interposed between one of said end portions and one of said mounting pads.

45. A force sensing element as recited in claim 44, wherein said torsion bars are disposed at bending moment nodal points of the end portion.

46. A force sensing element as recited in claim 45, wherein said inner beams are slightly longer than said outer beams.

47. A force sensing element as recited in claim 45, further including means for causing said inner beams to have substantially the same out-of-plane stiffness as said outer beams.

48. A force sensing element as recited in claim 47, wherein said causing means includes an elongated cut formed in each of said end portions.

49. A force sensing element as recited in claim 45, wherein said inner beams are the same length as said outer beams.

50. A force sensing element as recited in claim 49, further including means for causing said inner beams to have substantially the same out-of-plane stiffness as said outer beams.

51. A force sensing element as recited in claim 37, wherein said isolating means includes a pair of torsion bars connected between each end portion at the nodal points and a first isolator beam disposed generally perpendicularly to said beams, said isolator beam being connected to said mounting pad portions by a second isolator beam generally parallel to said torsion bars to form a goalpost-like structure.

52. A force sensing element as recited in claim 51, wherein said first isolator beam is stiffer than said torsion bars.

53. A force sensing element as recited in claim 51, wherein said second isolator beam is centrally disposed with respect to said mounting pad portions.

54. A vibrating tine resonator for use as a transducer or the like, said resonator comprising:

a unitary body cut from flat, planar stock and having a generally uniform thickness;

said body including spaced apart end portions; and

said body including a tine system extending between said end portions;

said vibrating tine resonator being characterized by;

said tine system including a pair of similar tine arrays separated by a slot and extending side-by-side between said end portions;

each array including a pair of tines extending parallel to one another; and

a bridge portion spanning said slot and joining adjacent tines of said two arrays.

55. A vibrating tine resonator as claimed in claim 54, each said bridge portion being located at the mid-points of said tines.

56. A vibrating tine resonator as claimed in claim 54, wherein there are only two of said tine arrays.

57. A vibrating tine resonator as claimed in claim 54, wherein said arrays are coupled to one another only by connections of said tines to said body at the ends of said tines.

58. A vibrating tine resonator as claimed in claim 54, further comprising means for exciting said tines to vibrate in a resonant out-of-plane mode.

59. A vibrating tine resonator as claimed in claim 58, wherein said exciting means comprises electrodes coupled to said tines.

60. A vibrating tine resonator as claimed in claim 59, wherein said electrodes include metallized areas on the surfaces of said tines.

61. A vibrating tine resonator as claimed in claim 60, wherein said electrodes are located substantially only on the major surfaces of said tines.

62. A vibrating tine resonator as claimed in claim 61, wherein said electrodes comprise a pair of electrodes disposed in a parallel relationship on each of the major surfaces of said tines.

63. A vibrating tine resonator as claimed in claim 62, wherein said electrodes cross over each other along the length of said tines.

64. A vibrating tine resonator as claimed in claim 62, wherein said electrodes wind around said tines.