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Transient energy release microdevices and methods

  • US 5,367,878 A
  • Filed: 12/10/1992
  • Issued: 11/29/1994
  • Est. Priority Date: 11/08/1991
  • Status: Expired due to Fees
First Claim
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1. A microdevice for providing motion at a high repetition rate, including in combination:

  • a cell having a membrane separating the interior of said cell into two chambers, with at least a portion of said membrane movable;

    a charge of gas in said cell; and

    means for directly heating said gas selectively to increase the gas pressure in one of said chambers and move said membrane portion,said means for heating including pulse means for generating transient gas pressure increases in a chamber;

    said cell including means for cooling said gas for reducing the gas pressure;

    with said movable membrane portion being bistable and having first and second stable positions and movable from one of said positions to the other of said positions by change in gas pressure in said chambers of said cell.

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